公开(公告)号：US20110303009A1

公开(公告)日：2011-12-15

申请号：US13015927

申请日：2011-01-28

申请人： Bin Yang ,  Zhen-kui Meng ,  Rui Zhang ,  Zhou Ge ,  Yi-lin Yan

发明人： Bin Yang ,  Zhen-kui Meng ,  Rui Zhang ,  Zhou Ge ,  Yi-lin Yan

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18

摘要： An tri-axis accelerometer is disclosed. The tri-axis accelerometer includes a mass, a first group of capacitance, a third group of capacitance being neighbor to the first group of capacitance. The mass defines an upper surface, a lower surface parallel to the upper surface and a side wall connecting the upper surface and the lower surface. The first group of capacitance includes a first movable electrode and the third group of capacitance includes a third movable electrode. The first movable electrode is perpendicular to the third movable electrode.

摘要翻译： 公开了三轴加速度计。 三轴加速度计包括质量，第一组电容，第三组电容与第一组电容相邻。 该物体限定上表面，平行于上表面的下表面和连接上表面和下表面的侧壁。 第一组电容包括第一可移动电极，第三组电容包括第三可移动电极。 第一可动电极垂直于第三可移动电极。

公开(公告)号：US08413511B2

公开(公告)日：2013-04-09

申请号：US13015987

申请日：2011-01-28

申请人： Zhou Ge ,  Bin Yang ,  Zheng-Kui Meng ,  Yi-Lin Yan ,  Rui Zhang

发明人： Zhou Ge ,  Bin Yang ,  Zheng-Kui Meng ,  Yi-Lin Yan ,  Rui Zhang

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/0848 ,  G01P2015/0854

摘要： A accelerometer includes a substrate define a stationary electrode thereon, a first moveable mass defining a conductive-layer thereon facing the stationary electrode, a plurality of first elastic elements coupled with a peripheral side of the first moveable mass, a first fixed element surrounding the first moveable mass and fixedly attached to the substrate, a plurality of first fixed electrodes extending outwardly from the first fixed element, a second moveable mass surrounding the first fixed electrodes, a plurality of first moveable electrodes extending inwardly from the second moveable mass toward the first fixed element and parallel to the first fixed electrodes, respectively, a plurality of second elastic elements coupled with a peripheral side of the second moveable mass, and a second fixed element surrounding the second moveable mass and fixedly attached to the substrate.

摘要翻译： 加速度计包括在其上限定固定电极的基板，限定其面向固定电极的导电层的第一可移动质量块，与第一可移动质量块的周边连接的多个第一弹性元件，围绕第一 可移动的质量并且固定地附接到基板，从第一固定元件向外延伸的多个第一固定电极，围绕第一固定电极的第二可移动质量;从第二可移动质量向内朝向第一固定 并且与第一固定电极平行的多个第二弹性元件分别与第二可移动质量体的周边连接，第二固定元件围绕第二可移动质量块并且固定地附着在基底上。

公开(公告)号：US20110296916A1

公开(公告)日：2011-12-08

申请号：US13015987

申请日：2011-01-28

申请人： Zhou Ge ,  Bin Yang ,  Zheng-Kui Meng ,  Yi-Lin Yan ,  Rui Zhang

发明人： Zhou Ge ,  Bin Yang ,  Zheng-Kui Meng ,  Yi-Lin Yan ,  Rui Zhang

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/0848 ,  G01P2015/0854

摘要： A accelerometer includes a substrate define a stationary electrode thereon, a first moveable mass defining a conductive-layer thereon facing the stationary electrode, a plurality of first elastic elements coupled with a peripheral side of the first moveable mass, a first fixed element surrounding the first moveable mass and fixedly attached to the substrate, a plurality of first fixed electrodes extending outwardly from the first fixed element, a second moveable mass surrounding the first fixed electrodes, a plurality of first moveable electrodes extending inwardly from the second moveable mass toward the first fixed to element and parallel to the first fixed electrodes, respectively, a plurality of second elastic elements coupled with a peripheral side of the second moveable mass, and a second fixed element surrounding the second moveable mass and fixedly attached to the substrate.

摘要翻译： 加速度计包括在其上限定固定电极的基板，限定其面向固定电极的导电层的第一可移动质量块，与第一可移动质量块的周边连接的多个第一弹性元件，围绕第一 可移动的质量并且固定地附接到基板，从第一固定元件向外延伸的多个第一固定电极，围绕第一固定电极的第二可移动质量;从第二可移动质量向内朝向第一固定 分别连接到第一固定电极的元件并且与第二可移动质量体的周边连接的多个第二弹性元件和围绕第二可移动块并固定地附接到基板的第二固定元件。

公开(公告)号：US08731220B2

公开(公告)日：2014-05-20

申请号：US13325488

申请日：2011-12-14

申请人： Rui Zhang ,  Lin-lin Wang ,  Zhou Ge ,  Xiao-lin Zhang

发明人： Rui Zhang ,  Lin-lin Wang ,  Zhou Ge ,  Xiao-lin Zhang

IPC分类号： H04R25/00

CPC分类号： H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  H04R2499/11

摘要： A MEMS microphone includes a silicon substrate, a diaphragm connected to the silicon substrate, a backplate opposed from the diaphragm for forming an air gap. The backplate defines a plurality of first through holes and a plurality of second through holes surrounded by the first through holes, each of the first through holes being formed by a straight boundary and an arc boundary, the radius of the second boundary being greater than half the width of the first boundary.

摘要翻译： MEMS麦克风包括硅衬底，连接到硅衬底的膜片，与膜片相对的用于形成气隙的背板。 背板限定多个第一通孔和由第一通孔围绕的多个第二通孔，每个第一通孔由直边界和弧边界形成，第二边界的半径大于一半 第一个边界的宽度。

公开(公告)号：US20120294464A1

公开(公告)日：2012-11-22

申请号：US13325488

申请日：2011-12-14

申请人： Rui Zhang ,  Lin-lin Wang ,  Zhou Ge ,  Xiao-lin Zhang

发明人： Rui Zhang ,  Lin-lin Wang ,  Zhou Ge ,  Xiao-lin Zhang

IPC分类号： H04R1/00

CPC分类号： H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  H04R2499/11

摘要： A MEMS microphone includes a silicon substrate, a diaphragm connected to the silicon substrate, a backplate opposed from the diaphragm for forming an air gap. The backplate defines a plurality of first through holes and a plurality of second through holes surrounded by the first through holes, each of the first through holes being formed by a straight boundary and an arc boundary, the radius of the second boundary being greater than half the width of the first boundary.

摘要翻译： MEMS麦克风包括硅衬底，连接到硅衬底的膜片，与膜片相对的用于形成气隙的背板。 背板限定多个第一通孔和由第一通孔围绕的多个第二通孔，每个第一通孔由直边界和弧边界形成，第二边界的半径大于一半 第一个边界的宽度。