公开(公告)号：US20210291357A1

公开(公告)日：2021-09-23

申请号：US17335479

申请日：2021-06-01

Applicant: Brooks Automation, Inc.

Inventor： Sean E. PLAISTED ,  Leigh F. SHARROCK ,  Chris AITKEN

IPC: B25J9/04 ,  B25J9/06 ,  B25J9/10 ,  H01L21/683 ,  B25J17/02 ,  B25J15/00 ,  H01L21/687 ,  B25J9/16 ,  H01L21/677 ,  H01L21/67

Abstract: A substrate transport apparatus including; a frame, a substrate transport arm connected to the frame, the substrate transport arm having an end effector, and a drive section having at least one motor coupled to the substrate transport arm, wherein the at least one motor defines a kinematic portion of the drive section configured to effect kinematic motion of the substrate transport arm, and the drive section includes an accessory portion adjacent the kinematic portion, wherein the accessory portion has another motor, different and distinct from the at least one motor, the another motor of the accessory portion is operably coupled to and configured to drive one or more accessory device independent of the kinematic motion of the substrate transport arm.

公开(公告)号：US20170084476A1

公开(公告)日：2017-03-23

申请号：US15369573

申请日：2016-12-05

Applicant: BROOKS AUTOMATION, INC.

Inventor： Leigh F. SHARROCK

IPC: H01L21/68 ,  H01L21/677 ,  H01L21/67

CPC classification number: H01L21/681 ,  H01L21/67017 ,  H01L21/67259 ,  H01L21/67265 ,  H01L21/67772 ,  H01L21/67778 ,  Y10S414/136

Abstract: A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the door and oriented to sense substrates located on the substrate transfer plane.

公开(公告)号：US20210193495A1

公开(公告)日：2021-06-24

申请号：US17136661

申请日：2020-12-29

Applicant: BROOKS AUTOMATION, INC.

Inventor： Leigh F. SHARROCK

IPC: H01L21/68 ,  H01L21/67 ,  H01L21/677

Abstract: A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the door and oriented to sense substrates located on the substrate transfer plane.

公开(公告)号：US20180308728A1

公开(公告)日：2018-10-25

申请号：US15889811

申请日：2018-02-06

Applicant: Brooks Automation, Inc.

Inventor： Alexander KRUPYSHEV ,  Leigh F. SHARROCK ,  Joseph HALLISEY

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677 ,  B25J15/06

CPC classification number: H01L21/67196 ,  B25J15/0616 ,  H01L21/67167 ,  H01L21/67742 ,  H01L21/68707

Abstract: A substrate processing apparatus includes a linearly elongated substantially hexahedron shaped substrate transport chamber having linearly elongated sides of the hexahedron and at least one end wall of the hexahedron substantially orthogonal to the linearly elongated sides. A plurality of process modules are linearly arrayed along the at least one of the linearly elongated sides. A substrate transport arm is pivotally mounted within the substrate transport chamber so that a pivot axis of the substrate transport arm is mounted, fixed relative to the substrate transport chamber. The substrate transport arm has a three link—three joint SCARA configuration, of which one link is an end effector with at least one substrate holder, that is articulate to transport the substrate, and held by the at least one substrate holder, in and out of the substrate transport chamber through the end and side substrate transport openings.

公开(公告)号：US20190237351A1

公开(公告)日：2019-08-01

申请号：US16257595

申请日：2019-01-25

Applicant: Brooks Automation, Inc.

Inventor： Alexander KRUPYSHEV ,  Leigh F. SHARROCK

IPC: H01L21/68 ,  B25J9/16 ,  B25J11/00 ,  B65G47/90 ,  H01L21/67 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/681 ,  B25J9/1697 ,  B25J11/0095 ,  B65G47/905 ,  H01L21/67167 ,  H01L21/67196 ,  H01L21/67259 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/68707

Abstract: A substrate transport apparatus including a transport chamber, a drive section, a robot arm having an end effector at a distal end configured to support a substrate and being connected to the drive section generating at least arm motion in a radial direction extending and retracting the arm, an imaging system with a camera mounted in a predetermined location to image at least part of the robot arm, and a controller connected to the imaging system to image the arm moving to a predetermined repeatable position, the controller effecting capture of a first image of the robot arm proximate to the repeatable position decoupled from encoder data of the drive axis, wherein the controller calculates a positional variance of the robot arm from comparison of the first image with a calibration image, and from the positional variance determines a motion compensation factor changing the extended position of the robot arm.

公开(公告)号：US20190105770A1

公开(公告)日：2019-04-11

申请号：US16151598

申请日：2018-10-04

Applicant: Brooks Automation, Inc.

Inventor： Sean E. PLAISTED ,  Leigh F. SHARROCK ,  Chris AITKEN

IPC: B25J9/04 ,  B25J9/06 ,  B25J9/10 ,  B25J9/16 ,  B25J17/02 ,  B25J15/00 ,  H01L21/687 ,  H01L21/683

Abstract: A substrate transport apparatus including; a frame, a substrate transport arm connected to the frame, the substrate transport arm having an end effector, and a drive section having at least one motor coupled to the substrate transport arm, wherein the at least one motor defines a kinematic portion of the drive section configured to effect kinematic motion of the substrate transport arm, and the drive section includes an accessory portion adjacent the kinematic portion, wherein the accessory portion has another motor, different and distinct from the at least one motor, the another motor of the accessory portion is operably coupled to and configured to drive one or more accessory device independent of the kinematic motion of the substrate transport arm.

公开(公告)号：US20180068881A1

公开(公告)日：2018-03-08

申请号：US15693871

申请日：2017-09-01

Applicant: BROOKS AUTOMATION, INC.

Inventor： Jeffrey A. CAVINS ,  Leigh F. SHARROCK ,  Kyle M. LETOURNEAU ,  Stacy MCKINNEY ,  Dave JARZYNKA

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677

CPC classification number: H01L21/68707 ,  H01L21/67265 ,  H01L21/67271 ,  H01L21/67276 ,  H01L21/67727 ,  H01L21/67766 ,  H01L21/67778 ,  H01L21/68742 ,  H01L21/6875

Abstract: A substrate processing apparatus including a frame and at least one substrate transport arm having at least one end effector, each end effector having a base portion, a first and second substrate support tines mounted to and dependent from the base portion where at least one of the first and second substrate support tines is movable relative to the base portion, each of the first and second substrate support tines having respective substrate contacts configured to contact and support a substrate held by the end effector between the respective contacts of the first and second substrate support tines at a substrate support seat dimension span between the substrate contacts of the first and second substrate support tines, and an end effector drive section configured to vary a distance between the first and second substrate support tines relative to each other on the fly.