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公开(公告)号：US5665249A
公开(公告)日：1997-09-09
申请号：US330146
申请日：1994-10-17
申请人： Cathie J. Burke , William G. Hawkins , Herman A. Hermanson , Michael C. Ferringer , Almon P. Fisher , Diane Atkinson
发明人： Cathie J. Burke , William G. Hawkins , Herman A. Hermanson , Michael C. Ferringer , Almon P. Fisher , Diane Atkinson
CPC分类号： B41J2/1623 , B24B37/04 , B41J2/1604 , B41J2/1626 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1642 , B41J2/1645 , B41J2202/03 , Y10T29/49401
摘要： An improved microelectromechanical device, such as a thermal ink jet die or printhead, is formed by the alignment of two planar substrates bonded together by an intermediate thick film layer of patterned polymeric material, such as polyimide. The improved device has a fully cured, patterned thick film layer which is planarized by chemical-mechanical polishing-to improve the bonding strength between the substrates. The planarization removes topographical formations generated during the deposition of the thick film layer and/or during the patterning of the recesses therein.
摘要翻译： 通过由诸如聚酰亚胺的图案化聚合物材料的中间厚膜层粘合在一起的两个平面基板的对准来形成改进的微电子机械装置，例如热喷墨模头或打印头。 改进的装置具有完全固化的图案化的厚膜层，其通过化学机械抛光进行平面化，以提高基板之间的结合强度。 平坦化消除了在沉积厚膜层期间和/或在其中凹陷图案化期间产生的形貌结构。
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公开(公告)号：US5699094A
公开(公告)日：1997-12-16
申请号：US515180
申请日：1995-08-11
CPC分类号： B41J2/1604 , B41J2/14129 , B41J2/1623 , B41J2/1626 , B41J2/1631 , B41J2/1635 , B41J2202/03
摘要： An ink jet printhead has improved resistance to the corrosive effects of ink by coating ink sensitive areas with a photo-imageable benzocyclobutene (BCB) polymer. The BCB can be patterned so as to provide a protective coating over selected areas while leaving other areas uncoated. In one described embodiment, a thermal ink jet printer is formed by bonding together a channel plate and a heater plate. Resistors and electrical connections are formed in the surface of the heater plate. A BCB layer is formed so as to overlie the heater plate to protect the electrical elements while providing pit structure for the heater and for ink flow bypass.
摘要翻译： 通过用可光成像的苯并环丁烯（BCB）聚合物涂布油墨敏感区域，喷墨打印头改善了对油墨的腐蚀作用的抵抗力。 BCB可以被图案化，以便在选定区域上提供保护涂层，同时使其他区域未涂覆。 在一个描述的实施例中，通过将通道板和加热器板接合在一起而形成热喷墨打印机。 电阻器和电气连接形成在加热器板的表面。 形成BCB层，以覆盖加热板，以保护电气元件，同时为加热器和墨水旁路提供凹坑结构。
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公开(公告)号：US06183069B2
公开(公告)日：2001-02-06
申请号：US09004765
申请日：1998-01-08
IPC分类号： B41J205
CPC分类号： B41J2/1623 , B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1642
摘要： An ink jet printhead is disclosed which has a heater plate containing the heating elements and driving circuitry means monolithographically formed on one surface thereof and the ink flow directing channel structure is formed on the heater plate using a layer of patternable material, so that all critical alignments are done directly on the heater plate. In one embodiment, the patternable material is a photosensitive polymer which is exposed using a mask to define the channel and reservoir pattern, which is then developed and cured. After curing, the patterned channel structure is polished to provide a smooth coplanar surface and a cover plate with an aperture therein is aligned with a loose tolerance to the channel structure and bonded thereto to complete the printhead. The aperture serves as both ink inlet and a portion of the ink reservoir. The channels are open at one end and serve as the droplet ejecting nozzles, while the other ends are connected to the reservoir. In one embodiment, the cover plate is transparent and the channel structure material is polyimide or polyarylene ether ketone.
摘要翻译： 公开了一种喷墨打印头，其具有包含加热元件的加热器板和在其一个表面上以光学方式形成的驱动电路装置，并且使用可图案化材料层在加热器板上形成墨流动引导通道结构，使得所有关键对准 直接在加热器板上完成。 在一个实施方案中，可图案材料是使用掩模曝光以限定通道和储存器图案的光敏聚合物，其然后显影和固化。 固化后，对图案化的沟道结构进行抛光以提供平滑的共面表面，并且其中具有孔的盖板对准通道结构的松动公差并与其结合以完成打印头。 该孔用作墨水入口和墨水储存器的一部分。 通道在一端开口并用作液滴喷嘴，而另一端连接到储存器。 在一个实施例中，盖板是透明的，并且通道结构材料是聚酰亚胺或聚亚芳基醚酮。
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公开(公告)号：US5010355A
公开(公告)日：1991-04-23
申请号：US456431
申请日：1989-12-26
CPC分类号： B41J2/14129 , B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1646 , H01L23/291 , H01L23/3157 , B41J2202/13 , H01L2924/0002
摘要： An improved ink jet printhead is disclosed of the type having a plurality of parallel ink flow channels which terminate with an ink droplet emitting nozzle, a heating element with a cavitational protective layer thereover located in each channel, and MOS electronic circuitry monolithically integrated within the printhead for applying electrical pulses to the heating elements. The pulsed heating elements produce bubbles momentarily on the protective layer of the heating elements which expel ink droplets from the nozzles. The improvement is obtained by providing multi-layer ionic passivation of the MOS electronic circuitry which is exposable to the ink. This is accomplished through the deposition of a multi-layered, thin film insulative coating thereon consisting of a first layer of doped or undoped silicon dioxide having a thickness of 200 .ANG. to 2 .mu.m followed by a second layer of plasma nitride having a thickness of 1000 .ANG. to 3 .mu.m. The silicon nitride is etched from the protective layers of the heating elements and electrical contact pads for external connection to electrical power so that the first layer of silicon oxide is exposed, followed by etching of the silicon oxide to remove it from the protective layer and contact pads. Thus, the MOS circuitry is protected from mobile ions in the ink while the cost effective fabrication of a printhead is maintained. In an alternate embodiment, the multi-layered ionic passivation comprises three thin film layers comprising polyimide interfacing with the ink, followed by silicon nitride, and doped or undoped silicon dioxide directly interfacing with the metallization.
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公开(公告)号：US5738799A
公开(公告)日：1998-04-14
申请号：US712761
申请日：1996-09-12
CPC分类号： B41J2/1639 , B41J2/1601 , B41J2/1607 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1635 , B41J2/1642 , B41J2/1645 , B41J2202/03
摘要： An ink-jet printhead fabrication technique enables capillary channels for liquid ink to be formed with square or rectangular cross-sections. A sacrificial layer is placed over the main surface of a silicon chip, the sacrificial layer being patterned in the form of the void formed by the desired ink channels. A permanent layer, comprising permanent material, is applied over the sacrificial layer, and, after polishing the two layers to form a uniform surface, the sacrificial layer is removed. Preferred materials for the sacrificial layer include polyimide while preferred materials for the permanent layer include polyarylene ether, although a variety of material combinations are possible.
摘要翻译： 喷墨打印头制造技术使得用于液体油墨的毛细通道可以形成为方形或矩形横截面。 将牺牲层放置在硅芯片的主表面上，牺牲层以由期望的墨水通道形成的空隙的形式构图。 包括永久材料的永久层被施加在牺牲层上，并且在抛光两层以形成均匀的表面之后，去除牺牲层。 用于牺牲层的优选材料包括聚酰亚胺，而用于永久层的优选材料包括聚亚芳基醚，尽管各种材料组合是可能的。
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公开(公告)号：US5900892A
公开(公告)日：1999-05-04
申请号：US811624
申请日：1997-03-05
申请人： David A. Mantell , Lisa A. DeLouise , Cathie J. Burke , Mildred Calistri-Yeh , Almon P. Fisher , Narayan V. Deshpande
发明人： David A. Mantell , Lisa A. DeLouise , Cathie J. Burke , Mildred Calistri-Yeh , Almon P. Fisher , Narayan V. Deshpande
CPC分类号： B41J2/1631 , B41J2/162 , B41J2/1623 , B41J2/1626 , B41J2/1632 , B41J2/1635 , B41J2/1639 , B41J2/1645 , B41J2202/03 , Y10T29/49401
摘要： A nozzle plate for ink jet cartridges which are manufactured from a relatively thin film of material, such as, for example, polyimide, polyarylene ether, or composite of a number of materials deposited on a rigid substrate, such as a silicon wafer, and photolithographically processed from the rigid substrate to produce a large quantity of interconnected nozzle plates which may be removed as a sheet of interconnected nozzle plates for ease of handling. The nozzle plates are aligned and bonded to the nozzle bearing front faces of the cartridges.
摘要翻译： 用于喷墨盒的喷嘴板，其由相对薄的材料薄膜制成，例如聚酰亚胺，聚亚芳基醚或沉积在诸如硅晶片的刚性基板上的多种材料的复合材料，并且光刻 从刚性基板处理以产生大量互连的喷嘴板，其可以作为易于处理的互连喷嘴板的片材去除。 喷嘴板对准并结合到墨盒的喷嘴轴承前表面。
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公开(公告)号：US06315398B1
公开(公告)日：2001-11-13
申请号：US07963969
申请日：1992-10-21
申请人： Cathie J. Burke , Narayan V. Desphande , William G. Hawkins , Dale R. Ims , Michael P. O'Horo , Gary A. Kneezel , Thomas A. Tellier , Ivan Rezanka
发明人： Cathie J. Burke , Narayan V. Desphande , William G. Hawkins , Dale R. Ims , Michael P. O'Horo , Gary A. Kneezel , Thomas A. Tellier , Ivan Rezanka
IPC分类号： B41J205
CPC分类号： B41J2/1604 , B41J2/14129 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1646
摘要： The new heater element design has a pit layer which protects the overglaze passivation layer, PSG step region, portions of the Ta layer and dielectric isolation layer and junctions or regions susceptible to the cavitational pressures. Further, the inner walls of the pit layer define the effective heater area and the dopant lines define the actual heater area. In alternative embodiments, the dopant lines define the actual and effective heater areas, and an inner wall and a dopant line define the actual and effective heater areas. Further, when the new heater element designs are incorporated into printheads having full pit channel geometry and open pit channel geometry, the operating lifetime of the printhead is extended because the added protection of the pit layer prevents: 1) passivation damage and cavitational damages of the heater elements; and 2) degradation of heater robustness, hot spot formations and heater failures well into the 109 pulse range. The printhead incorporating the new heater element design can be incorporated into drop-on-demand printing systems of a carriage type or a full width type.
摘要翻译： 新的加热器元件设计具有凹坑层，其保护釉面钝化层，PSG阶梯区域，Ta层和电介质隔离层的部分以及对空穴压力敏感的结或区域。 此外，凹坑层的内壁限定有效的加热器面积，并且掺杂剂线限定实际的加热器面积。 在替代实施例中，掺杂剂线限定实际和有效的加热器区域，并且内壁和掺杂剂线限定实际和有效的加热器区域。 此外，当新的加热器元件设计结合到具有全坑通道几何形状和露天通道几何形状的打印头中时，打印头的工作寿命延长，因为凹坑层的附加保护防止：1）钝化损伤和空穴损伤 加热元件; 和2）加热器鲁棒性，热点形成和加热器故障的恶化达到109脉冲范围。 包含新的加热器元件设计的打印头可以结合到托架型或全宽型的按需按需打印系统中。
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公开(公告)号：US6102528A
公开(公告)日：2000-08-15
申请号：US953656
申请日：1997-10-17
CPC分类号： B41J2/0455 , B41J2/0458 , B41J2/14072 , B41J2202/13
摘要： A drive transistor for a high resolution ink jet printhead having a pocket implant in the gate region of the device. The pocket implant enables a reduced source to drain spacing without loss of breakdown voltage. Accordingly, the size of the transistor may be reduced. Alternatively, this device is suitable for addressing 1200 spi resolution printheads. In one embodiment, the pocket implant extends about 1 .mu.m beyond the gate region towards the drain region. Both embodiments produce a graded drift region.
摘要翻译： 一种用于高分辨率喷墨打印头的驱动晶体管，其具有在该器件的栅极区域中的凹穴注入。 袋式注入使得能够减少源极间距而不损失击穿电压。 因此，可以减小晶体管的尺寸。 或者，该器件适用于寻址1200个spi分辨率打印头。 在一个实施例中，口袋植入物向漏极区域延伸超过栅极区域约1μm。 两个实施例都产生渐变漂移区域。
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9.发明授权Thermal ink jet printheads with power MOS driver devices having enhanced transconductance 失效具有功率MOS驱动器器件的热喷墨打印头具有增强的跨导
公开(公告)号：US5969392A
公开(公告)日：1999-10-19
申请号：US344397
申请日：1994-11-23
IPC分类号： B41J2/045 , B41J2/055 , B41J2/14 , B41J2/16 , H01L21/8236 , H01L49/00 , H01L29/76 , H01L29/94 , H01L31/062 , H01L31/113 , H01L31/119
CPC分类号： B41J2/1631 , B41J2/14129 , B41J2/1604 , B41J2/1623 , B41J2/1629 , B41J2/1639 , H01L21/8236 , B41J2202/13
摘要： A high voltage MOS transistor, for use in a thermal ink jet printhead, is fabricated with a single, uniformly thick layer of polysilicon that serves as a field plate over the drift region and a gate over the channel region. The fabrication of the drift region and associated drift oxide is performed in a sequence independent of the device channel stop and field oxide fabrication, allowing the drift region to be optimized by varying the thickness of the drift oxide. Using a field plate to increase the breakdown voltage of the device by reducing the concentration of the electric field, the device transconductance is increased by increasing the doping of the drift region without an attendant decrease in breakdown voltage.
摘要翻译： 用于热喷墨打印头的高电压MOS晶体管被制造成具有单个均匀厚度的多晶硅层，其用作漂移区上的场板和沟道区上的栅极。 漂移区域和相关的漂移氧化物的制造以独立于器件沟道截止和场氧化物制造的顺序执行，允许通过改变漂移氧化物的厚度来优化漂移区域。 使用场板通过降低电场的浓度来增加器件的击穿电压，器件跨导通过增加漂移区的掺杂而不降低击穿电压而增加。
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10.发明授权Method of making inkjet print head with patterned photoresist layer having features with high aspect ratios 有权制造具有高纵横比特征的图案化光刻胶层的喷墨打印头的方法公开(公告)号：US06440643B1
公开(公告)日：2002-08-27
申请号：US09921112
申请日：2001-08-02
IPC分类号： B41J2135
CPC分类号： B41J2/14129 , B41J2202/03
摘要： Patterned photoresist layers formed on substrates have features with high aspect ratios. The photoresist layers can be formed as single layers with aspect ratios as high as about 4:1. In addition, the features in the photoresist layers can have a wide range of aspect ratios in a given single layer. The photoresist layers can be used in ink jet print heads and other devices to provide controlled fluid flow. The photoresist layers are formed using a contrast enhancement material that enables features having substantially vertical side walls and high aspect ratios to be formed.
摘要翻译： 形成在基板上的图案化光致抗蚀剂层具有高纵横比的特征。 光致抗蚀剂层可以形成为具有高达约4:1的纵横比的单层。 此外，光刻胶层中的特征可以在给定的单层中具有宽范围的纵横比。 光致抗蚀剂层可用于喷墨打印头和其它装置中以提供受控的流体流动。 使用对比增强材料形成光致抗蚀剂层，其使得能够形成具有基本上垂直的侧壁和高纵横比的特征。
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