摘要:
A metrology/inspection system moves the imaging and/or measuring equipment of the system relative to a wafer. Accordingly, measurement or inspection of the wafer does not require that the wafer be mounted on a precision stage. This allows the wafer to be at rest on any structure native in a processing apparatus when the system measures or inspects the wafer. Accordingly, measurement does not require removing the wafer from the processing apparatus and does not delay processing since the wafer can be measured, for example, during a required cool down period of device fabrication process. Alignment of an optical system includes pre-alignment base on edge detection using the optical system and more precise alignment using image recognition. An R-θ stage can position the optical system at inspection areas on the wafer. Image rotation can provide a fixed orientation for all images at the various inspection areas and can maintain the fixed orientation when moving from one inspection area to the next.
摘要:
A metrology system includes a positioning system that produces linear and rotational motion between an imaging system and the wafer. The imaging system produces signals representing the image of the wafer in the field of view of the imaging system. A control system receives and processes the image signals, and generates corrected signals that compensate for rotational movement between the imaging system and the wafer. In response to the corrected signals, a monitor displays an image with the orientation of features on the wafer within the field of view unaffected by the rotational movement.
摘要:
A method for controlling a polar coordinate stage moves an object relative to an imaging system. While moving the object, the image of the object is rotated to compensate for rotation of the object. Accordingly, the orientations of features in the image are preserved, and removal of apparent rotation in the image reduces confusion an operator experiences while directing movement of the object. The angular velocity of the motion of the object is controlled so that image shift speed is independent of the radial position of the point being viewed. Use of a polar stage, reduces the required foot print for a stage and facilitates prealignment. In particular, an edge detector measures the position of the edge of the object while the polar coordinate stage rotates the object. A prealignment process determines the position and orientation of the object from the measured edge positions. A further alignment process uses automated pattern recognition which more easily identifies features on the object when the image is rotated so that the orientations of the feature are approximately known.
摘要:
A metrology system includes a positioning system that produces linear and rotational motion between an imaging system and the wafer. The imaging system produces signals representing the image of the wafer in the field of view of the imaging system. A control system receives and processes the image signals, and generates corrected signals that compensate for rotational movement between the imaging system and the wafer. In response to the corrected signals, a monitor displays an image with the orientation of features on the wafer within the field of view unaffected by the rotational movement.
摘要:
A computer system includes a display and a processor. The processor operable to implement a user interface on the display. The user interface including a plurality of program controls for initiating processing tasks. The processor is operable to, responsive to an activation of a selected program control, place an I/O control associated with the selected program control proximate the selected program control to allow visual association between the I/O control and the selected program control.
摘要:
A method for allowing a user to download authorized media content from one or more websites without a fee includes a sponsor paying the fee for the downloaded authorized media content in exchange for the user playing one or more advertisements in their entirety. In one implementation, a method includes selecting downloadable media content from a graphical user interface, and playing one or more advertisements in their entirety on one or more computers. The method further includes accessing the media content upon playing the one or more advertisements in their entirety, in which a fee for the media content is paid by a sponsor in exchange for a user playing the one or more advertisements in their entirety before the media content is accessed.
摘要:
My invention, the Shielded Self-Stirring Crackling Cooker, was designed to improve the traditional method of cooking cracklings, which involves a cast iron pot over an open heat source and manual stirring. The shield of my invention, which surrounds the cast iron pot, minimizes hot spots and uneven cooking. At the same time, it reduces the amount of heat required. The self-stirring mechanism provides consistent and constant movement of the cracklings during the entire cooking process, preventing burning and breakage and eliminating the need for manual stirring and shortening the cooking time.
摘要:
A process for the preparation of 4,4'-dinitro-2,2'-di(trifluoromethyl)diphenyl ether according to the equation ##STR1## where X is F, Cl, Br or I, where the inorganic base is selected from the group consisting of alkali metal hydroxides, alkali metal carbonates, and alkali metal bicarbonates, in the presence of a catalytic quantity of a benzoate catalyst. 2,8-Dinitro-6,6,12,12,-tetrafluoro-6H,12H-dibenzo[b,f][1,5]dioxocin, the corresponding diamine and polyimides formed from the diamine are also disclosed.
摘要:
The invention relates to a fin stock material having aluminum, where the material also has a tensile strength of between approximately 14,000 and approximately 26,000 psi, an elongation of less than 30%, and a hardness of between approximately 50 and approximately 70 on a Rockwell 15T scale.