公开(公告)号：US20180002161A1

公开(公告)日：2018-01-04

申请号：US15636887

申请日：2017-06-29

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Colin Robert JENKINS ,  Scott Lyall CARGILL ,  Clive Robert GRAHAM

IPC: B81B3/00 ,  B81C1/00 ,  B81C3/00 ,  H04R31/00 ,  H04R19/04

CPC classification number: B81B3/0021 ,  B81B3/0078 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/04 ,  B81C1/00158 ,  B81C3/001 ,  H04R7/04 ,  H04R19/005 ,  H04R19/04 ,  H04R31/003 ,  H04R31/006 ,  H04R2201/003 ,  H04R2499/15

Abstract: The present application describes MEMS transducer having a membrane and a membrane electrode. The membrane and membrane electrode form a two-layer structure. The membrane electrode is in the form of a lattice of conductive material. The pitch of the lattice and/or the size of the openings varies from a central region of the membrane electrode to a region laterally outside the central region.

公开(公告)号：US20180002160A1

公开(公告)日：2018-01-04

申请号：US15636825

申请日：2017-06-29

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Marek Sebastian PIECHOCINSKI ,  Colin Robert JENKINS ,  Clive Robert GRAHAM

IPC: B81B3/00 ,  B81C1/00 ,  H01L41/09 ,  B81C3/00 ,  H04R31/00 ,  H04R19/04

CPC classification number: B81B3/0021 ,  B81B3/0072 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2203/04 ,  B81C1/00158 ,  B81C3/001 ,  H01L41/0973 ,  H04R1/04 ,  H04R1/06 ,  H04R19/005 ,  H04R19/04 ,  H04R31/003 ,  H04R31/006 ,  H04R2201/003 ,  H04R2499/15

Abstract: The application describes MEMS transducer structures comprising a membrane structure having a flexible membrane layer and at least one electrode layer. The electrode layer is spaced from the flexible membrane layer such that at least one air volume extends between the material of the electrode layer and the membrane layer. The electrode layer is supported relative to the flexible membrane by means of a support structure which extends between the first electrode layer and the flexible membrane layer.