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公开(公告)号：US5665249A
公开(公告)日：1997-09-09
申请号：US330146
申请日：1994-10-17
申请人： Cathie J. Burke , William G. Hawkins , Herman A. Hermanson , Michael C. Ferringer , Almon P. Fisher , Diane Atkinson
发明人： Cathie J. Burke , William G. Hawkins , Herman A. Hermanson , Michael C. Ferringer , Almon P. Fisher , Diane Atkinson
CPC分类号： B41J2/1623 , B24B37/04 , B41J2/1604 , B41J2/1626 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1642 , B41J2/1645 , B41J2202/03 , Y10T29/49401
摘要： An improved microelectromechanical device, such as a thermal ink jet die or printhead, is formed by the alignment of two planar substrates bonded together by an intermediate thick film layer of patterned polymeric material, such as polyimide. The improved device has a fully cured, patterned thick film layer which is planarized by chemical-mechanical polishing-to improve the bonding strength between the substrates. The planarization removes topographical formations generated during the deposition of the thick film layer and/or during the patterning of the recesses therein.
摘要翻译： 通过由诸如聚酰亚胺的图案化聚合物材料的中间厚膜层粘合在一起的两个平面基板的对准来形成改进的微电子机械装置，例如热喷墨模头或打印头。 改进的装置具有完全固化的图案化的厚膜层，其通过化学机械抛光进行平面化，以提高基板之间的结合强度。 平坦化消除了在沉积厚膜层期间和/或在其中凹陷图案化期间产生的形貌结构。
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公开(公告)号：US5010355A
公开(公告)日：1991-04-23
申请号：US456431
申请日：1989-12-26
CPC分类号： B41J2/14129 , B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1646 , H01L23/291 , H01L23/3157 , B41J2202/13 , H01L2924/0002
摘要： An improved ink jet printhead is disclosed of the type having a plurality of parallel ink flow channels which terminate with an ink droplet emitting nozzle, a heating element with a cavitational protective layer thereover located in each channel, and MOS electronic circuitry monolithically integrated within the printhead for applying electrical pulses to the heating elements. The pulsed heating elements produce bubbles momentarily on the protective layer of the heating elements which expel ink droplets from the nozzles. The improvement is obtained by providing multi-layer ionic passivation of the MOS electronic circuitry which is exposable to the ink. This is accomplished through the deposition of a multi-layered, thin film insulative coating thereon consisting of a first layer of doped or undoped silicon dioxide having a thickness of 200 .ANG. to 2 .mu.m followed by a second layer of plasma nitride having a thickness of 1000 .ANG. to 3 .mu.m. The silicon nitride is etched from the protective layers of the heating elements and electrical contact pads for external connection to electrical power so that the first layer of silicon oxide is exposed, followed by etching of the silicon oxide to remove it from the protective layer and contact pads. Thus, the MOS circuitry is protected from mobile ions in the ink while the cost effective fabrication of a printhead is maintained. In an alternate embodiment, the multi-layered ionic passivation comprises three thin film layers comprising polyimide interfacing with the ink, followed by silicon nitride, and doped or undoped silicon dioxide directly interfacing with the metallization.
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公开(公告)号：US5738799A
公开(公告)日：1998-04-14
申请号：US712761
申请日：1996-09-12
CPC分类号： B41J2/1639 , B41J2/1601 , B41J2/1607 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1635 , B41J2/1642 , B41J2/1645 , B41J2202/03
摘要： An ink-jet printhead fabrication technique enables capillary channels for liquid ink to be formed with square or rectangular cross-sections. A sacrificial layer is placed over the main surface of a silicon chip, the sacrificial layer being patterned in the form of the void formed by the desired ink channels. A permanent layer, comprising permanent material, is applied over the sacrificial layer, and, after polishing the two layers to form a uniform surface, the sacrificial layer is removed. Preferred materials for the sacrificial layer include polyimide while preferred materials for the permanent layer include polyarylene ether, although a variety of material combinations are possible.
摘要翻译： 喷墨打印头制造技术使得用于液体油墨的毛细通道可以形成为方形或矩形横截面。 将牺牲层放置在硅芯片的主表面上，牺牲层以由期望的墨水通道形成的空隙的形式构图。 包括永久材料的永久层被施加在牺牲层上，并且在抛光两层以形成均匀的表面之后，去除牺牲层。 用于牺牲层的优选材料包括聚酰亚胺，而用于永久层的优选材料包括聚亚芳基醚，尽管各种材料组合是可能的。
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公开(公告)号：US06315398B1
公开(公告)日：2001-11-13
申请号：US07963969
申请日：1992-10-21
申请人： Cathie J. Burke , Narayan V. Desphande , William G. Hawkins , Dale R. Ims , Michael P. O'Horo , Gary A. Kneezel , Thomas A. Tellier , Ivan Rezanka
发明人： Cathie J. Burke , Narayan V. Desphande , William G. Hawkins , Dale R. Ims , Michael P. O'Horo , Gary A. Kneezel , Thomas A. Tellier , Ivan Rezanka
IPC分类号： B41J205
CPC分类号： B41J2/1604 , B41J2/14129 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1646
摘要： The new heater element design has a pit layer which protects the overglaze passivation layer, PSG step region, portions of the Ta layer and dielectric isolation layer and junctions or regions susceptible to the cavitational pressures. Further, the inner walls of the pit layer define the effective heater area and the dopant lines define the actual heater area. In alternative embodiments, the dopant lines define the actual and effective heater areas, and an inner wall and a dopant line define the actual and effective heater areas. Further, when the new heater element designs are incorporated into printheads having full pit channel geometry and open pit channel geometry, the operating lifetime of the printhead is extended because the added protection of the pit layer prevents: 1) passivation damage and cavitational damages of the heater elements; and 2) degradation of heater robustness, hot spot formations and heater failures well into the 109 pulse range. The printhead incorporating the new heater element design can be incorporated into drop-on-demand printing systems of a carriage type or a full width type.
摘要翻译： 新的加热器元件设计具有凹坑层，其保护釉面钝化层，PSG阶梯区域，Ta层和电介质隔离层的部分以及对空穴压力敏感的结或区域。 此外，凹坑层的内壁限定有效的加热器面积，并且掺杂剂线限定实际的加热器面积。 在替代实施例中，掺杂剂线限定实际和有效的加热器区域，并且内壁和掺杂剂线限定实际和有效的加热器区域。 此外，当新的加热器元件设计结合到具有全坑通道几何形状和露天通道几何形状的打印头中时，打印头的工作寿命延长，因为凹坑层的附加保护防止：1）钝化损伤和空穴损伤 加热元件; 和2）加热器鲁棒性，热点形成和加热器故障的恶化达到109脉冲范围。 包含新的加热器元件设计的打印头可以结合到托架型或全宽型的按需按需打印系统中。
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公开(公告)号：US6102528A
公开(公告)日：2000-08-15
申请号：US953656
申请日：1997-10-17
CPC分类号： B41J2/0455 , B41J2/0458 , B41J2/14072 , B41J2202/13
摘要： A drive transistor for a high resolution ink jet printhead having a pocket implant in the gate region of the device. The pocket implant enables a reduced source to drain spacing without loss of breakdown voltage. Accordingly, the size of the transistor may be reduced. Alternatively, this device is suitable for addressing 1200 spi resolution printheads. In one embodiment, the pocket implant extends about 1 .mu.m beyond the gate region towards the drain region. Both embodiments produce a graded drift region.
摘要翻译： 一种用于高分辨率喷墨打印头的驱动晶体管，其具有在该器件的栅极区域中的凹穴注入。 袋式注入使得能够减少源极间距而不损失击穿电压。 因此，可以减小晶体管的尺寸。 或者，该器件适用于寻址1200个spi分辨率打印头。 在一个实施例中，口袋植入物向漏极区域延伸超过栅极区域约1μm。 两个实施例都产生渐变漂移区域。
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6.发明授权Thermal ink jet printheads with power MOS driver devices having enhanced transconductance 失效具有功率MOS驱动器器件的热喷墨打印头具有增强的跨导
公开(公告)号：US5969392A
公开(公告)日：1999-10-19
申请号：US344397
申请日：1994-11-23
IPC分类号： B41J2/045 , B41J2/055 , B41J2/14 , B41J2/16 , H01L21/8236 , H01L49/00 , H01L29/76 , H01L29/94 , H01L31/062 , H01L31/113 , H01L31/119
CPC分类号： B41J2/1631 , B41J2/14129 , B41J2/1604 , B41J2/1623 , B41J2/1629 , B41J2/1639 , H01L21/8236 , B41J2202/13
摘要： A high voltage MOS transistor, for use in a thermal ink jet printhead, is fabricated with a single, uniformly thick layer of polysilicon that serves as a field plate over the drift region and a gate over the channel region. The fabrication of the drift region and associated drift oxide is performed in a sequence independent of the device channel stop and field oxide fabrication, allowing the drift region to be optimized by varying the thickness of the drift oxide. Using a field plate to increase the breakdown voltage of the device by reducing the concentration of the electric field, the device transconductance is increased by increasing the doping of the drift region without an attendant decrease in breakdown voltage.
摘要翻译： 用于热喷墨打印头的高电压MOS晶体管被制造成具有单个均匀厚度的多晶硅层，其用作漂移区上的场板和沟道区上的栅极。 漂移区域和相关的漂移氧化物的制造以独立于器件沟道截止和场氧化物制造的顺序执行，允许通过改变漂移氧化物的厚度来优化漂移区域。 使用场板通过降低电场的浓度来增加器件的击穿电压，器件跨导通过增加漂移区的掺杂而不降低击穿电压而增加。
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公开(公告)号：US06905196B2
公开(公告)日：2005-06-14
申请号：US10431540
申请日：2003-05-08
申请人： Scott N. Seabridge , Alan D. Raisanen , Scott C. Warner , Thomas A. Tellier , Cathie J. Burke , William G. Hawkins
发明人： Scott N. Seabridge , Alan D. Raisanen , Scott C. Warner , Thomas A. Tellier , Cathie J. Burke , William G. Hawkins
CPC分类号： B41J2/14129 , B41J2/14072 , B41J2202/03
摘要： A fluid ejector includes a fluid channel having a resistive heater and terminating in a nozzle, a common bus formed transverse to the fluid channel and between the resistive heater and the nozzle, a connection line laterally adjacent to the fluid channel, and a connection structure for electrically connecting the common bus with the resistive heater and the connection line, the connection structure including a first set of one or more layers for electrical connection and a second set of one or more layers for covering the common bus and connection line. The first set of one or more layers includes a doped polysilicon layer on or overlaid by an optional tantalum-silicide layer. The second set of one or more layers includes a nitride layer on or overlaid by a tantalum layer.
摘要翻译： 流体喷射器包括具有电阻加热器并终止于喷嘴的流体通道，与流体通道横向于电阻加热器和喷嘴之间的公共总线，与流体通道横向相邻的连接管线，以及用于 将公共总线与电阻加热器和连接线电连接，连接结构包括用于电连接的一个或多个层的第一组和用于覆盖公共总线和连接线的一个或多个层的第二组。 第一组一层或多层包括在可选的硅化硅层上或由可选的硅化硅层覆盖的掺杂多晶硅层。 第二组一层或多层包括在钽层上或覆盖钽层的氮化物层。
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8.发明授权
公开(公告)号：US4947192A
公开(公告)日：1990-08-07
申请号：US336624
申请日：1989-04-07
CPC分类号： B41J2/1604 , B41J2/1626 , B41J2/1631 , H01L27/0211 , H01L27/0688 , B41J2202/13
摘要： A thermal jet ink printing system is provided with an inproved printhead. The printhead is formed by monolithic integration of MOS transistors switches onto the same silicon substrate containing the resistive elements. In a preferred embodiment, the transistor switches and resistive elements are formed from a single layer of polysilicon with the resistive element formed on a thermally grown field oxide layer having a thickness ranging from about one to four microns. The integrated circuit chips are formed by MOS technology, are thermally stable and can be operated at higher voltages.
摘要翻译： 热喷墨打印系统设有一个未经授权的打印头。 打印头通过将MOS晶体管开关单元集成到包含电阻元件的同一硅衬底上而形成。 在优选实施例中，晶体管开关和电阻元件由单层多晶硅形成，其中电阻元件形成在厚度范围为约1至4微米的热生长场氧化物层上。 集成电路芯片由MOS技术形成，热稳定，可在较高电压下工作。
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公开(公告)号：US5428498A
公开(公告)日：1995-06-27
申请号：US952015
申请日：1992-09-28
申请人： William G. Hawkins , Cathie J. Burke , Thomas E. Watrobski , Thomas A. Tellier , Sophie Vandebroek
发明人： William G. Hawkins , Cathie J. Burke , Thomas E. Watrobski , Thomas A. Tellier , Sophie Vandebroek
IPC分类号： H01L27/04 , H01L21/822 , H01L27/02 , H02H3/22
CPC分类号： H01L27/0251 , H01L27/0259
摘要： An electrostatic discharge protection device for a connector associated with an integrated circuit chip, particularly one associated with a thermal ink-jet printhead. A MOS field effect device extends along at least one edge of the connector on the chip. A bipolar transistor, parasitic to the field effect device, conducts current from the connector to ground in response to a voltage between the connector and ground in excess of a predetermined threshold. A zone of a predetermined electrical resistance is operatively disposed between the bipolar transistor and ground. The zone may substantially encircle the bonding pad of the connector to evenly distribute local incidences of high voltage. The invention enables integrated circuits to pass ESD requirements of office products, which is 15 kV by Human Body Model testing.
摘要翻译： 一种用于与集成电路芯片相关联的连接器的静电放电保护装置，特别是与热喷墨打印头相关联的静电放电保护装置。 MOS场效应器件沿芯片上连接器的至少一个边缘延伸。 寄生到场效应器件的双极晶体管响应于连接器和地之间的电压超过预定阈值而将电流从连接器传导到地。 预定电阻的区域可操作地设置在双极晶体管和地之间。 该区域可以基本上环绕连接器的焊盘，以均匀分布高电压的局部发生。 本发明使得集成电路能够通过人体模型测试传递15kV的办公产品的ESD要求。
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10.发明授权
公开(公告)号：US5208606A
公开(公告)日：1993-05-04
申请号：US795596
申请日：1991-11-21
CPC分类号： B41J2/1606
摘要： A thermal ink jet printhead has an outer, metallic hydrophobic coating on its front face to repel ink. Eliminating the accumulation of ink at the nozzles of the printhead allows an ink droplet to be accurately ejected and ensures the directionality of the ejected ink droplet onto the printing medium. The outer coating is formed of a metal selected from the group of noble metals, including gold, platinum, palladium, silver, rhodium and ruthenium. An adhesion layer is preferably deposited between the front face of the printhead and the outer ink-repellent coating. The metallic coating is preferably applied by electroplating, wet electroless plating, evaporation, sputtering, ion plating, CVD or plasma CVD.
摘要翻译： 热喷墨打印头在其前面具有外部金属疏水涂层以排斥油墨。 在打印头的喷嘴处消除墨水的积聚允许墨滴被精确地喷射并确保喷射的墨滴在打印介质上的方向性。 外涂层由选自贵金属，包括金，铂，钯，银，铑和钌的金属形成。 粘合层优选沉积在打印头的前表面和外部防墨涂层之间。 金属涂层优选通过电镀，湿化学镀，蒸发，溅射，离子镀，CVD或等离子体CVD来进行。
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