公开(公告)号：US08101447B2

公开(公告)日：2012-01-24

申请号：US11961478

申请日：2007-12-20

申请人： Hung-Cheng Lin ,  Chia-Ming Lee ,  Jen-Inn Chyi

发明人： Hung-Cheng Lin ,  Chia-Ming Lee ,  Jen-Inn Chyi

IPC分类号： H01L33/20

CPC分类号： H01L33/10 ,  H01L33/20

摘要： The present invention discloses a light emitting diode (LED) element and a method for fabricating the same, which can promote light extraction efficiency of LED, wherein a substrate is etched to obtain basins with inclined natural crystal planes, and an LED epitaxial structure is selectively formed inside the basin. Thereby, an LED element having several inclines is obtained. Via the inclines, the probability of total internal reflection is reduced, and the light extraction efficiency of LED is promoted.

摘要翻译： 本发明公开了一种发光二极管（LED）元件及其制造方法，其可以提高LED的光提取效率，其中蚀刻基板以获得具有倾斜的自然晶体面的池，并且LED外延结构选择性地 形成在盆地内。 由此，得到具有多个倾斜的LED元件。 通过倾斜，全内反射的概率降低，LED的光提取效率得到提升。

公开(公告)号：US07598105B2

公开(公告)日：2009-10-06

申请号：US11963517

申请日：2007-12-21

申请人： Chia-Ming Lee ,  Hung-Cheng Lin ,  Jen-Inn Chyi

发明人： Chia-Ming Lee ,  Hung-Cheng Lin ,  Jen-Inn Chyi

IPC分类号： H01L21/00

CPC分类号： H01L33/12 ,  H01L21/0237 ,  H01L21/0242 ,  H01L21/02647 ,  H01L21/02658 ,  H01L33/22

摘要： The present invention discloses a light emitting diode structure and a method for fabricating the same. In the present invention, a substrate is placed in a solution to form a chemical reaction layer. Next, the substrate is etched to form a plurality of concave zones and a plurality of convex zones with the chemical reaction layer overhead. Next, the chemical reaction layer is removed to form an irregular geometry of the concave zones and convex zones on the surface of the substrate. Then, a semiconductor light emitting structure is epitaxially formed on the surface of the substrate. Thereby, the present invention can achieve a light emitting diode structure having improved internal and external quantum efficiencies.

摘要翻译： 本发明公开了一种发光二极管结构及其制造方法。 在本发明中，将基板放置在溶液中以形成化学反应层。 接下来，蚀刻基板以形成具有化学反应层顶部的多个凹区域和多个凸区域。 接下来，去除化学反应层，以形成衬底表面上的凹区和凸区的不规则几何形状。 然后，在衬底的表面上外延形成半导体发光结构。 因此，本发明可以实现具有改善的内部和外部量子效率的发光二极管结构。

公开(公告)号：US20090298213A1

公开(公告)日：2009-12-03

申请号：US12538427

申请日：2009-08-10

申请人： Chia-Ming LEE ,  Hung-Cheng Lin ,  Jen-Inn Chyi

发明人： Chia-Ming LEE ,  Hung-Cheng Lin ,  Jen-Inn Chyi

IPC分类号： H01L33/00

CPC分类号： H01L33/12 ,  H01L21/0237 ,  H01L21/0242 ,  H01L21/02647 ,  H01L21/02658 ,  H01L33/22

摘要： The present invention discloses a light emitting diode structure and a method for fabricating the same. In the present invention, a substrate is placed in a solution to form a chemical reaction layer. Next, the substrate is etched to form a plurality of concave zones and a plurality of convex zones with the chemical reaction layer overhead. Next, the chemical reaction layer is removed to form an irregular geometry of the concave zones and convex zones on the surface of the substrate. Then, a semiconductor light emitting structure is epitaxially formed on the surface of the substrate. Thereby, the present invention can achieve a light emitting diode structure having improved internal and external quantum efficiencies.

公开(公告)号：US20100295017A1

公开(公告)日：2010-11-25

申请号：US12851607

申请日：2010-08-06

申请人： Hung-Cheng LIN ,  Chia-Ming Lee ,  Jen-Inn Chyi

发明人： Hung-Cheng LIN ,  Chia-Ming Lee ,  Jen-Inn Chyi

IPC分类号： H01L33/04 ,  H01L33/02 ,  H01L33/30

CPC分类号： H01L33/10 ,  H01L33/20

摘要： The present invention discloses a light emitting diode (LED) element and a method for fabricating the same, which can promote light extraction efficiency of LED, wherein a substrate is etched to obtain basins with inclined natural crystal planes, and an LED epitaxial structure is selectively formed inside the basin. Thereby, an LED element having several inclines is obtained. Via the inclines, the probability of total internal reflection is reduced, and the light extraction efficiency of LED is promoted.

摘要翻译： 本发明公开了一种发光二极管（LED）元件及其制造方法，其可以提高LED的光提取效率，其中蚀刻基板以获得具有倾斜的自然晶体面的池，并且LED外延结构选择性地 形成在盆地内。 由此，得到具有多个倾斜的LED元件。 通过倾斜，全内反射的概率降低，LED的光提取效率得到提升。

公开(公告)号：US20090159910A1

公开(公告)日：2009-06-25

申请号：US11963558

申请日：2007-12-21

申请人： Hung-Cheng LIN ,  Chia-Ming Lee ,  Jen-Inn Chyi

发明人： Hung-Cheng LIN ,  Chia-Ming Lee ,  Jen-Inn Chyi

IPC分类号： H01L21/306 ,  H01L33/00

CPC分类号： H01L33/22

摘要： The present invention discloses a light emitting diode structure and a method for fabricating the same. In the present invention, a substrate is placed in a solution to form a chemical reaction layer on carved regions; the carved region is selectively etched to form a plurality of concave zones and form a plurality of convex zones; a semiconductor layer structure is epitaxially grown on the element regions and carved regions of the substrate; the semiconductor layer structure on the element regions is fabricated into a LED element with a photolithographic process.

摘要翻译： 本发明公开了一种发光二极管结构及其制造方法。 在本发明中，将基板放置在溶液中以在雕刻区域上形成化学反应层; 选择性地蚀刻雕刻区域以形成多个凹陷区域并形成多个凸区域; 在衬底的元件区域和雕刻区域上外延生长半导体层结构; 通过光刻工艺将元件区域上的半导体层结构制成LED元件。

公开(公告)号：US07799593B2

公开(公告)日：2010-09-21

申请号：US12538427

申请日：2009-08-10

申请人： Chia-Ming Lee ,  Hung-Cheng Lin ,  Jen-Inn Chyi

发明人： Chia-Ming Lee ,  Hung-Cheng Lin ,  Jen-Inn Chyi

IPC分类号： H01L21/00

CPC分类号： H01L33/12 ,  H01L21/0237 ,  H01L21/0242 ,  H01L21/02647 ,  H01L21/02658 ,  H01L33/22

摘要： The present invention discloses a light emitting diode structure and a method for fabricating the same. In the present invention, a substrate is placed in a solution to form a chemical reaction layer. Next, the substrate is etched to form a plurality of concave zones and a plurality of convex zones with the chemical reaction layer overhead. Next, the chemical reaction layer is removed to form an irregular geometry of the concave zones and convex zones on the surface of the substrate. Then, a semiconductor light emitting structure is epitaxially formed on the surface of the substrate. Thereby, the present invention can achieve a light emitting diode structure having improved internal and external quantum efficiencies.

摘要翻译： 本发明公开了一种发光二极管结构及其制造方法。 在本发明中，将基板放置在溶液中以形成化学反应层。 接下来，蚀刻基板以形成具有化学反应层顶部的多个凹区域和多个凸区域。 接下来，去除化学反应层，以形成衬底表面上的凹区和凸区的不规则几何形状。 然后，在衬底的表面上外延形成半导体发光结构。 因此，本发明可以实现具有改善的内部和外部量子效率的发光二极管结构。

公开(公告)号：US07713769B2

公开(公告)日：2010-05-11

申请号：US11963558

申请日：2007-12-21

申请人： Hung-Cheng Lin ,  Chia-Ming Lee ,  Jen-Inn Chyi

发明人： Hung-Cheng Lin ,  Chia-Ming Lee ,  Jen-Inn Chyi

IPC分类号： H01L21/46 ,  H01L21/461 ,  H01L21/8252 ,  H01L27/15

CPC分类号： H01L33/22

摘要： The present invention discloses a light emitting diode structure and a method for fabricating the same. In the present invention, a substrate is placed in a solution to form a chemical reaction layer on carved regions; the carved region is selectively etched to form a plurality of concave zones and form a plurality of convex zones; a semiconductor layer structure is epitaxially grown on the element regions and carved regions of the substrate; the semiconductor layer structure on the element regions is fabricated into a LED element with a photolithographic process.

摘要翻译： 本发明公开了一种发光二极管结构及其制造方法。 在本发明中，将基板放置在溶液中以在雕刻区域上形成化学反应层; 选择性地蚀刻雕刻区域以形成多个凹陷区域并形成多个凸区域; 在衬底的元件区域和雕刻区域上外延生长半导体层结构; 通过光刻工艺将元件区域上的半导体层结构制成LED元件。

公开(公告)号：US20090294756A1

公开(公告)日：2009-12-03

申请号：US12538400

申请日：2009-08-10

申请人： Chia-Ming Lee ,  Hung-Cheng Lin ,  Jen-Inn Chyi

发明人： Chia-Ming Lee ,  Hung-Cheng Lin ,  Jen-Inn Chyi

IPC分类号： H01L29/06 ,  H01L33/00

CPC分类号： H01L33/12 ,  H01L21/0237 ,  H01L21/0242 ,  H01L21/02647 ,  H01L21/02658 ,  H01L33/22

摘要： The present invention discloses a light emitting diode structure and a method for fabricating the same. In the present invention, a substrate is placed in a solution to form a chemical reaction layer. Next, the substrate is etched to form a plurality of concave zones and a plurality of convex zones with the chemical reaction layer overhead. Next, the chemical reaction layer is removed to form an irregular geometry of the concave zones and convex zones on the surface of the substrate. Then, a semiconductor light emitting structure is epitaxially formed on the surface of the substrate. Thereby, the present invention can achieve a light emitting diode structure having improved internal and external quantum efficiencies.

摘要翻译： 本发明公开了一种发光二极管结构及其制造方法。 在本发明中，将基板放置在溶液中以形成化学反应层。 接下来，蚀刻基板以形成具有化学反应层顶部的多个凹区域和多个凸区域。 接下来，去除化学反应层，以形成衬底表面上的凹区和凸区的不规则几何形状。 然后，在衬底的表面上外延形成半导体发光结构。 因此，本发明可以实现具有改善的内部和外部量子效率的发光二极管结构。

公开(公告)号：US20090159871A1

公开(公告)日：2009-06-25

申请号：US11963517

申请日：2007-12-21

申请人： Chia-Ming LEE ,  Hung-Cheng Lin ,  Jen-Inn Chyi

发明人： Chia-Ming LEE ,  Hung-Cheng Lin ,  Jen-Inn Chyi

IPC分类号： H01L33/00

CPC分类号： H01L33/12 ,  H01L21/0237 ,  H01L21/0242 ,  H01L21/02647 ,  H01L21/02658 ,  H01L33/22

摘要： The present invention discloses a light emitting diode structure and a method for fabricating the same. In the present invention, a substrate is placed in a solution to form a chemical reaction layer. Next, the substrate is etched to form a plurality of concave zones and a plurality of convex zones with the chemical reaction layer overhead. Next, the chemical reaction layer is removed to form an irregular geometry of the concave zones and convex zones on the surface of the substrate. Then, a semiconductor light emitting structure is epitaxially formed on the surface of the substrate. Thereby, the present invention can achieve a light emitting diode structure having improved internal and external quantum efficiencies.

公开(公告)号：US20090159870A1

公开(公告)日：2009-06-25

申请号：US11961478

申请日：2007-12-20

申请人： Hung-Cheng Lin ,  Chia-Ming Lee ,  Jen-Inn Chyi

发明人： Hung-Cheng Lin ,  Chia-Ming Lee ,  Jen-Inn Chyi

IPC分类号： H01L33/00

CPC分类号： H01L33/10 ,  H01L33/20

摘要： The present invention discloses a light emitting diode (LED) element and a method for fabricating the same, which can promote light extraction efficiency of LED, wherein a substrate is etched to obtain basins with inclined natural crystal planes, and an LED epitaxial structure is selectively formed inside the basin. Thereby, an LED element having several inclines is obtained. Via the inclines, the probability of total internal reflection is reduced, and the light extraction efficiency of LED is promoted.

摘要翻译： 本发明公开了一种发光二极管（LED）元件及其制造方法，其可以提高LED的光提取效率，其中蚀刻基板以获得具有倾斜的自然晶体面的池，并且LED外延结构选择性地 形成在盆地内。 由此，得到具有多个倾斜的LED元件。 通过倾斜，全内反射的概率降低，LED的光提取效率得到提升。