公开(公告)号：US09840409B2

公开(公告)日：2017-12-12

申请号：US14608038

申请日：2015-01-28

申请人： InvenSense, Inc.

发明人： Matthew Julian Thompson ,  Joseph Seeger

IPC分类号： G01P15/125 ,  B81B3/00 ,  G01P15/08

CPC分类号： B81B3/0016 ,  B81B3/0037 ,  B81B2201/025 ,  B81B2203/0109 ,  B81B2203/0145 ,  B81B2203/053 ,  G01P15/125 ,  G01P2015/0837 ,  G01P2015/0854 ,  G01P2015/086

摘要： A system and method for providing a MEMS sensor are disclosed. In a first aspect, the system is a MEMS sensor that comprises a substrate, an anchor region coupled to the substrate, at least one support arm coupled to the anchor region, at least two guiding arms coupled to and moving relative to the at least one support arm, a plurality of sensing elements disposed on the at least two guiding arms to measure motion of the at least two guiding arms relative to the substrate, and a proof mass system comprising at least one mass coupled to each of the at least two guiding arms by a set of springs. The proof mass system is disposed outside the anchor region, the at least one support arm, the at least two guiding arms, the set of springs, and the plurality of sensing elements.

公开(公告)号：US20160214853A1

公开(公告)日：2016-07-28

申请号：US14608038

申请日：2015-01-28

申请人： InvenSense, Inc.

发明人： Matthew Julian THOMPSON ,  Joseph SEEGER

IPC分类号： B81B3/00 ,  G01P15/125

CPC分类号： B81B3/0016 ,  B81B3/0037 ,  B81B2201/025 ,  B81B2203/0109 ,  B81B2203/0145 ,  B81B2203/053 ,  G01P15/125 ,  G01P2015/0837 ,  G01P2015/0854 ,  G01P2015/086

摘要： A system and method for providing a MEMS sensor are disclosed. In a first aspect, the system is a MEMS sensor that comprises a substrate, an anchor region coupled to the substrate, at least one support arm coupled to the anchor region, at least two guiding arms coupled to and moving relative to the at least one support arm, a plurality of sensing elements disposed on the at least two guiding arms to measure motion of the at least two guiding arms relative to the substrate, and a proof mass system comprising at least one mass coupled to each of the at least two guiding arms by a set of springs. The proof mass system is disposed outside the anchor region, the at least one support arm, the at least two guiding arms, the set of springs, and the plurality of sensing elements.

摘要翻译： 公开了一种用于提供MEMS传感器的系统和方法。 在第一方面，该系统是MEMS传感器，其包括衬底，耦合到衬底的锚定区域，耦合到锚定区域的至少一个支撑臂，耦合到并相对于至少一个 支撑臂，设置在所述至少两个引导臂上的多个感测元件，以测量所述至少两个引导臂相对于所述基底的运动;以及证明质量系统，其包括耦合到所述至少两个引导件 武器由一套弹簧。 检测质量系统设置在锚定区域外部，至少一个支撑臂，至少两个引导臂，该组弹簧和多个感测元件。

公开(公告)号：US20120090393A1

公开(公告)日：2012-04-19

申请号：US13163860

申请日：2011-06-20

申请人： Josep Montanya Silvestre ,  Daniel Fernandez Martinez

发明人： Josep Montanya Silvestre ,  Daniel Fernandez Martinez

IPC分类号： G01P15/13

CPC分类号： G01P15/08 ,  G01P15/00 ,  G01P15/0802 ,  G01P15/0891 ,  G01P15/097 ,  G01P15/125 ,  G01P15/13 ,  G01P15/16 ,  G01P21/00 ,  G01P2015/0805 ,  G01P2015/0837 ,  G01P2015/0854 ,  G01P2015/0857

摘要： The systems and methods described herein address deficiencies in the prior art by enabling the fabrication and use of accelerometers, whether MEMS-based, NEMS-based, or CMOS-MEMS based, in the same integrated circuit die as a CMOS chip. In one embodiment, the accelerometer is fabricated on the same integrated circuit die as a CMOS chip using a typical CMOS manufacturing process.

摘要翻译： 本文描述的系统和方法通过在与CMOS芯片相同的集成电路管芯中制造和使用加速度计（无论是基于MEMS的，基于NEMS的还是基于CMOS-MEMS的）来解决现有技术中的缺陷。 在一个实施例中，使用典型的CMOS制造工艺将加速度计制造在与CMOS芯片相同的集成电路管芯上。

公开(公告)号：US08413511B2

公开(公告)日：2013-04-09

申请号：US13015987

申请日：2011-01-28

申请人： Zhou Ge ,  Bin Yang ,  Zheng-Kui Meng ,  Yi-Lin Yan ,  Rui Zhang

发明人： Zhou Ge ,  Bin Yang ,  Zheng-Kui Meng ,  Yi-Lin Yan ,  Rui Zhang

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/0848 ,  G01P2015/0854

摘要： A accelerometer includes a substrate define a stationary electrode thereon, a first moveable mass defining a conductive-layer thereon facing the stationary electrode, a plurality of first elastic elements coupled with a peripheral side of the first moveable mass, a first fixed element surrounding the first moveable mass and fixedly attached to the substrate, a plurality of first fixed electrodes extending outwardly from the first fixed element, a second moveable mass surrounding the first fixed electrodes, a plurality of first moveable electrodes extending inwardly from the second moveable mass toward the first fixed element and parallel to the first fixed electrodes, respectively, a plurality of second elastic elements coupled with a peripheral side of the second moveable mass, and a second fixed element surrounding the second moveable mass and fixedly attached to the substrate.

摘要翻译： 加速度计包括在其上限定固定电极的基板，限定其面向固定电极的导电层的第一可移动质量块，与第一可移动质量块的周边连接的多个第一弹性元件，围绕第一 可移动的质量并且固定地附接到基板，从第一固定元件向外延伸的多个第一固定电极，围绕第一固定电极的第二可移动质量;从第二可移动质量向内朝向第一固定 并且与第一固定电极平行的多个第二弹性元件分别与第二可移动质量体的周边连接，第二固定元件围绕第二可移动质量块并且固定地附着在基底上。

公开(公告)号：US20120125102A1

公开(公告)日：2012-05-24

申请号：US12594862

申请日：2009-04-01

申请人： Isao Hattori ,  Toshiyuki Nozoe

发明人： Isao Hattori ,  Toshiyuki Nozoe

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/0817 ,  G01P2015/0842 ,  G01P2015/0845 ,  G01P2015/0854 ,  G01P2015/0857

摘要： An acceleration sensor includes a driver circuit for outputting a biased alternating-current (AC) voltage having a variable bias voltage, a detector element having a capacitance provided between a fixed electrode and a movable electrode changing depending on acceleration applied to the detector element, a current-voltage (C/V) converter for converting a current output from the movable electrode of the detector element into a voltage and outputting the voltage, a first operational amplifier outputting a voltage depending on the input voltage, a synchronous demodulator for synchronously detecting the voltage output from the first operational amplifier, and a defect detector for outputting a defect detection signal when the defect detector determines that the voltage output from the first operational amplifier is out of a predetermined range while the biased AC voltage output from the driver circuit is a predetermined voltage. This acceleration sensor can have a small size.

摘要翻译： 加速度传感器包括用于输出具有可变偏置电压的偏置交流（AC）电压的驱动器电路，具有根据施加到检测器元件的加速度而改变的固定电极和可动电极之间的电容的检测器元件， 电流电压（C / V）转换器，用于将从检测器元件的可移动电极输出的电流转换成电压并输出电压;输出根据输入电压的电压的第一运算放大器;同步解调器，用于同步检测 以及缺陷检测器，用于当缺陷检测器确定从第一运算放大器输出的电压超出预定范围时输出缺陷检测信号，而从驱动器电路输出的偏置AC电压为 预定电压。 该加速度传感器可以具有小尺寸。

公开(公告)号：US20110296916A1

公开(公告)日：2011-12-08

申请号：US13015987

申请日：2011-01-28

申请人： Zhou Ge ,  Bin Yang ,  Zheng-Kui Meng ,  Yi-Lin Yan ,  Rui Zhang

发明人： Zhou Ge ,  Bin Yang ,  Zheng-Kui Meng ,  Yi-Lin Yan ,  Rui Zhang

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/0848 ,  G01P2015/0854

摘要： A accelerometer includes a substrate define a stationary electrode thereon, a first moveable mass defining a conductive-layer thereon facing the stationary electrode, a plurality of first elastic elements coupled with a peripheral side of the first moveable mass, a first fixed element surrounding the first moveable mass and fixedly attached to the substrate, a plurality of first fixed electrodes extending outwardly from the first fixed element, a second moveable mass surrounding the first fixed electrodes, a plurality of first moveable electrodes extending inwardly from the second moveable mass toward the first fixed to element and parallel to the first fixed electrodes, respectively, a plurality of second elastic elements coupled with a peripheral side of the second moveable mass, and a second fixed element surrounding the second moveable mass and fixedly attached to the substrate.

摘要翻译： 加速度计包括在其上限定固定电极的基板，限定其面向固定电极的导电层的第一可移动质量块，与第一可移动质量块的周边连接的多个第一弹性元件，围绕第一 可移动的质量并且固定地附接到基板，从第一固定元件向外延伸的多个第一固定电极，围绕第一固定电极的第二可移动质量;从第二可移动质量向内朝向第一固定 分别连接到第一固定电极的元件并且与第二可移动质量体的周边连接的多个第二弹性元件和围绕第二可移动块并固定地附接到基板的第二固定元件。

公开(公告)号：US11754591B2

公开(公告)日：2023-09-12

申请号：US17006296

申请日：2020-08-28

申请人： Honeywell International Inc.

发明人： John Reinke

IPC分类号： G01P15/125 ,  G01P15/00 ,  G01P15/097 ,  B81B3/00 ,  B81B7/00 ,  H10N30/00 ,  H03H9/24 ,  G01P15/08

CPC分类号： G01P15/097 ,  B81B3/0021 ,  B81B7/007 ,  G01P15/125 ,  H10N30/00 ,  B81B2201/0235 ,  G01P2015/0854 ,  G01P2015/0882 ,  H03H9/2473

摘要： The disclosure describes techniques to damp the proof mass motion of an accelerometer while achieving an underdamped resonator. In an example of an in-plane micro-electromechanical systems (MEMS) VBA, the proof mass may contain one or more damping combs that include one or more banks of rotor comb fingers attached to the proof mass. The rotor comb fingers may be interdigitated with stator comb fingers that are attached to fixed geometry. These damping comb fingers may provide air damping for the proof mass when the MEMS die is placed into a package containing a pressure above a vacuum. The geometry of the damping combs with a reduced air gap and large overlap area between the rotor comb fingers and stator comb fingers. The geometry of resonator of the VBA of this disclosure may be configured to avoid air damping.

公开(公告)号：US09366585B2

公开(公告)日：2016-06-14

申请号：US14034740

申请日：2013-09-24

申请人： ACREO SWEDISH ICT AB

发明人： Gert Andersson ,  Milena Anguelova ,  Nils Hedenstierna ,  Alexandra Nafari ,  David Westberg

IPC分类号： G01L1/04 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01P15/02

CPC分类号： G01L1/04 ,  G01P15/02 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0854 ,  G01P2015/0857

摘要： A device for measuring force components formed from a single crystal material, wherein the device comprises at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, which mass body provides a mass of inertia. The mass body has a first and a second major surface which are substantially parallel with a wafer plane. A mass body cross section presents a portion which is substantially symmetrical along a centrally (in the thickness direction) located plane parallel with the wafer plane. Disclosed is also a method for its production and an accelerometer comprising at least one such device. The device allow for a more compact 3-axis accelerometer.

摘要翻译： 一种用于测量由单晶材料形成的力分量的装置，其中所述装置包括至少一个垂直于晶片平面倾斜并且与质量体一体形成的悬臂梁，所述质量体提供了一定的惯性。 质量体具有大致平行于晶片平面的第一和第二主表面。 质量体横截面具有沿着与晶片平面平行的中心（在厚度方向）定位的平面基本对称的部分。 公开了其生产方法和包括至少一种这样的装置的加速度计。 该器件允许更紧凑的3轴加速度计。

公开(公告)号：US20120235694A1

公开(公告)日：2012-09-20

申请号：US13446472

申请日：2012-04-13

申请人： Masaaki ASANO ,  Tsukasa YONEKAWA

发明人： Masaaki ASANO ,  Tsukasa YONEKAWA

IPC分类号： G01R27/08 ,  H05K3/10 ,  G01N27/00

CPC分类号： G01P15/18 ,  G01P15/0802 ,  G01P15/12 ,  G01P2015/0805 ,  G01P2015/0854 ,  G01P2015/0857 ,  Y10T29/49162

摘要： A dynamic quantity sensor includes a first substrate, a fixed part arranged in the first substrate, a spiral shaped movable electrode arranged separated from the first substrate, one end of the spiral shaped movable electrode being supported by the fixed part, a fixed electrode positioned on the periphery of the movable electrode and arranged in a detection direction of a dynamic quantity, and a first terminal electrically connected to the fixed part and a second terminal electrically connected to the fixed electrode.

摘要翻译： 动态量传感器包括第一基板，布置在第一基板中的固定部分，与第一基板分离设置的螺旋形可动电极，螺旋形可动电极的一端由固定部分支撑，固定电极位于 可移动电极的周边并且沿动态量的检测方向布置，以及电连接到固定部分的第一端子和电连接到固定电极的第二端子。

公开(公告)号：US20120042729A1

公开(公告)日：2012-02-23

申请号：US12927282

申请日：2010-11-10

申请人： Chuan-Wei Wang

发明人： Chuan-Wei Wang

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/0837 ,  G01P2015/0854 ,  G01P2015/0857

摘要： The present invention discloses a MEMS (Micro-Electro-Mechanical System, MEMS) accelerator with enhanced structural strength. The MEMS accelerator is located on a substrate, and it includes: multiple springs, wherein each spring includes: an anchor, fixed on the substrate; an extensible part, which has a fixed end fixed on the anchor, and a free end floating above the substrate; a proof mass, connected to the free ends of the springs; and multiple in-plane sense electrodes, wherein the extensible part is folded back and forth to form a substantially polygon shape as a whole, in which the fixed end is located within the middle one third length of one side of the substantially polygon shape, and the free end is located within the middle one third length of an opposite side of the substantially polygon shape.

摘要翻译： 本发明公开了一种具有增强的结构强度的MEMS（微机电系统，MEMS）加速器。 MEMS加速器位于基板上，它包括：多个弹簧，其中每个弹簧包括：锚固件，固定在基板上; 可固定端部固定在锚固体上的可伸长部分和浮在基板上方的自由端; 连接弹簧自由端的检测质量; 以及多个面内感测电极，其中，所述可伸展部分来回折叠以形成整体上基本上为多边形的形状，其中所述固定端位于所述大致多边形形状的一侧的中间三分之一长度内，以及 自由端位于基本上多边形形状的相对侧的中间三分之一长度内。