-
公开(公告)号:US07938079B2
公开(公告)日:2011-05-10
申请号:US11011366
申请日:2004-12-13
申请人: Bruce H. King , Michael J. Renn , Marcelino Essien , Gregory J. Marquez , Manampathy G. Giridharan , Jyh-Cherng Sheu
发明人: Bruce H. King , Michael J. Renn , Marcelino Essien , Gregory J. Marquez , Manampathy G. Giridharan , Jyh-Cherng Sheu
CPC分类号: H05K3/125
摘要: Method and apparatus for improved maskless deposition of electronic and biological materials using an extended nozzle. The process is capable of direct deposition of features with linewidths varying from a few microns to a fraction of a millimeter, and can be used to deposit features on targets with damage thresholds near 100° C. or less. Deposition and subsequent processing may be performed under ambient conditions and produce linewidths as low as 1 micron, with sub-micron edge definition. The extended nozzle reduces particle overspray and has a large working distance; that is, the orifice to target distance may be several millimeters or more, enabling direct write onto non-planar surfaces. The nozzle allows for deposition of features with linewidths that are approximately as small as one-twentieth the size of the nozzle orifice diameter, and is preferably interchangeable, enabling rapid variance of deposited linewidth.
摘要翻译: 使用扩展喷嘴改善电子和生物材料的无掩模沉积的方法和装置。 该过程能够直线沉积具有从几微米变化到几分之一毫米的线宽的特征,并且可以用于在具有接近100℃或更低的损伤阈值的靶上沉积特征。 沉积和后续处理可以在环境条件下进行,并产生低至1微米的线宽,具有亚微米边缘定义。 扩展喷嘴可以减少颗粒过度喷涂,工作距离大; 也就是说,孔到目标距离可以是几毫米或更多,使得能够直接写在非平面表面上。 喷嘴允许具有大约等于喷嘴孔直径的二十分之二的线宽的特征的沉积,并且优选地是可互换的,使得沉积线宽的快速变化。
-
公开(公告)号:US08455051B2
公开(公告)日:2013-06-04
申请号:US12976906
申请日:2010-12-22
申请人: Michael J. Renn , Bruce H. King , Marcelino Essien , Gregory J. Marquez , Manampathy G. Giridharan , Jyh-Cherng Sheu
发明人: Michael J. Renn , Bruce H. King , Marcelino Essien , Gregory J. Marquez , Manampathy G. Giridharan , Jyh-Cherng Sheu
IPC分类号: B05D5/12
摘要: Apparatuses and processes for maskless deposition of electronic and biological materials. The process is capable of direct deposition of features with linewidths varying from the micron range up to a fraction of a millimeter, and may be used to deposit features on substrates with damage thresholds near 100° C. Deposition and subsequent processing may be carried out under ambient conditions, eliminating the need for a vacuum atmosphere. The process may also be performed in an inert gas environment. Deposition of and subsequent laser post processing produces linewidths as low as 1 micron, with sub-micron edge definition. The apparatus nozzle has a large working distance—the orifice to substrate distance may be several millimeters—and direct write onto non-planar surfaces is possible.
-
3.
公开(公告)号:US07987813B2
公开(公告)日:2011-08-02
申请号:US12349279
申请日:2009-01-06
申请人: Michael J. Renn , Bruce H. King , Marcelino Essien , Gregory J. Marquez , Manampathy G. Giridharan , Jyh-Cherng Sheu
发明人: Michael J. Renn , Bruce H. King , Marcelino Essien , Gregory J. Marquez , Manampathy G. Giridharan , Jyh-Cherng Sheu
摘要: Apparatuses and processes for maskless deposition of electronic and biological materials. The process is capable of direct deposition of features with linewidths varying from the micron range up to a fraction of a millimeter, and may be used to deposit features on substrates with damage thresholds near 100° C. Deposition and subsequent processing may be carried out under ambient conditions, eliminating the need for a vacuum atmosphere. The process may also be performed in an inert gas environment. Deposition of and subsequent laser post processing produces linewidths as low as 1 micron, with sub-micron edge definition. The apparatus nozzle has a large working distance—the orifice to substrate distance may be several millimeters—and direct write onto non-planar surfaces is possible.
摘要翻译: 用于电子和生物材料无掩模沉积的装置和方法。 该过程能够直接沉积具有从微米范围变化到几分之一毫米的线宽的特征,并且可以用于将特征沉积在具有接近100℃的损伤阈值的基底上。沉积和随后的加工可以在 环境条件下,无需真空气氛。 该方法也可以在惰性气体环境中进行。 沉积和随后的激光后处理产生低至1微米的线宽,具有亚微米边缘定义。 设备喷嘴具有大的工作距离 - 孔到基板的距离可以是几毫米,并且直接写入非平面表面是可能的。
-
4.
公开(公告)号:US20110129615A1
公开(公告)日:2011-06-02
申请号:US12976906
申请日:2010-12-22
申请人: Michael J. Renn , Bruce H. King , Marcelino Essien , Gregory J. Marquez , Manampathy G. Giridharan , Jyh-Cherng Sheu
发明人: Michael J. Renn , Bruce H. King , Marcelino Essien , Gregory J. Marquez , Manampathy G. Giridharan , Jyh-Cherng Sheu
IPC分类号: B05D1/02 , B05D1/12 , B05D3/02 , B05D3/06 , B05D5/12 , B05D5/06 , H05K3/00 , B05D5/00 , B05D7/00
摘要: Apparatuses and processes for maskless deposition of electronic and biological materials. The process is capable of direct deposition of features with linewidths varying from the micron range up to a fraction of a millimeter, and may be used to deposit features on substrates with damage thresholds near 100° C. Deposition and subsequent processing may be carried out under ambient conditions, eliminating the need for a vacuum atmosphere. The process may also be performed in an inert gas environment. Deposition of and subsequent laser post processing produces linewidths as low as 1 micron, with sub-micron edge definition. The apparatus nozzle has a large working distance—the orifice to substrate distance may be several millimeters—and direct write onto non-planar surfaces is possible.
摘要翻译: 用于电子和生物材料无掩模沉积的装置和方法。 该过程能够直接沉积具有从微米范围变化到几分之一毫米的线宽的特征,并且可以用于将特征沉积在具有接近100℃的损伤阈值的基底上。沉积和随后的加工可以在 环境条件下,无需真空气氛。 该方法也可以在惰性气体环境中进行。 沉积和随后的激光后处理产生低至1微米的线宽,具有亚微米边缘定义。 设备喷嘴具有大的工作距离 - 孔到基板的距离可以是几毫米,并且直接写入非平面表面是可能的。
-
5.
公开(公告)号:US20090114151A1
公开(公告)日:2009-05-07
申请号:US12349279
申请日:2009-01-06
申请人: Michael J. Renn , Bruce H. King , Marcelino Essien , Gregory J. Marquez , Manampathy G. Giridharan , Jyh-Cherng Sheu
发明人: Michael J. Renn , Bruce H. King , Marcelino Essien , Gregory J. Marquez , Manampathy G. Giridharan , Jyh-Cherng Sheu
IPC分类号: B05C11/00
摘要: Apparatuses and processes for maskless deposition of electronic and biological materials. The process is capable of direct deposition of features with linewidths varying from the micron range up to a fraction of a millimeter, and may be used to deposit features on substrates with damage thresholds near 100° C. Deposition and subsequent processing may be carried out under ambient conditions, eliminating the need for a vacuum atmosphere. The process may also be performed in an inert gas environment. Deposition of and subsequent laser post processing produces linewidths as low as 1 micron, with sub-micron edge definition. The apparatus nozzle has a large working distance—the orifice to substrate distance may be several millimeters—and direct write onto non-planar surfaces is possible.
摘要翻译: 用于电子和生物材料无掩模沉积的装置和方法。 该过程能够直接沉积具有从微米范围变化到几分之一毫米的线宽的特征,并且可以用于在具有接近100℃的损伤阈值的基底上沉积特征。沉积和随后的加工可以在 环境条件下,无需真空气氛。 该方法也可以在惰性气体环境中进行。 沉积和随后的激光后处理产生低至1微米的线宽,具有亚微米边缘定义。 设备喷嘴具有大的工作距离 - 孔到基板的距离可以是几毫米,并且直接写入非平面表面是可能的。
-
6.
公开(公告)号:US07485345B2
公开(公告)日:2009-02-03
申请号:US11317457
申请日:2005-12-22
申请人: Michael J. Renn , Bruce H. King , Marcelino Essien , Gregory J. Marquez , Manampathy G. Giridharan , Jyh-Cherng Sheu
发明人: Michael J. Renn , Bruce H. King , Marcelino Essien , Gregory J. Marquez , Manampathy G. Giridharan , Jyh-Cherng Sheu
IPC分类号: B05D5/00
摘要: Apparatuses and processes for maskless deposition of electronic and biological materials. The process is capable of direct deposition of features with linewidths varying from the micron range up to a fraction of a millimeter, and may be used to deposit features on substrates with damage thresholds near 100° C. Deposition and subsequent processing may be carried out under ambient conditions, eliminating the need for a vacuum atmosphere. The process may also be performed in an inert gas environment. Deposition of and subsequent laser post processing produces linewidths as low as 1 micron, with sub-micron edge definition. The apparatus nozzle has a large working distance—the orifice to substrate distance may be several millimeters—and direct write onto non-planar surfaces is possible.
摘要翻译: 用于电子和生物材料无掩模沉积的装置和方法。 该过程能够直接沉积具有从微米范围变化到几分之一毫米的线宽的特征,并且可以用于将特征沉积在具有接近100℃的损伤阈值的基底上。沉积和随后的加工可以在 环境条件下,无需真空气氛。 该方法也可以在惰性气体环境中进行。 沉积和随后的激光后处理产生低至1微米的线宽,具有亚微米边缘定义。 设备喷嘴具有大的工作距离 - 孔到基板的距离可以是几毫米,并且直接写入非平面表面是可能的。
-
7.
公开(公告)号:US08272579B2
公开(公告)日:2012-09-25
申请号:US12203037
申请日:2008-09-02
IPC分类号: B05B1/28
CPC分类号: B05B1/28 , B01L3/0268 , B01L2200/0636 , B01L2200/0652 , B01L2300/0819 , B01L2400/0439 , B01L2400/0487 , B05B7/0012 , B05B7/0408 , B05B7/0458 , B05B7/0475 , B05B7/12 , B05B7/16 , B05B12/18 , B05B17/0615 , B41J2/04
摘要: A deposition apparatus comprising one or more atomizers structurally integrated with a deposition head. The entire head may be replaceable, and prefilled with material. The deposition head may comprise multiple nozzles. Also an apparatus for three dimensional materials deposition comprising a tiltable deposition head attached to a non-tiltable atomizer. Also methods and apparatuses for depositing different materials either simultaneously or sequentially.
摘要翻译: 一种沉积设备,包括一个或多个与沉积头结构一体化的雾化器。 整个头部可以更换,并预填充材料。 沉积头可以包括多个喷嘴。 还有一种用于三维材料沉积的装置,其包括附接到不可倾斜雾化器的可倾斜沉积头。 还有用于同时或顺序地沉积不同材料的方法和装置。
-
8.
公开(公告)号:US20090061089A1
公开(公告)日:2009-03-05
申请号:US12203037
申请日:2008-09-02
CPC分类号: B05B1/28 , B01L3/0268 , B01L2200/0636 , B01L2200/0652 , B01L2300/0819 , B01L2400/0439 , B01L2400/0487 , B05B7/0012 , B05B7/0408 , B05B7/0458 , B05B7/0475 , B05B7/12 , B05B7/16 , B05B12/18 , B05B17/0615 , B41J2/04
摘要: A deposition apparatus comprising one or more atomizers structurally integrated with a deposition head. The entire head may be replaceable, and prefilled with material. The deposition head may comprise multiple nozzles. Also an apparatus for three dimensional materials deposition comprising a tiltable deposition head attached to a non-tiltable atomizer. Also methods and apparatuses for depositing different materials either simultaneously or sequentially.
摘要翻译: 一种沉积设备,包括一个或多个与沉积头结构一体化的雾化器。 整个头部可以更换,并预填充材料。 沉积头可以包括多个喷嘴。 还有一种用于三维材料沉积的装置,其包括附接到不可倾斜雾化器的可倾斜沉积头。 还有用于同时或顺序地沉积不同材料的方法和装置。
-
-
-
-
-
-
-