公开(公告)号：US06719918B2

公开(公告)日：2004-04-13

申请号：US10025798

申请日：2001-12-26

申请人： Byeung-leul Lee ,  Taek-ryong Chung ,  Joon-hyock Choi ,  Won-youl Choi ,  Kyu-dong Jung ,  Sang-woo Lee

发明人： Byeung-leul Lee ,  Taek-ryong Chung ,  Joon-hyock Choi ,  Won-youl Choi ,  Kyu-dong Jung ,  Sang-woo Lee

IPC分类号： H01L213065

CPC分类号： H01L21/32137 ,  H01L21/28114

摘要： A method of reducing notching during reactive ion etching (RIE) is provided. The method is useful when RIE is performed to pass through a silicon layer on a multi-layered structure on which the silicon layer, an insulating layer and a silicon substrate are sequentially deposited. The method includes the steps of: forming an insulating layer on a silicon substrate; forming trenches on the insulating layer to expose the silicon substrate; forming a silicon layer on the insulating layer to fill the trenches; and patterning the silicon layer to form first etch regions, which pass through the silicon layer, to include the trenches. According to the method, it is possible to remarkably reduce notching without depositing a metal layer, when a multi-layered structure including a silicon layer which is etched to be passed through during RIE is fabricated.

摘要翻译： 提供了一种在反应离子蚀刻（RIE）下减少切口的方法。 当RIE被执行以通过其上依次沉积硅层，绝缘层和硅衬底的多层结构上的硅层时，该方法是有用的。 该方法包括以下步骤：在硅衬底上形成绝缘层; 在绝缘层上形成沟槽以暴露硅衬底; 在所述绝缘层上形成硅层以填充所述沟槽; 以及图案化硅层以形成通过硅层的包括沟槽的第一蚀刻区域。 根据该方法，制造在RIE中被蚀刻而被通过的包含硅层的多层结构时，不沉积金属层可显着地减少切口。

公开(公告)号：US20050172480A1

公开(公告)日：2005-08-11

申请号：US11061611

申请日：2005-02-22

申请人： Won-youl Choi ,  Keon-yang Park ,  Byeong-cheon Koh ,  Myung-sam Kang ,  Kyung-won Na ,  Sang-on Choi

发明人： Won-youl Choi ,  Keon-yang Park ,  Byeong-cheon Koh ,  Myung-sam Kang ,  Kyung-won Na ,  Sang-on Choi

IPC分类号： G01R33/02 ,  G01R33/04 ,  G01R33/05 ,  H01L43/00 ,  H01L21/00 ,  B32B31/26 ,  G01R31/00 ,  H01F7/06

CPC分类号： G01R33/05 ,  G01R15/185 ,  G01R33/04 ,  Y10T29/49073 ,  Y10T29/49075

摘要： A fluxgate sensor integrated in a printed circuit board. The fluxgate sensor has soft magnetic cores having a lower core and an upper core mounted on the lower core, for forming a closed magnetic path on a printed circuit board, an excitation coil formed as a metal film, alternately winding the upper and the lower soft magnetic cores substantially in a number ‘8’ pattern, and a pick-up coil formed as a metal film, having a structure of winding the upper and the lower soft magnetic cores substantially in a solenoid pattern, the pick-up coil being placed on the same plane as an external contour of the excitation coil.

摘要翻译： 集成在印刷电路板中的磁通门传感器。 磁通门传感器具有软磁芯，其具有安装在下芯上的下芯和上芯，用于在印刷电路板上形成闭合磁路，形成为金属膜的励磁线圈，交替地卷绕上软和下软 基本上为“8”图案的磁芯和形成为金属膜的拾取线圈，其具有将上下软磁芯卷绕成螺线管图案的结构，拾取线圈被放置在 与激励线圈的外部轮廓相同的平面。

公开(公告)号：US07372261B2

公开(公告)日：2008-05-13

申请号：US10629614

申请日：2003-07-30

申请人： Won-youl Choi ,  Sang-on Choi ,  Jun-sik Hwang ,  Myung-sam Kang

发明人： Won-youl Choi ,  Sang-on Choi ,  Jun-sik Hwang ,  Myung-sam Kang

IPC分类号： G01R33/04

CPC分类号： G01R33/04 ,  Y10T29/49073

摘要： A printed circuit board integrated with a two-axis fluxgate sensor includes a first soft magnetic core formed lengthwise in a first axial direction, a first excitation coil formed of a metal film and wound around the first soft magnetic core, a first pick-up coil formed of a metal film and wound around the first soft magnetic core and the first excitation coil, a second soft magnetic core formed lengthwise in a second axial direction, the second axial direction being perpendicular to the first axial direction, a second excitation coil formed of a metal film and wound around the second soft magnetic core, a second pick-up coil formed of a metal film and wound around the second soft magnetic core and the second excitation coil, and a pad for establishing conductivity between the first and second excitation coils and the first and second pick-up coils and an external circuit.

摘要翻译： 与双轴磁通门传感器集成的印刷电路板包括沿第一轴向长度形成的第一软磁芯，由金属膜形成并围绕第一软磁芯缠绕的第一励磁线圈，第一拾取线圈 由金属膜形成并缠绕在第一软磁芯和第一励磁线圈周围，第二软磁芯沿第二轴向长度方向形成，第二轴向垂直于第一轴向;第二励磁线圈，由 金属薄膜，围绕第二软磁芯缠绕，由金属薄膜构成并缠绕在第二软磁芯和第二激励线圈周围的第二拾取线圈，以及用于在第一和第二激磁线圈之间建立导电性的焊盘 以及第一和第二拾取线圈和外部电路。

公开(公告)号：US07557571B2

公开(公告)日：2009-07-07

申请号：US10241558

申请日：2002-09-12

申请人： Won-youl Choi ,  Kyung-won Na ,  Sang-on Choi

发明人： Won-youl Choi ,  Kyung-won Na ,  Sang-on Choi

IPC分类号： G01R33/04 ,  G01R33/02

CPC分类号： G01R33/05 ,  G01R15/185 ,  G01R33/04

摘要： A fluxgate sensor is integrated in a semiconductor substrate. The fluxgate sensor has two bar type soft magnetic cores, or a rectangular-ring type soft magnetic core to form a closed magnetic path on the semiconductor substrate, with an excitation coil formed of a metal layer either of the united structure winding the two bar-type cores or two longer sides of the rectangular-ring type core altogether and substantially in a number ‘8’ pattern, or of a separated structure winding the two bar type cores or two longer sides of the rectangular-ring type core, respectively, in a number ‘8’ pattern. Also, a pick-up coil is formed on the two bar-type cores or two longer sides of the rectangular-ring type core, either of the united structure winding the two bar-type cores or two longer sides of the rectangular-type core altogether in a solenoid pattern, or of the separated structure winding the two bar type cores or two longer sides of the rectangular-ring type core, respectively, in a solenoid pattern.

摘要翻译： 磁通门传感器集成在半导体衬底中。 磁通门传感器具有两个棒型软磁芯或矩形环型软磁芯，以在半导体衬底上形成封闭的磁路，其中由一个金属层组成的激励线圈组成， 型芯或矩形环芯的两个较长的边，总体上基本为“8”形，或分别结构地将矩形环型芯的两个棒型芯或两个较长边分别缠绕在 数字“8”模式。 此外，在矩形环形芯的两个棒状芯或两个长边上形成一个拾取线圈，其中两个棒型芯的两个长边或矩形芯的两个长边 或分离结构分别以螺线管图案缠绕矩形环型芯的两个棒状芯或两个较长边。

公开(公告)号：US07087450B2

公开(公告)日：2006-08-08

申请号：US11061611

申请日：2005-02-22

申请人： Won-youl Choi ,  Keon-yang Park ,  Byeong-cheon Koh ,  Myung-sam Kang ,  Kyung-won Na ,  Sang-on Choi

发明人： Won-youl Choi ,  Keon-yang Park ,  Byeong-cheon Koh ,  Myung-sam Kang ,  Kyung-won Na ,  Sang-on Choi

IPC分类号： H01L21/00

CPC分类号： G01R33/05 ,  G01R15/185 ,  G01R33/04 ,  Y10T29/49073 ,  Y10T29/49075

摘要： A fluxgate sensor integrated in a printed circuit board. The fluxgate sensor has soft magnetic cores having a lower core and an upper core mounted on the lower core, for forming a closed magnetic path on a printed circuit board, an excitation coil formed as a metal film, alternately winding the upper and the lower soft magnetic cores substantially in a number ‘8’ pattern, and a pick-up coil formed as a metal film, having a structure of winding the upper and the lower soft magnetic cores substantially in a solenoid pattern, the pick-up coil being placed on the same plane as an external contour of the excitation coil.

摘要翻译： 集成在印刷电路板中的磁通门传感器。 磁通门传感器具有软磁芯，其具有安装在下芯上的下芯和上芯，用于在印刷电路板上形成闭合磁路，形成为金属膜的励磁线圈，交替地卷绕上软和下软 基本上为“8”图案的磁芯和形成为金属膜的拾取线圈，其具有将上下软磁芯基本上卷绕在螺线管图案中的结构，拾取线圈被放置在 与激励线圈的外部轮廓相同的平面。

公开(公告)号：US07407596B2

公开(公告)日：2008-08-05

申请号：US11711673

申请日：2007-02-28

申请人： Won-youl Choi ,  Byeong-cheon Koh ,  Kyung-won Na ,  Sang-on Choi ,  Myung-sam Kang ,  Keon-yang Park

发明人： Won-youl Choi ,  Byeong-cheon Koh ,  Kyung-won Na ,  Sang-on Choi ,  Myung-sam Kang ,  Keon-yang Park

IPC分类号： H01L21/302

CPC分类号： G01R33/05 ,  G01R33/04 ,  Y10T29/4906

摘要： A fluxgate sensor is integrated in a printed circuit board. The fluxgate sensor has two bar-type (or rectangular-ring shaped) soft magnetic cores to form a closed magnetic path on a printed circuit board and an excitation coil in the form of a metal film is wound around the two bar-type soft magnetic cores either in a united structure that winds the two bar-type soft magnetic cores altogether, or in a separated structure that winds the two bar-type soft magnetic cores respectively, both in a pattern of number ‘8’. A pick-up coil is mounted on the excitation coil, either winding the two bars altogether, or respectively, in a solenoid pattern. The fluxgate sensor integrated in the printed circuit board can be mass-produced at a cheap manufacturing cost. The fluxgate sensor also can be made compact-sized, and at the same time, is capable of forming a closed-magnetic path. As a result, flux leakage is minimized, and the fluxgate sensor has a high sensitivity as it detects the magnetic field through a variable driving.

摘要翻译： 磁通门传感器集成在印刷电路板中。 磁通门传感器具有两个棒状（或矩形环形）软磁芯，以在印刷电路板上形成封闭的磁路，并且金属膜形式的励磁线圈缠绕在两个棒式软磁体 核心是以两个棒式软磁芯一起卷绕的联合结构，或者分别以两个条形软磁芯分别缠绕在两个条型软磁芯中，两者都是以“8”的形式。 拾波线圈安装在励磁线圈上，或者以螺线管图案分别缠绕两个杆。 集成在印刷电路板中的磁通门传感器可以以便宜的制造成本批量生产。 磁通门传感器也可以制造成紧凑的尺寸，并且同时能够形成闭合磁路径。 结果，漏磁通被最小化，并且磁通门传感器通过可变驱动来检测磁场时具有高灵敏度。

公开(公告)号：US20070151943A1

公开(公告)日：2007-07-05

申请号：US11711673

申请日：2007-02-28

申请人： Won-youl Choi ,  Byeong-cheon Koh ,  Kyung-won Na ,  Sang-on Choi ,  Myung-sam Kang ,  Keon-yang Park

发明人： Won-youl Choi ,  Byeong-cheon Koh ,  Kyung-won Na ,  Sang-on Choi ,  Myung-sam Kang ,  Keon-yang Park

IPC分类号： H01B13/00 ,  B44C1/22

CPC分类号： G01R33/05 ,  G01R33/04 ,  Y10T29/4906

摘要： A fluxgate sensor is integrated in a printed circuit board. The fluxgate sensor has two bar-type (or rectangular-ring shaped) soft magnetic cores to form a closed magnetic path on a printed circuit board and an excitation coil in the form of a metal film is wound around the two bar-type soft magnetic cores either in a united structure that winds the two bar-type soft magnetic cores altogether, or in a separated structure that winds the two bar-type soft magnetic cores respectively, both in a pattern of number ‘8’. A pick-up coil is mounted on the excitation coil, either winding the two bars altogether, or respectively, in a solenoid pattern. The fluxgate sensor integrated in the printed circuit board can be mass-produced at a cheap manufacturing cost. The fluxgate sensor also can be made compact-sized, and at the same time, is capable of forming a closed-magnetic path. As a result, flux leakage is minimized, and the fluxgate sensor has a high sensitivity as it detects the magnetic field through a variable driving.

摘要翻译： 磁通门传感器集成在印刷电路板中。 磁通门传感器具有两个棒状（或矩形环形）软磁芯，以在印刷电路板上形成封闭的磁路，并且金属膜形式的励磁线圈缠绕在两个棒式软磁体 核心是以两个棒式软磁芯一起卷绕的联合结构，或者分别以两个条形软磁芯分别缠绕在两个条型软磁芯中，两者都是以“8”的形式。 拾波线圈安装在励磁线圈上，或者以螺线管图案分别缠绕两个杆。 集成在印刷电路板中的磁通门传感器可以以便宜的制造成本批量生产。 磁通门传感器也可以制造成紧凑的尺寸，并且同时能够形成闭合磁路径。 结果，漏磁通被最小化，并且磁通门传感器通过可变驱动来检测磁场时具有高灵敏度。

公开(公告)号：US07212001B2

公开(公告)日：2007-05-01

申请号：US10228965

申请日：2002-08-28

申请人： Won-youl Choi ,  Byeong-cheon Koh ,  Kyung-won Na ,  Sang-on Choi ,  Myung-sam Kang ,  Keon-yang Park

发明人： Won-youl Choi ,  Byeong-cheon Koh ,  Kyung-won Na ,  Sang-on Choi ,  Myung-sam Kang ,  Keon-yang Park

IPC分类号： G01R33/04

CPC分类号： G01R33/05 ,  G01R33/04 ,  Y10T29/4906

摘要： A fluxgate sensor is integrated in a printed circuit board. The fluxgate sensor has two bar-type(or rectangular-ring shaped) soft magnetic cores to form a closed magnetic path on a printed circuit board and an excitation coil in the form of a metal film is wound around the two bar-type soft magnetic cores either in a united structure that winds the two bar-type soft magnetic cores altogether, or in a separated structure that winds the two bar-type soft magnetic cores respectively, both in a pattern of number ‘8’. A pick-up coil is mounted on the excitation coil, either winding the two bars altogether, or respectively, in a solenoid pattern. The fluxgate sensor integrated in the printed circuit board can be mass-produced at a cheap manufacturing cost. The fluxgate sensor also can be made compact-sized, and at the same time, is capable of forming a closed-magnetic path. As a result, flux leakage is minimized, and the fluxgate sensor has a high sensitivity as it detects the magnetic field through a variable driving.

摘要翻译： 磁通门传感器集成在印刷电路板中。 磁通门传感器具有两个棒状（或矩形环形）软磁芯，以在印刷电路板上形成封闭的磁路，并且金属膜形式的励磁线圈缠绕在两个棒式软磁体 核心是以两个棒式软磁芯一起卷绕的联合结构，或者分别以两个条形软磁芯分别缠绕在两个条型软磁芯中，两者都是以“8”的形式。 拾波线圈安装在励磁线圈上，或者以螺线管图案分别缠绕两个杆。 集成在印刷电路板中的磁通门传感器可以以便宜的制造成本批量生产。 磁通门传感器也可以制造成紧凑的尺寸，并且同时能够形成闭合磁路径。 结果，漏磁通被最小化，并且磁通门传感器通过可变驱动来检测磁场时具有高灵敏度。

公开(公告)号：US06998840B2

公开(公告)日：2006-02-14

申请号：US10228948

申请日：2002-08-28

申请人： Won-youl Choi ,  Keon-yang Park ,  Byeong-cheon Koh ,  Myung-sam Kang ,  Kyung-won Na ,  Sang-on Choi

发明人： Won-youl Choi ,  Keon-yang Park ,  Byeong-cheon Koh ,  Myung-sam Kang ,  Kyung-won Na ,  Sang-on Choi

IPC分类号： G01R33/04

CPC分类号： G01R33/05 ,  G01R15/185 ,  G01R33/04 ,  Y10T29/49073 ,  Y10T29/49075

摘要： A fluxgate sensor integrated in a printed circuit board. The fluxgate sensor has soft magnetic cores having a lower core and an upper core mounted on the lower core, for forming a closed magnetic path on a printed circuit board, an excitation coil formed as a metal film, alternately winding the upper and the lower soft magnetic cores substantially in a number ‘8’ pattern, and a pick-up coil formed as a metal film, having a structure of winding the upper and the lower soft magnetic cores substantially in a solenoid pattern, the pick-up coil being placed on the same plane as an external contour of the excitation coil.

摘要翻译： 集成在印刷电路板中的磁通门传感器。 磁通门传感器具有软磁芯，其具有安装在下芯上的下芯和上芯，用于在印刷电路板上形成闭合磁路，形成为金属膜的励磁线圈，交替地卷绕上软和下软 基本上为“8”图案的磁芯和形成为金属膜的拾取线圈，其具有将上下软磁芯基本上卷绕在螺线管图案中的结构，拾取线圈被放置在 与激励线圈的外部轮廓相同的平面。