公开(公告)号：US20140124898A1

公开(公告)日：2014-05-08

申请号：US14076094

申请日：2013-11-08

Applicant: Brewer Science Inc.

Inventor： Jyoti K. Malhotra ,  Jeff Leith ,  Curtis Planje

IPC: H01L21/308 ,  G03F1/22 ,  H01L29/06

CPC classification number: H01L29/0676 ,  B81C1/00111 ,  B81C99/008 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/50 ,  G03F7/0035 ,  H01L21/0259 ,  H01L21/02606 ,  H01L29/0665 ,  H01L29/0669 ,  H01L51/0048

Abstract: Manufacturing-friendly and scalable methods for the production of silicon micro- and nanostructures, including silicon nanotubes, are described. The inventive methods utilize conventional integrated circuit and MEMS manufacturing processes, including spin-coating, photolithography, wet and dry silicon etching, and photoassisted electrochemical etch processes. The invention also provides a novel mask, for maximizing the number of tubes obtained per surface area unit of the silicon substrate on which the tubes are built. The resulting tubes have thick and straight outer walls, as well as high aspect ratios.

Abstract translation: 描述了用于生产硅微纳米结构（包括硅纳米管）的制造友好且可扩展的方法。 本发明的方法利用传统的集成电路和MEMS制造工艺，包括旋涂，光刻，湿和干硅蚀刻以及光辅助电化学蚀刻工艺。 本发明还提供了一种新颖的掩模，用于最大化在其上构建管的硅衬底的每表面积单位获得的管的数目。 所得到的管具有厚而直的外壁以及高纵横比。

公开(公告)号：US09299778B2

公开(公告)日：2016-03-29

申请号：US14076094

申请日：2013-11-08

Applicant: Brewer Science Inc.

Inventor： Jyoti K. Malhotra ,  Jeff Leith ,  Curtis Planje

IPC: H01L21/00 ,  H01L29/06 ,  H01L21/02 ,  H01L51/00 ,  B82Y10/00 ,  B82Y40/00 ,  B81C1/00 ,  B81C99/00 ,  G03F1/50 ,  G03F7/00

CPC classification number: H01L29/0676 ,  B81C1/00111 ,  B81C99/008 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/50 ,  G03F7/0035 ,  H01L21/0259 ,  H01L21/02606 ,  H01L29/0665 ,  H01L29/0669 ,  H01L51/0048

Abstract: Manufacturing-friendly and scalable methods for the production of silicon micro- and nanostructures, including silicon nanotubes, are described. The inventive methods utilize conventional integrated circuit and MEMS manufacturing processes, including spin-coating, photolithography, wet and dry silicon etching, and photoassisted electrochemical etch processes. The invention also provides a novel mask, for maximizing the number of tubes obtained per surface area unit of the silicon substrate on which the tubes are built. The resulting tubes have thick and straight outer walls, as well as high aspect ratios.

Abstract translation: 描述了用于生产硅微纳米结构（包括硅纳米管）的制造友好且可扩展的方法。 本发明的方法利用传统的集成电路和MEMS制造工艺，包括旋涂，光刻，湿和干硅蚀刻以及光辅助电化学蚀刻工艺。 本发明还提供了一种新颖的掩模，用于最大化在其上构建管的硅衬底的每表面积单位获得的管的数目。 所得到的管具有厚而直的外壁以及高纵横比。

公开(公告)号：US09117757B2

公开(公告)日：2015-08-25

申请号：US14055691

申请日：2013-10-16

Applicant: Brewer Science Inc.

Inventor： Jyoti K. Malhotra ,  Xing-Fu Zhong

IPC: H01L23/29 ,  H01L21/56 ,  C08K5/11 ,  H01L33/56 ,  C08L83/04

CPC classification number: H01L23/296 ,  C08G77/12 ,  C08G77/20 ,  C08K5/11 ,  C08K5/56 ,  C08L83/00 ,  C08L83/04 ,  H01L21/56 ,  H01L33/56 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Novel compositions and methods of using those compositions to form high refractive index coatings are provided. The compositions comprise a mixture of two silicone polymers, a catalyst, and an inhibitor for the catalyst. The preferred catalyst comprises platinum. Unlike prior art silicone systems, the inventive composition can be provided in a one-part form due to a substantially improved pot life. The compositions can be spin- or spray-applied, followed by baking to crosslink the polymers and form a cured layer. The inventive cured layers have high refractive indices and light transmissions.

Abstract translation: 提供了使用这些组合物形成高折射率涂层的新型组合物和方法。 组合物包含两种硅氧烷聚合物，催化剂和用于催化剂的抑制剂的混合物。 优选的催化剂包括铂。 与现有技术的有机硅系统不同，由于适用期大大提高，本发明组合物可以以一部分形式提供。 可以旋涂或喷涂组合物，然后烘烤以交联聚合物并形成固化层。 本发明的固化层具有高折射率和光透射。

公开(公告)号：US20140103546A1

公开(公告)日：2014-04-17

申请号：US14055691

申请日：2013-10-16

Applicant: Brewer Science Inc.

Inventor： Jyoti K. Malhotra ,  Xing-Fu Zhong

IPC: H01L23/29 ,  H01L33/56 ,  H01L21/56

CPC classification number: H01L23/296 ,  C08G77/12 ,  C08G77/20 ,  C08K5/11 ,  C08K5/56 ,  C08L83/00 ,  C08L83/04 ,  H01L21/56 ,  H01L33/56 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Novel compositions and methods of using those compositions to form high refractive index coatings are provided. The compositions comprise a mixture of two silicone polymers, a catalyst, and an inhibitor for the catalyst. The preferred catalyst comprises platinum. Unlike prior art silicone systems, the inventive composition can be provided in a one-part form due to a substantially improved pot life. The compositions can be spin- or spray-applied, followed by baking to crosslink the polymers and form a cured layer. The inventive cured layers have high refractive indices and light transmissions.

Abstract translation: 提供了使用这些组合物形成高折射率涂层的新型组合物和方法。 组合物包含两种硅氧烷聚合物，催化剂和用于催化剂的抑制剂的混合物。 优选的催化剂包括铂。 与现有技术的有机硅系统不同，由于适用期大大提高，本发明组合物可以以一部分形式提供。 可以旋涂或喷涂组合物，然后烘烤以交联聚合物并形成固化层。 本发明的固化层具有高折射率和光透射。