公开(公告)号：US20200055726A1

公开(公告)日：2020-02-20

申请号：US16603740

申请日：2018-04-12

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： James Thomas DEAS ,  Colin Wei Hong CHUNG ,  Marek Sebastian PIECHOCINSKI

IPC: B81B3/00 ,  B81C1/00 ,  H04R1/04 ,  H04R19/04 ,  H04R19/00

Abstract: Micro-electro-mechanical system (MEMS) devices are disclosed, including a MEMS device comprising a semiconductor die including integrated circuitry, a structure mounted on the semiconductor die and covering at least a portion of the circuitry, the structure defining a space between the structure and the at least a portion of the circuitry, and a transducer including a membrane, the transducer located outside of the space.

公开(公告)号：US20170217761A1

公开(公告)日：2017-08-03

申请号：US15414178

申请日：2017-01-24

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Colin Wei Hong CHUNG ,  Scott Lyall CARGILL ,  Colin Robert JENKINS

IPC: B81B7/00 ,  H04R19/04 ,  G01L9/00 ,  B81C1/00

CPC classification number: B81B7/0061 ,  B81B3/007 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/0127 ,  B81B2203/058 ,  B81B2207/012 ,  B81C1/00158 ,  G01L9/0042 ,  G01L9/0073 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/15151 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  H04R2201/003 ,  H04R2499/11 ,  H01L2924/00014

Abstract: The application describes MEMS transducers having a vent structure provided in a flexible membrane of the vent structure The vent structure comprises at least one moveable portion and the vent structure is configured such that, in response to a differential pressure across the vent structure, the moveable portion is rotatable about first and second axes of rotation, which axes of rotation extend in the plane of the membrane.