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    OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION
    1.
    发明申请
    OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION 有权
    具有热衰减的光学成像装置

    公开(公告)号：US20090135385A1

    公开(公告)日：2009-05-28

    申请号：US12267074

    申请日：2008-11-07

    申请人： Bernhard Gellrich ,  Jens Kugler ,  Thomas Ittner ,  Stefan Hembacher ,  Karl-Heinz Schimitzek ,  Payam Tayebati ,  Hubert Holderer

    发明人： Bernhard Gellrich ,  Jens Kugler ,  Thomas Ittner ,  Stefan Hembacher ,  Karl-Heinz Schimitzek ,  Payam Tayebati ,  Hubert Holderer

    IPC分类号： G03B27/52

    CPC分类号： G03F7/70341 ,  G03F7/70891

    摘要： An optical imaging device, in particular for use in microlithography, includes a mask device for receiving a mask having a projection pattern, a projection device with an optical element group, a substrate device for receiving a substrate and an immersion zone. The optical element group is adapted to project the projection pattern onto the substrate and includes a plurality of optical elements with an immersion element to which the substrate is at least temporarily located adjacent to during operation. During operation, the immersion zone is located between the immersion element and the substrate and is at least temporarily filled with an immersion medium. A thermal attenuation device is provided, the thermal attenuation device being adapted to reduce fluctuations within the temperature distribution of the immersion element induced by the immersion medium.

    摘要翻译： 特别是用于微光刻的光学成像装置包括用于接收具有投影图案的掩模的掩模装置，具有光学元件组的投影装置，用于接收基板的基板装置和浸没区。 光学元件组适于将投影图案投影到基板上并且包括具有浸没元件的多个光学元件，基板在工作期间至少临时定位到该浸没元件。 在操作期间，浸没区域位于浸没元件和基底之间，并且至少暂时填充浸渍介质。 提供一种热衰减装置，该热衰减装置适于减少浸入式介质引起的浸没元件的温度分布内的波动。

    Optical imaging device with thermal attenuation
    2.
    发明授权
    Optical imaging device with thermal attenuation 有权
    具有热衰减的光学成像装置

    公开(公告)号：US08363206B2

    公开(公告)日：2013-01-29

    申请号：US12267074

    申请日：2008-11-07

    申请人： Bernhard Gellrich ,  Jens Kugler ,  Thomas Ittner ,  Stefan Hembacher ,  Karl-Heinz Schimitzek ,  Payam Tayebati ,  Hubert Holderer

    发明人： Bernhard Gellrich ,  Jens Kugler ,  Thomas Ittner ,  Stefan Hembacher ,  Karl-Heinz Schimitzek ,  Payam Tayebati ,  Hubert Holderer

    IPC分类号： G03B27/52 ,  G03B27/42

    CPC分类号： G03F7/70341 ,  G03F7/70891

    摘要： An optical imaging device, in particular for use in microlithography, includes a mask device for receiving a mask having a projection pattern, a projection device with an optical element group, a substrate device for receiving a substrate and an immersion zone. The optical element group is adapted to project the projection pattern onto the substrate and includes a plurality of optical elements with an immersion element to which the substrate is at least temporarily located adjacent to during operation. During operation, the immersion zone is located between the immersion element and the substrate and is at least temporarily filled with an immersion medium. A thermal attenuation device is provided, the thermal attenuation device being adapted to reduce fluctuations within the temperature distribution of the immersion element induced by the immersion medium.

    摘要翻译： 特别是用于微光刻的光学成像装置包括用于接收具有投影图案的掩模的掩模装置，具有光学元件组的投影装置，用于接收基板的基板装置和浸没区。 光学元件组适于将投影图案投影到基板上并且包括具有浸没元件的多个光学元件，基板在工作期间至少临时定位到该浸没元件。 在操作期间，浸没区域位于浸没元件和基底之间，并且至少暂时填充浸渍介质。 提供一种热衰减装置，该热衰减装置适于减少浸入式介质引起的浸没元件的温度分布内的波动。

    Optical imaging device
    3.
    发明申请
    Optical imaging device 审中-公开
    光学成像装置

    公开(公告)号：US20080013063A1

    公开(公告)日：2008-01-17

    申请号：US11804632

    申请日：2007-05-18

    申请人： Stefan Hembacher ,  Bernhard Gellrich ,  Jens Kugler

    发明人： Stefan Hembacher ,  Bernhard Gellrich ,  Jens Kugler

    IPC分类号： G02B7/04 ,  G03B27/68

    CPC分类号： G03F7/7015 ,  G03F7/70241 ,  G03F7/70341 ,  G03F7/70825 ,  G03F7/70883

    摘要： There is provided an optical imaging device, in particular for microlithography, comprising at least one optical element and at least one holding device associated to the optical element (109), wherein the holding device holds the optical element and a first part (109.1) of the optical element contacts a first atmosphere and a second part (109.2) of the optical element at least temporarily contacts a second atmosphere. There is provided a reduction device at least reducing dynamic fluctuations in the pressure difference between the first atmosphere and the second atmosphere.

    摘要翻译： 提供了一种光学成像装置，特别是用于微光刻，包括至少一个光学元件和与光学元件（109）相关联的至少一个保持装置，其中保持装置保持光学元件和第一部分（109.1） 光学元件接触第一大气，并且光学元件的第二部分（109.2）至少临时接触第二气氛。 提供一种还原装置，至少减少第一大气和第二气氛之间的压差的动态波动。

    Optical imaging device and method for reducing dynamic fluctuations in pressure difference
    6.
    发明授权
    Optical imaging device and method for reducing dynamic fluctuations in pressure difference 有权
    光学成像装置和降低压差动态波动的方法

    公开(公告)号：US08027023B2

    公开(公告)日：2011-09-27

    申请号：US11985884

    申请日：2007-11-19

    申请人： Stefan Hembacher ,  Bernhard Gellrich ,  Jens Kugler ,  Sascha Bleidistel

    发明人： Stefan Hembacher ,  Bernhard Gellrich ,  Jens Kugler ,  Sascha Bleidistel

    IPC分类号： G03B27/52 ,  G03B27/42 ,  G03B27/68 ,  G03B27/60

    CPC分类号： G03F7/70883 ,  G03F7/70241 ,  G03F7/70341 ,  G03F7/70825

    摘要： There is provided an optical imaging device, in particular for microlithography, comprising at least one optical element and at least one holding device associated to the optical element (109), wherein the holding device holds the optical element and a first part (109.1) of the optical element contacts a first atmosphere and a second part (109.2) of the optical element at least temporarily contacts a second atmosphere. There is provided a reduction device at least reducing dynamic fluctuations in the pressure difference between the first atmosphere and the second atmosphere.

    摘要翻译： 提供了一种光学成像装置，特别是用于微光刻，包括至少一个光学元件和与光学元件（109）相关联的至少一个保持装置，其中保持装置保持光学元件和第一部分（109.1） 光学元件接触第一大气，并且光学元件的第二部分（109.2）至少临时接触第二气氛。 提供一种还原装置，至少减少第一大气和第二气氛之间的压差的动态波动。

    OPTICAL IMAGING DEVICE AND METHOD FOR REDUCING DYNAMIC FLUCTUATIONS IN PRESSURE DIFFERENCE
    9.
    发明申请
    OPTICAL IMAGING DEVICE AND METHOD FOR REDUCING DYNAMIC FLUCTUATIONS IN PRESSURE DIFFERENCE 有权
    光学成像装置和降低压力差动态波动的方法

    公开(公告)号：US20120026479A1

    公开(公告)日：2012-02-02

    申请号：US13229114

    申请日：2011-09-09

    申请人： Stefan Hembacher ,  Bernhard Gellrich ,  Jens Kugler ,  Sascha Bleidistel

    发明人： Stefan Hembacher ,  Bernhard Gellrich ,  Jens Kugler ,  Sascha Bleidistel

    IPC分类号： G03B27/42

    CPC分类号： G03F7/70883 ,  G03F7/70241 ,  G03F7/70341 ,  G03F7/70825

    摘要： There is provided an optical imaging device, in particular for microlithography, comprising at least one optical element and at least one holding device associated to the optical element (109), wherein the holding device holds the optical element and a first part (109.1) of the optical element contacts a first atmosphere and a second part (109.2) of the optical element at least temporarily contacts a second atmosphere. There is provided a reduction device at least reducing dynamic fluctuations in the pressure difference between the first atmosphere and the second atmosphere.

    摘要翻译： 提供了一种光学成像装置，特别是用于微光刻，包括至少一个光学元件和与光学元件（109）相关联的至少一个保持装置，其中保持装置保持光学元件和第一部分（109.1） 光学元件接触第一大气，并且光学元件的第二部分（109.2）至少临时接触第二气氛。 提供一种还原装置，至少减少第一大气和第二气氛之间的压差的动态波动。