Method of manufacturing electrical capacitors

    公开(公告)号:US3615981A

    公开(公告)日:1971-10-26

    申请号:US3615981D

    申请日:1965-05-18

    CPC classification number: H01G4/06 H01G4/08 H01G4/105 H01G4/12 Y10T29/435

    Abstract: A method of making electrical capacitors fused to a substrate and suitable for integration with a microcircuit comprising applying to the substrate in the order named a first buffer layer and a capacitor unit including a first capacitor plate, dielectric layer, and second capacitor plate. The assembly so formed is then fired to volatilize any organic constituents, fuse adjoining layers and plates to each other and to the adjoining portions of the substrate, and at least partially crystallize the buffer and dielectric layers. Thereafter, a second buffer layer and a layer of vitreous glazing material is applied over the capacitor unit and the assembly is fired again to volatilize any organic constituents, complete crystallization of the first buffer and dielectric layers, crystallize the second buffer layer, and fuse the newly applied layers to adjoining layers, to the adjoining exposed surface of the outer capacitor plate, and to the adjoining portions of the substrate.

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