MEMS devices
    1.
    发明授权

    公开(公告)号:US10433054B1

    公开(公告)日:2019-10-01

    申请号:US15939994

    申请日:2018-03-29

    Abstract: The present disclosure relates to a protection system for protecting a MEMS transducer of a MEMS device from electrostatic capture, wherein the MEMS transducer is operable in a normal-sensitivity, mode and in a reduced-sensitivity mode. The protection system comprises: an overload detector for detecting an overload condition arising as a result of an excessive sound pressure level at the MEMS transducer; a signal estimator configured to generate an estimate of a sound pressure level at the MEMS transducer; and a controller configured, in response to detection by the overload detector of an overload condition, to: disable an output of the MEMS transducer; and after a delay of a first predetermined period of time: cause the MEMS transducer to operate in the reduced-sensitivity mode; enable the output of the MEMS transducer; and cause the MEMS transducer to return to the normal-sensitivity mode if the estimate of the sound pressure level generated by the signal estimator while the MEMS transducer is operating in the reduced-sensitivity mode is below a safe sound pressure level threshold for a second predetermined period of time.

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