公开(公告)号：US20190214565A1

公开(公告)日：2019-07-11

申请号：US16199915

申请日：2018-11-26

Applicant: Carbonics Inc.

Inventor： Tyler Andrew Cain ,  Alexander Allen Kane ,  Christopher Michael Rutherglen ,  Kosmas Galatsis ,  Philbert Francis Marsh

IPC: H01L51/00 ,  H01L51/05 ,  H01L51/10

CPC classification number: H01L51/0012 ,  H01L51/0003 ,  H01L51/0048 ,  H01L51/0545 ,  H01L51/0558 ,  H01L51/105

Abstract: Manufacturing an electrical device including providing a substrate having a surface and providing a sacrificial layer on the surface of the substrate. Depositing a solution of carbon nanotubes suspended in a solvent on a surface of the sacrificial layer and removing the solvent of the solution to thereby leave the carbon nanotubes on the sacrificial layer. Removing the sacrificial layer whereby the carbon nanotubes form a carbon nanotube layer and the carbon nanotubes in the carbon nanotube layer are aligned with each other. An electrical device, including a substrate having a surface and a layer of carbon nanotubes on the surface of the substrate. The carbon nanotubes in the layer are aligned with each other, such that an alignment angle between adjacent ones of the carbon nanotubes is within about ±20 degrees.

公开(公告)号：US11322702B1

公开(公告)日：2022-05-03

申请号：US17034933

申请日：2020-09-28

Applicant: Carbonics Inc.

Inventor： Alexander Allen Kane ,  Christopher Michael Rutherglen ,  Tyler Andrew Cain ,  Philbert Francis Marsh ,  Kosmas Galatsis

IPC: H01L51/05 ,  C01B32/158 ,  H01L51/00 ,  H01L21/02 ,  H01L29/06

Abstract: Electrical device including a substrate having a surface and a radiofrequency field effect transistor (RF-FET) on the substrate surface. RF-FET includes a CNT layer on the substrate surface, the CNT layer including electrically conductive aligned carbon nanotubes, and pin-down anchor layers on the CNT layer. A first portion of the CNT layer, located in-between the pin-down anchor layers, is not covered by the pin-down anchor layers and is a channel region of the radiofrequency field effect transistor and second portions of the CNT layer are covered by the pin-down anchor layers. For cross-sections in a direction perpendicular to a common alignment direction of the aligned CNTs in the first portion of the CNT layer: the aligned CNTs have an average linear density in a range from 20 to 120 nanotubes per micron along the cross-section, and at least 40 percent of the aligned CNTs are discrete from any CNTs of the CNT layer.

公开(公告)号：US20170213963A1

公开(公告)日：2017-07-27

申请号：US15409897

申请日：2017-01-19

Applicant: Carbonics Inc.

Inventor： Tyler Andrew Cain ,  Christopher Michael Rutherglen ,  Alexander Allen Kane ,  Philbert Francis Marsh ,  Kosmas Galatsis

IPC: H01L51/00 ,  B05D1/06 ,  H01L51/05

CPC classification number: H01L51/0003 ,  B01J8/20 ,  B05D1/06 ,  B05D1/18 ,  B05D1/22 ,  B05D5/12 ,  C01B32/158 ,  H01B1/04 ,  H01L51/0012 ,  H01L51/0048 ,  H01L51/0558

Abstract: A system for producing a layer of aligned carbon nanotubes, the system comprising: a sprayer, a solution delivery tube configured to deliver a carbon nanotube solution to the sprayer, and a reservoir configured to contain a subphase. The sprayer is configured to generate a continuous spray of the carbon nanotube solution. The continuous floating layer is supported by the subphase. The spray of carbon nanotube solution includes droplets of the carbon nanotube solution, the droplets having a median diameter in a range from about 1 to about 100 microns. The sprayer maintains the continuous floating layer of carbon nanotube solution on the subphase as a substrate is inserted into or removed from the subphase, the carbon nanotube solution being in contact with the substrate.

公开(公告)号：US11158798B2

公开(公告)日：2021-10-26

申请号：US16542644

申请日：2019-08-16

Applicant: Carbonics Inc.

Inventor： Tyler Andrew Cain ,  Christopher Michael Rutherglen ,  Alexander Allen Kane ,  Philbert Francis Marsh ,  Kosmas Galatsis

IPC: H01L51/00 ,  B05B7/00 ,  H01L51/05 ,  B05D1/06 ,  C01B32/158 ,  B05C5/00 ,  B05C3/02 ,  B05D5/12 ,  B05D1/18 ,  B05D1/22 ,  B01J8/20 ,  H01B1/04

Abstract: A system for producing a layer of aligned carbon nanotubes, the system comprising: a sprayer, a solution delivery tube configured to deliver a carbon nanotube solution to the sprayer, the carbon nanotube solution including carbon nanotubes dispersed in chloroform, and a reservoir configured to contain a water subphase. The sprayer is configured to generate a continuous spray of the carbon nanotube solution. The continuous floating layer is supported by the subphase. The spray of carbon nanotube solution includes droplets of the carbon nanotube solution, the droplets having a median diameter in a range from about 1 to about 100 microns. The sprayer maintains the continuous floating layer of carbon nanotube solution on the subphase as a substrate is inserted into or removed from the subphase, the carbon nanotube solution being in contact with the substrate.

公开(公告)号：US10833284B1

公开(公告)日：2020-11-10

申请号：US16431359

申请日：2019-06-04

Applicant: Carbonics Inc.

Inventor： Alexander Allen Kane ,  Christopher Michael Rutherglen ,  Tyler Andrew Cain ,  Philbert Francis Marsh ,  Kosmas Galatsis

IPC: H01L51/05 ,  H01L51/00 ,  H01L29/06 ,  H01L21/02 ,  C01B32/158

Abstract: Manufacturing an electrical device including providing a substrate having a surface and forming a radiofrequency field effect transistor on the surface, including forming a CNT layer on the surface and depositing a pin-down layer on the CNT layer. The pin-down layer is patterned to form separate pin-down anchor layers. A first portion of the CNT layer, located in-between the pin-down anchor layers and second portions of the CNT layer are covered by the pin-down anchor layers. For cross-sections in a direction perpendicular to a common alignment direction of the electrically conductive aligned carbon nanotubes in the first portion of the CNT layer the electrically conductive aligned carbon nanotubes have an average linear density in a range from 20 to 120 nanotubes per micron along the cross-sections, and at least 40 percent of the electrically conductive aligned carbon nanotubes are discrete from any carbon nanotubes of the CNT layer. A radiofrequency field effect transistor having such a CNT layer and pin-down anchor layers is also disclosed.

公开(公告)号：US10431740B2

公开(公告)日：2019-10-01

申请号：US15409897

申请日：2017-01-19

Applicant: Carbonics Inc.

Inventor： Tyler Andrew Cain ,  Christopher Michael Rutherglen ,  Alexander Allen Kane ,  Philbert Francis Marsh ,  Kosmas Galatsis

IPC: B05D1/06 ,  H01L51/00 ,  H01L51/05 ,  B05D5/12 ,  B05D1/18 ,  B05D1/22 ,  B01J8/20

Abstract: A system for producing a layer of aligned carbon nanotubes, the system comprising: a sprayer, a solution delivery tube configured to deliver a carbon nanotube solution to the sprayer, and a reservoir configured to contain a subphase. The sprayer is configured to generate a continuous spray of the carbon nanotube solution. The continuous floating layer is supported by the subphase. The spray of carbon nanotube solution includes droplets of the carbon nanotube solution, the droplets having a median diameter in a range from about 1 to about 100 microns. The sprayer maintains the continuous floating layer of carbon nanotube solution on the subphase as a substrate is inserted into or removed from the subphase, the carbon nanotube solution being in contact with the substrate.