公开(公告)号：US5260668A

公开(公告)日：1993-11-09

申请号：US897459

申请日：1992-06-11

申请人： Chester L. Mallory ,  Walter H. Johnson ,  Wayne K. Borglum

发明人： Chester L. Mallory ,  Walter H. Johnson ,  Wayne K. Borglum

IPC分类号： G01N27/04 ,  G01R27/00 ,  G01R27/08 ,  G01N27/14

CPC分类号： G01N27/041 ,  G01R27/00

摘要： The resistivity of the surface of a semiconductor wafer is measured at different temperatures to determine the resistivity as a function of temperature. The temperature of the semiconductor wafer is varied by a heater in thermal contact with the semiconductor wafer, and the temperature is measured by a temperature sensor in thermal contact with the semiconductor. The heater is controlled by a control unit which adjusts the amount of heat provided by the heater, thereby controlling the temperature at which a measurement from a four-point resistivity probe is taken.

摘要翻译： 在不同的温度下测量半导体晶片表面的电阻率，以确定作为温度的函数的电阻率。 通过与半导体晶片热接触的加热器来改变半导体晶片的温度，并且通过与半导体热接触的温度传感器来测量温度。 加热器由调节由加热器提供的热量的控制单元控制，从而控制从四点电阻率探头测量的温度。

公开(公告)号：US4907931A

公开(公告)日：1990-03-13

申请号：US195703

申请日：1988-05-18

申请人： Chester L. Mallory ,  Edric H. Tong ,  Wayne K. Borglum

发明人： Chester L. Mallory ,  Edric H. Tong ,  Wayne K. Borglum

IPC分类号： H01L21/677 ,  H01L21/687

CPC分类号： H01L21/68707 ,  H01L21/67766 ,  Y10S414/136

摘要： A semiconductor wafer handling apparatus for automated movement of semiconductor wafers between wafer cassette trays and wafer test systems is provided. The apparatus includes a platform for carrying at least one semiconductor wafer cassette tray, a wafer alignment device carried by the platform for aligning a semiconductor wafer in a predetermined test position and a wafer transfer device associated with the platform and the wafer alignment device for transferring the wafer between the cassette tray, the alignment device and the test system. The wafer transfer device is operational in the same plane relative to the platform and capable of extending, retracting and rotating in the plane. In includes a shuttle arm assembly mounted for translational and rotational movement so that it may be selectively aligned with the cassette tray, the alignment device and the test system and further includes a device for controlling the translational and rotational movement of the shuttle arm assembly for selectively extending, retracting the rotating the shuttle arm assembly relative to each of the cassette tray, the alignment device and the test system so that in response to signals from the control device, the shuttle arm assembly can be selectively actuated to translate to a cassette tray position and secure and remove a semiconductor wafer from the cassette tray, translate to a wafer alignment position and insert, release, secure and remove the wafer from the alignment device, and translate and rotate to a wafer test position and place the wafer on, release, secure, and lift the wafer off the test system.

摘要翻译： 提供了一种半导体晶片处理装置，用于在晶片盒托盘和晶片测试系统之间自动移动半导体晶片。 该装置包括用于承载至少一个半导体晶片盒托盘的平台，由平台承载的晶片对准装置，用于将预定测试位置的半导体晶片对准，以及与该平台相关联的晶片传送装置和晶片对准装置， 在盒托盘，对准装置和测试系统之间的晶片。 晶片传送装置相对于平台在相同的平面中可操作并且能够在平面中延伸，缩回和旋转。 其包括一个安装成平移和旋转运动的梭臂组件，使得它可以选择性地与盒托盘，对准装置和测试系统对齐，并且还包括用于控制梭臂组件的平移和旋转运动的装置，用于选择性地 延伸，缩回相对于盒托盘，对准装置和测试系统中的每一个旋转梭臂组件，使得响应于来自控制装置的信号，梭臂组件可以被选择性地致动以平移到盒托盘位置 并且从盒托盘固定和移除半导体晶片，转移到晶片对准位置，并从对准装置插入，释放，固定和移除晶片，并平移并旋转到晶片测试位置并将晶片放置， 安全，并将晶片从测试系统上提起。

公开(公告)号：US08876612B2

公开(公告)日：2014-11-04

申请号：US13018392

申请日：2011-01-31

申请人： Chester L. Mallory

发明人： Chester L. Mallory

IPC分类号： G06F17/00 ,  G07F17/34 ,  G07F17/32

CPC分类号： G07F17/34 ,  G07F17/3216

摘要： A machine cabinet system is provided. The system includes a machine cabinet with a top face and a front face. In one embodiment, a removable panel is included that is removably coupled to at least one of the top face and the front face of the machine cabinet. In another embodiment, the removable panel is removably coupled to the machine cabinet without use of a tool.

摘要翻译： 提供机柜系统。 该系统包括具有顶面和前面的机柜。 在一个实施例中，包括可拆卸地联接到机柜的顶面和前表面中的至少一个的可拆卸面板。 在另一个实施例中，可拆卸面板可拆卸地联接到机器柜而不使用工具。

公开(公告)号：US4843538A

公开(公告)日：1989-06-27

申请号：US208965

申请日：1988-06-20

申请人： Leslie A. Lane ,  Lynn V. Lybeck ,  David S. Perloff ,  Chester L. Mallory

发明人： Leslie A. Lane ,  Lynn V. Lybeck ,  David S. Perloff ,  Chester L. Mallory

IPC分类号： G06F3/023 ,  G06F3/033 ,  G06F3/048 ,  G06F3/153

CPC分类号： G06F3/0482 ,  G06F3/04895

摘要： A process control interface includes a multi-level dynamic menu for selecting processes from a set of processes that are organized into groups and subgroups. An engineering set up control program enables an engineer to denote which of these groups, subgroups and processes are available for selection by an operator using the process control interface. Only those groups, subgroups and processes which are available for selection are displayed in the dynamic menu. The set of processes defined by the engineering set up control program can be stored on individual operator-related disks so that each operator has access to a distinct set of available processes. Process subgroups and groups can be duplicated by the engineering setup control program to facilitate the setting up of new control processes. In addition, the engineering set up control program can denote parameters used by a process as required entry parameters, fixed value parameters, operator alterable parameters, and single forced entry parameters--the latter being parameters which must be assigned a value only the first time that a process is run.

摘要翻译： 过程控制接口包括用于从被组织成组和子组的一组过程中选择过程的多级动态菜单。 工程设计控制程序使工程师能够使用过程控制界面来表示这些组，子组和过程中的哪一个可供操作员选择。 只有可供选择的组，子组和进程才会显示在动态菜单中。 由工程设置控制程序定义的一组进程可以存储在各个操作员相关的磁盘上，以便每个操作员可以访问一组不同的可用进程。 过程子组和组可以由工程设置控制程序重复，以便于设置新的控制过程。 此外，工程设置控制程序可以将过程所使用的参数表示为所需输入参数，固定值参数，操作员可变参数和单个强制输入参数 - 后者是必须仅在第一次分配值的参数 运行一个进程。

公开(公告)号：US5552704A

公开(公告)日：1996-09-03

申请号：US82661

申请日：1993-06-25

申请人： Chester L. Mallory ,  Walter Johnson ,  Kurt Lehman

发明人： Chester L. Mallory ,  Walter Johnson ,  Kurt Lehman

IPC分类号： G01N27/02 ,  G01N27/72 ,  G01R27/02 ,  G01R31/28 ,  H01L21/66 ,  G01R33/00 ,  G01N27/76 ,  G01R33/12

CPC分类号： G01R31/2831 ,  G01N27/023 ,  G01R27/02 ,  H01L22/14 ,  H01L2924/0002

摘要： A method and apparatus for performing conductance measurements on a sample using an eddy current probe, without the need for measurement or knowledge of the separation between probe and sample. The probe comprises sense and drive coils mounted in close proximity to each other (or a single coil which functions as both a sense and drive coil), circuitry for producing AC voltage in the drive coil, and a meter for measuring in-phase and quadrature components of induced voltage in the sense coil. Look-up table data can be generated for use in subsequent measurements on samples of unknown conductance by performing eddy current measurements on samples having different known conductances to generate reference lift-off curves, processing the reference lift-off curves to determine a conductance function relating each known conductance to a location along a selected curve, and storing conductance values determined by the conductance function for different points on the selected curve as the look-up table data. An unknown sample conductance can then be determined by generating a lift-off curve from voltage measurements at different probe separations from the sample, determining a new intersection voltage pair representing the intersection of the lift-off curve with the selected curve, and determining the unknown conductance as a look-up table value indexed by the new intersection voltage pair.

摘要翻译： 使用涡流探针对样品进行电导测量的方法和装置，而不需要测量或了解探针和样品之间的分离。 探头包括彼此靠近地安装的感测和驱动线圈（或用作感测线圈和驱动线圈两者的单个线圈），用于在驱动线圈中产生AC电压的电路，以及用于测量同相和正交的仪表 感应线圈中感应电压的分量。 可以通过对具有不同已知电导的样品进行涡流测量来生成参考提升曲线，处理参考提升曲线以确定相关的电导函数，可以生成查找表数据以用于对未知电导的样本的后续测量 每个已知的电导到沿着所选曲线的位置，并且存储由所选曲线上的不同点的电导函数确定的电导值作为查找表数据。 然后可以通过从与样品不同的探针间隔的电压测量产生剥离曲线来确定未知样品电导，确定代表剥离曲线与所选曲线的交点的新交点电压对，并确定未知 电导作为由新的交叉电压对索引的查找表值。

公开(公告)号：US20110124419A1

公开(公告)日：2011-05-26

申请号：US13018392

申请日：2011-01-31

申请人： Chester L. Mallory

发明人： Chester L. Mallory

IPC分类号： G06F17/00

CPC分类号： G07F17/34 ,  G07F17/3216

摘要： A machine cabinet system is provided. The system includes a machine cabinet with a top face and a front face. In one embodiment, a removable panel is included that is removably coupled to at least one of the top face and the front face of the machine cabinet. In another embodiment, the removable panel is removably coupled to the machine cabinet without use of a tool.

摘要翻译： 提供机柜系统。 该系统包括具有顶面和前面的机柜。 在一个实施例中，包括可拆卸地联接到机柜的顶面和前表面中的至少一个的可拆卸面板。 在另一个实施例中，可拆卸面板可拆卸地联接到机器柜而不使用工具。

公开(公告)号：US5067805A

公开(公告)日：1991-11-26

申请号：US485596

申请日：1990-02-27

申请人： Timothy R. Corle ,  Chester L. Mallory ,  Philip D. Wasserman

发明人： Timothy R. Corle ,  Chester L. Mallory ,  Philip D. Wasserman

IPC分类号： G02B21/00 ,  G02B27/00

CPC分类号： G02B27/0018 ,  G02B21/0044 ,  G02B21/0068 ,  G02B21/0084

摘要： An improved real-time confocal scanning microscope, and an improved perforated disk for use in such microscope. A preferred embodiment of the inventive microscope includes a polarizing beamsplitting cube and a rotatable Nipkow disk perforted with a hexagonal hole pattern. The disk is preferably mounted so that the scan lines produced as the disk rotates will cross both the sample feature to be imaged and the sensor array in the system's video camera at an angle substantially equal to 45 degrees. This disk orientation ensures that brightness variations caused by a non-uniform scan will not affect the measurements. Rotation of the disk is preferably synchronized with the camera frame rate to prevent any scan errors from causing random (frame to frame) variations in the camera output. The polarizing beamsplitting cube consists of two triangular prisms connected (i.e., cemented) together by a dielectric film. Undesirable light reflections from the cube's faces are eliminated by orienting the cube about the dielectric film's normal axis so that light is incident at the cube at acute angles with respect to the cube's faces. An absorbing filter (such as a piece of black glass) is preferably optically cemented (or painted or otherwise coated) on the back face of the cube to absorb stray light.

摘要翻译： 改进的实时共聚焦扫描显微镜，以及用于这种显微镜的改进的穿孔盘。 本发明的显微镜的优选实施例包括偏振分束立方体和具有六角孔图案的可旋转的尼泊克磁盘。 优选地安装盘，使得当盘旋转产生的扫描线将以基本上等于45度的角度跨过要成像的样本特征和系统的摄像机中的传感器阵列。 该盘方向确保由不均匀扫描引起的亮度变化不会影响测量。 盘的旋转优选地与相机帧速率同步，以防止任何扫描错误引起相机输出中的随机（帧到帧）变化。 偏振分束立方体由通过电介质膜连接（即胶合）在一起的两个三角棱镜组成。 通过使立方体围绕电介质膜的法线轴定向，使得光线相对立方体的表面以锐角入射到立方体处，从而消除了立方体表面的不期望的光反射。 吸收过滤器（例如一块黑色玻璃）优选在立方体的背面上光学胶合（或涂漆或以其它方式涂覆）以吸收杂散光。

公开(公告)号：US4951190A

公开(公告)日：1990-08-21

申请号：US375878

申请日：1989-07-06

申请人： Leslie A. Lane ,  Lynn V. Lybeck ,  David S. Perloff ,  Chester L. Mallory

发明人： Leslie A. Lane ,  Lynn V. Lybeck ,  David S. Perloff ,  Chester L. Mallory

IPC分类号： G06F19/00

CPC分类号： G05B23/0264 ,  G05B23/0267

摘要： A method of selecting items from a hierarchy of items and then performing a selected task on the selected set of items. An engineering set up control program includes a procedure for denoting processes, groups of processes, and subgroups of processes which are available for use by operators of the system. The processes, groups and subgroups are visually presented in a three level menu. Subgroups and groups of processes can be selected using the three level menu, and then operated on as a group.

摘要翻译： 从项目的层次结构中选择项目，然后在所选择的项目集合上执行所选择的任务的方法。 工程设置控制程序包括用于表示可供系统操作者使用的过程，过程组和过程子组的过程。 过程，组和子组可视化呈现在三级菜单中。 可以使用三级菜单选择子组和进程组，然后作为一组进行操作。

公开(公告)号：US4805089A

公开(公告)日：1989-02-14

申请号：US864024

申请日：1986-05-16

申请人： Leslie A. Lane ,  Lynn V. Lybeck ,  David S. Perloff ,  Chester L. Mallory

发明人： Leslie A. Lane ,  Lynn V. Lybeck ,  David S. Perloff ,  Chester L. Mallory

IPC分类号： G06F9/46 ,  G05B15/02 ,  G06F3/023 ,  G06F3/033 ,  G06F3/048 ,  G06F17/40 ,  G06F19/00 ,  H01L21/66 ,  G06F15/46 ,  G06F15/74

CPC分类号： G06F3/04895 ,  G06F3/0482

摘要： A method of controlling a process using a programmed digital computer with a set of process control programs. An operator control program allows the user to select and run a specified process and to collect measurement data while the selected process is run. A data analysis program enables interactive computer controlled data analysis, including displaying a trand chart depicting a sequence of data points, each data point representing at least a portion of the measurement data collected and stored while running a selected process. A selectably positionable pointer is displayed on the trend chart for pointing at an individual data point so that the user can select and perform a predefined task on the measurement data stored in the data structure corresponding to the data point being pointed at by said selectably positionable pointer.

摘要翻译： 一种使用程序化数字计算机利用一组过程控制程序控制过程的方法。 操作员控制程序允许用户选择并运行指定的过程并在选定的过程运行时收集测量数据。 数据分析程序实现交互式计算机控制的数据分析，包括显示描绘数据点序列的品牌图，每个数据点表示在运行所选择的过程时收集和存储的测量数据的至少一部分。 在趋势图上显示可选择的可定位的指针，用于指向单个数据点，使得用户可以对存储在数据结构中的测量数据选择并执行预定义的任务，所述数据结构对应于由所述可选择定位的指针指向的数据点 。

公开(公告)号：US4679137A

公开(公告)日：1987-07-07

申请号：US729153

申请日：1985-04-30

申请人： Leslie A. Lane ,  Lynn V. Lybeck ,  David S. Perloff ,  Chester L. Mallory

发明人： Leslie A. Lane ,  Lynn V. Lybeck ,  David S. Perloff ,  Chester L. Mallory

IPC分类号： G05B15/02 ,  G06F19/00 ,  H01L21/66 ,  G06F15/46

CPC分类号： G05B19/409 ,  G05B2219/36168

摘要： A system and method for computer control of machine processes, including a dynamic menu feature used in the selection of processes and the definition and selection of operating parameters used by a process control program to direct the performance of the process by the machine.Data structures for a multiplicity of processes are defined and stored. Values stored in the data structures indicate which processes are available for use and the process control program associated with each process. Furthermore, for each parameter of each process a data structure contains an indicia of whether the parameter is a forced entry parameter (which must be given a value before the process is run), a may change parameter (with a default value that may be changed when the process is run), or a locked parameter which has a fixed value.An engineering set up program enables interactive computer controlled performance of the steps of storing the above-mentioned data structures, entry of values into the data structures, and the entry of default parameter values. An operator control program, utilizing the stored data structures, enables interactive computer controlled performance of the steps of selecting one of the enabled processes, entry of parameter values, and running of the selected process.

摘要翻译： 一种用于机器过程的计算机控制的系统和方法，包括用于选择过程的动态菜单特征以及由过程控制程序用于指导机器执行过程的操作参数的定义和选择。 定义和存储多个进程的数据结构。 存储在数据结构中的值指示哪些进程可供使用，以及与每个进程关联的进程控制程序。 此外，对于每个进程的每个参数，数据结构包含参数是否是强制输入参数（必须在运行进程之前必须给定值）的标记，a可以改变参数（具有可能被改变的默认值 运行进程时）或具有固定值的锁定参数。 工程设置程序使得交互式计算机控制性能能够存储上述数据结构，数值输入到数据结构以及默认参数值的输入步骤。 使用所存储的数据结构的操作员控制程序使得能够进行交互式计算机控制性能的选择所启用的过程之一，参数值的输入和所选过程的运行的步骤。