MEMS ACTUATORS WITH STRESS RELEASING DESIGN
    2.
    发明申请
    MEMS ACTUATORS WITH STRESS RELEASING DESIGN 有权
    具有应力释放设计的MEMS执行器

    公开(公告)号:US20110012705A1

    公开(公告)日:2011-01-20

    申请号:US12839708

    申请日:2010-07-20

    IPC分类号: H01H37/46 H01H37/04

    摘要: The micro-electromechanical (MEMS) actuator comprises a hot arm member and a cold arm member. The cold arm member comprises at least two longitudinally spaced-apart flexors. The actuators may also be constructed with at least one among the hot arm member and the cold arm member comprising at least one spring section. The stress in this improved MEMS actuator is more uniformly distributed, thereby reducing the mechanical creep and improving its reliability as well as its operation life.

    摘要翻译: 微机电(MEMS)致动器包括热臂构件和冷臂构件。 冷臂构件包括至少两个纵向间隔开的屈曲部。 致动器还可以构造为包括至少一个弹簧部分的热臂部件和冷臂部件中的至少一个。 这种改进的MEMS致动器中的应力更均匀分布,从而减少机械蠕变,提高其可靠性及其使用寿命。