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公开(公告)号:US20180269375A1
公开(公告)日:2018-09-20
申请号:US15755178
申请日:2016-08-26
申请人: CeramTec GmbH
发明人: Hans-Jürgen SCHREINER , Tanja EINHELLINGER-MÜLLER , Tobias SCHMIDT , Ralf MOOS , Michael SCHUBERT , Reiner BINDIG
IPC分类号: H01L41/053 , H01L41/083 , H01L41/09 , H01L41/187 , H01L41/23
CPC分类号: H01L41/0533 , H01L41/083 , H01L41/0986 , H01L41/1876 , H01L41/23
摘要: The invention relates to a piezoceramic multi-layer actuator with a moisture-repellant protective layer and a method for producing same.
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公开(公告)号:US20180248108A1
公开(公告)日:2018-08-30
申请号:US15755195
申请日:2016-08-26
申请人: CeramTec GmbH
发明人: Hans-Jürgen SCHREINER , Tanja EINHELLINGER-MÜLLER , Tobias SCHMIDT , Ralf MOOS , Michael SCHUBERT
IPC分类号: H01L41/319 , H01L41/08 , H01L41/187 , C01G25/00 , C23C24/04 , C23C28/00
CPC分类号: H01L41/319 , C01G25/006 , C01P2006/40 , C23C24/04 , C23C28/32 , C23C28/345 , H01L41/0815 , H01L41/1876 , H01L41/314
摘要: The invention relates to a layer having piezoelectric properties and a method for producing a layer having piezoelectric properties, in particular by means of aerosol deposition method (ADM).
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