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    Microchannel Plate Devices With Tunable Resistive Films
    3.
    发明申请
    Microchannel Plate Devices With Tunable Resistive Films 审中-公开
    具有可调电阻膜的微通道板装置

    公开(公告)号：US20120273689A1

    公开(公告)日：2012-11-01

    申请号：US13543804

    申请日：2012-07-07

    申请人： Neal T. Sullivan ,  Anton Tremsin ,  Philippe de Rouffignac ,  David Beaulieu ,  Kourosh Saadatmand ,  Steve Bachman ,  Ken Stenton

    发明人： Neal T. Sullivan ,  Anton Tremsin ,  Philippe de Rouffignac ,  David Beaulieu ,  Kourosh Saadatmand ,  Steve Bachman ,  Ken Stenton

    IPC分类号： G01T3/00

    CPC分类号： H01J43/246 ,  G01T3/08

    摘要： A microchannel plate for detecting neutrons includes a hydrogen-rich polymer substrate that defines a plurality of channels extending from a top surface of the substrate to a bottom surface of the substrate, where neutrons interact with the plurality of channels to generate at least one secondary electron. A top electrode is positioned on the top surface of the substrate and a bottom electrode is positioned on the bottom surface of the substrate. A resistive layer is formed over an outer surface of the plurality of channels that provides ohmic conduction with a resistivity that is substantially constant. An emissive layer is formed over the resistive layer. Neutron interaction products interact with the plurality of channels defined by the substrate and the emissive films to generate secondary electrons that cascade within the plurality of channels to provide an amplified signal related to the detection of neutrons.

    摘要翻译： 用于检测中子的微通道板包括富氢聚合物基底，其限定从基底的顶表面延伸到基底的底表面的多个通道，其中中子与多个通道相互作用以产生至少一个二次电子 。 顶部电极位于衬底的顶表面上，底部电极位于衬底的底表面上。 电阻层形成在多个通道的外表面上，其提供基本恒定的电阻率的欧姆导电。 在电阻层上形成发光层。 中子相互作用产物与由衬底和发射膜限定的多个通道相互作用以产生在多个通道内级联的二次电子，以提供与中子检测有关的放大信号。

    Method Of Fabricating Microchannel Plate Devices With Multiple Emissive Layers
    4.
    发明申请
    Method Of Fabricating Microchannel Plate Devices With Multiple Emissive Layers 有权
    制造具有多个发射层的微通道板装置的方法

    公开(公告)号：US20090215211A1

    公开(公告)日：2009-08-27

    申请号：US12038139

    申请日：2008-02-27

    申请人： Anton Tremsin ,  Philippe de Rouffignac ,  Neal T. Sullivan ,  David Beaulieu ,  Michael D. Potter

    发明人： Anton Tremsin ,  Philippe de Rouffignac ,  Neal T. Sullivan ,  David Beaulieu ,  Michael D. Potter

    IPC分类号： H01L21/28 ,  B05D5/12

    CPC分类号： H01J43/246 ,  H01J9/125

    摘要： A method of fabricating a microchannel plate includes defining a plurality of pores extending from a top surface of a substrate to a bottom surface of the substrate where the plurality of pores has a resistive material on an outer surface that forms a first emissive layer. A second emissive layer is formed over the first emissive layer. The second emissive layer is chosen to achieve at least one of an increase in secondary electron emission efficiency and a decrease in gain degradation as a function of time. A top electrode is formed on the top surface of the substrate and a bottom electrode is formed on the bottom surface of the substrate.

    摘要翻译： 制造微通道板的方法包括限定从衬底的顶表面延伸到衬底的底表面的多个孔，其中多个孔在形成第一发射层的外表面上具有电阻材料。 在第一发射层上形成第二发射层。 选择第二发射层以实现二次电子发射效率的增加和随着时间的函数的增益降低的降低中的至少一个。 顶部电极形成在衬底的顶表面上，底电极形成在衬底的底表面上。

    MICROCHANNEL PLATE DEVICES WITH TUNABLE RESISTIVE FILMS
    6.
    发明申请
    MICROCHANNEL PLATE DEVICES WITH TUNABLE RESISTIVE FILMS 有权
    具有可调电阻膜的微通道板器件

    公开(公告)号：US20100044577A1

    公开(公告)日：2010-02-25

    申请号：US12392064

    申请日：2009-02-24

    申请人： Neal T. Sullivan ,  Anton Tremsin ,  Phiippe De Rouffignac ,  David Beaulieu ,  Kourosh Saadatmand ,  Steve Bachman ,  Ken Stenton

    发明人： Neal T. Sullivan ,  Anton Tremsin ,  Phiippe De Rouffignac ,  David Beaulieu ,  Kourosh Saadatmand ,  Steve Bachman ,  Ken Stenton

    IPC分类号： G01T3/00

    CPC分类号： H01J43/246 ,  G01T3/08

    摘要： A microchannel plate for detecting neutrons includes a hydrogen-rich polymer substrate that defines a plurality of channels extending from a top surface of the substrate to a bottom surface of the substrate, where neutrons interact with the plurality of channels to generate at least one secondary electron. A top electrode is positioned on the top surface of the substrate and a bottom electrode is positioned on the bottom surface of the substrate. A resistive layer is formed over an outer surface of the plurality of channels that provides ohmic conduction with a resistivity that is substantially constant. An emissive layer is formed over the resistive layer. Neutron interaction products interact with the plurality of channels defined by the substrate and the emissive films to generate secondary electrons that cascade within the plurality of channels to provide an amplified signal related to the detection of neutrons.

    摘要翻译： 用于检测中子的微通道板包括富氢聚合物基底，其限定从基底的顶表面延伸到基底的底表面的多个通道，其中中子与多个通道相互作用以产生至少一个二次电子 。 顶部电极位于衬底的顶表面上，底部电极位于衬底的底表面上。 电阻层形成在多个通道的外表面上，其提供基本恒定的电阻率的欧姆导电。 在电阻层上形成发光层。 中子相互作用产物与由衬底和发射膜限定的多个通道相互作用以产生在多个通道内级联的二次电子，以提供与中子检测有关的放大信号。

    Synchronous raster scanning lithographic system
    7.
    发明授权
    Synchronous raster scanning lithographic system 有权
    同步光栅扫描光刻系统

    公开(公告)号：US07425713B2

    公开(公告)日：2008-09-16

    申请号：US11331545

    申请日：2006-01-13

    申请人： David Beaulieu

    发明人： David Beaulieu

    IPC分类号： G03F9/00 ,  G21K5/10

    CPC分类号： H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/70383 ,  G03F7/70391 ,  G03F7/704 ,  H01J2237/31774

    摘要： A multi-beam synchronous raster scanning lithography system includes a processor that generates electrical signals representing a desired exposure pattern at an output. A multi-beam source of exposing radiation generates a plurality of exposure beam. A beam modulator receives the electrical signals generated by the processor and modulates the plurality of exposing beams according to the desired exposure pattern. A beam deflector deflects the plurality of exposure beams by a predetermined distance along a first axis, thereby exposing a plurality of pixels along the first axis with the desired exposure pattern. A translation stage moves the substrate a predetermined distance along a second axis to position the substrate for a subsequent exposure of pixels along the first axis that results in a desired overlapping exposure dose profile.

    摘要翻译： 多光束同步光栅扫描光刻系统包括在输出处产生表示期望曝光图案的电信号的处理器。 曝光辐射的多光束源产生多个曝光光束。 光束调制器接收由处理器产生的电信号，并根据期望的曝光图案调制多个曝光光束。 光束偏转器沿着第一轴将多个曝光光束偏转预定距离，从而以期望的曝光图案沿着第一轴露出多个像素。 平移台沿着第二轴移动衬底预定距离以定位衬底，以便随后沿着第一轴曝光像素，导致期望的重叠曝光剂量分布。

    Silicon Microchannel Plate Devices With Smooth Pores And Precise Dimensions
    9.
    发明申请
    Silicon Microchannel Plate Devices With Smooth Pores And Precise Dimensions 有权
    具有光滑孔和精确尺寸的硅微通道板装置

    公开(公告)号：US20100075445A1

    公开(公告)日：2010-03-25

    申请号：US12234641

    申请日：2008-09-20

    申请人： David Beaulieu ,  Neal T. Sullivan

    发明人： David Beaulieu ,  Neal T. Sullivan

    IPC分类号： H01L21/30

    CPC分类号： H01J31/507 ,  H01J9/125 ,  H01J43/246 ,  H01J2231/5016 ,  Y10S977/888

    摘要： A method of fabricating a microchannel plate includes forming a plurality of pores in a silicon substrate. The plurality of pores is oxidized, thereby consuming silicon at surfaces of the plurality of pores and forming a silicon dioxide layer over the plurality of pores. At least a portion of the silicon dioxide layer is stripped, which reduces a surface roughness of the plurality of pores. A semiconducting layer can be deposited onto the surface of the silicon dioxide layer. The semiconducting layer is then oxidized, thereby consuming at least some of the polysilicon or amorphous silicon layer and forming an insulating layer. Resistive and secondary electron emissive layers are then deposited on the insulating layer by atomic layer deposition.

    摘要翻译： 一种制造微通道板的方法包括在硅衬底中形成多个孔。 多个孔被氧化，从而在多个孔的表面消耗硅，并在多个孔上形成二氧化硅层。 剥离二氧化硅层的至少一部分，这降低了多个孔的表面粗糙度。 半导体层可沉积在二氧化硅层的表面上。 然后氧化半导体层，从而消耗多晶硅或非晶硅层中的至少一些并形成绝缘层。 然后通过原子层沉积将电阻和二次电子发射层沉积在绝缘层上。

    Microchannel plate devices with tunable resistive films
    10.
    发明授权
    Microchannel plate devices with tunable resistive films 有权
    具有可调电阻膜的微通道板器件

    公开(公告)号：US08237129B2

    公开(公告)日：2012-08-07

    申请号：US12392064

    申请日：2009-02-24

    申请人： Neal T. Sullivan ,  Anton Tremsin ,  Philippe de Rouffignac ,  David Beaulieu ,  Kourosh Saadatmand ,  Steve Bachman ,  Ken Stenton ,  Dmitry Gorelikov

    发明人： Neal T. Sullivan ,  Anton Tremsin ,  Philippe de Rouffignac ,  David Beaulieu ,  Kourosh Saadatmand ,  Steve Bachman ,  Ken Stenton ,  Dmitry Gorelikov

    IPC分类号： G01T3/00

    CPC分类号： H01J43/246 ,  G01T3/08

    摘要： A microchannel plate for detecting neutrons includes a hydrogen-rich polymer substrate that defines a plurality of channels extending from a top surface of the substrate to a bottom surface of the substrate, where neutrons interact with the plurality of channels to generate at least one secondary electron. A top electrode is positioned on the top surface of the substrate and a bottom electrode is positioned on the bottom surface of the substrate. A resistive layer is formed over an outer surface of the plurality of channels that provides ohmic conduction with a resistivity that is substantially constant. An emissive layer is formed over the resistive layer. Neutron interaction products interact with the plurality of channels defined by the substrate and the emissive films to generate secondary electrons that cascade within the plurality of channels to provide an amplified signal related to the detection of neutrons.

    摘要翻译： 用于检测中子的微通道板包括富氢聚合物基底，其限定从基底的顶表面延伸到基底的底表面的多个通道，其中中子与多个通道相互作用以产生至少一个二次电子 。 顶部电极位于衬底的顶表面上，底部电极位于衬底的底表面上。 电阻层形成在多个通道的外表面上，其提供基本恒定的电阻率的欧姆导电。 在电阻层上形成发光层。 中子相互作用产物与由衬底和发射膜限定的多个通道相互作用以产生在多个通道内级联的二次电子，以提供与中子检测有关的放大信号。