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公开(公告)号：US07087523B2
公开(公告)日：2006-08-08
申请号：US10621046
申请日：2003-07-16
IPC分类号： H01L21/44
CPC分类号： H05K3/125 , B33Y10/00 , H01L21/4867 , H01L21/76838 , H05K3/105 , Y10S438/962
摘要： For forming a fine structure of a desired material, nanoparticles of the same material are prepared in a suspension. A layer of the suspension is applied by a drop-on-demand printing system to a substrate. At least part of the layer is exposed to laser light for melting the nanoparticles at least partially. Upon solidification, the molten particles are sintered together to form the desired structure. Due to the low melting point of nanoparticles as compared to the melting point of bulk material, this procedure avoids damage to the substrate and provides a better control over the structure generation process. It can be used for generating metallic and non-metallic structures on various substrates. The laser light may have non-Gaussian intensity distribution or can combine multiple beams of Gaussian and non-Gaussian distribution for improving the quality of the generated structure, or it may be pulsed for improved control of the heat flow into the substrate.
摘要翻译： 为了形成所需材料的精细结构，在悬浮液中制备相同材料的纳米颗粒。 通过按需打印系统将一层悬浮液施加到基底上。 该层的至少一部分暴露于激光以至少部分地熔化纳米颗粒。 凝固后，将熔融的颗粒烧结在一起形成所需的结构。 由于与散装材料的熔点相比，纳米颗粒的熔点低，因此避免了对基材的损伤，并提供了对结构生成过程的更好控制。 它可用于在各种基底上产生金属和非金属结构。 激光可以具有非高斯强度分布，或者可以组合高斯和非高斯分布的多个波束以改善所产生的结构的质量，或者可以脉冲地改善对流入基底的热流的控制。
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公开(公告)号：US20100035375A1
公开(公告)日：2010-02-11
申请号：US11478294
申请日：2006-06-29
CPC分类号： H01L21/44 , H01L21/288 , H01L21/4867 , H01L21/76838 , H05K1/0393 , H05K1/162 , H05K3/0026 , H05K3/027 , H05K3/1241 , H05K3/4685 , H05K2201/09763 , H05K2203/107 , H05K2203/1131 , Y10S438/94
摘要： The present invention relates to systems, materials and methods for the formation of conducting, semiconducting, and dielectric layers, structures and devices from suspensions of nanoparticles. Drop-on-demand systems are used in some embodiments to fabricate various electronic structures including conductors, capacitors, FETs. Selective laser ablation is used in some embodiments to pattern more precisely the circuit elements and to form small channel devices.
摘要翻译： 本发明涉及从纳米颗粒的悬浮液形成导电，半导电和电介质层，结构和器件的系统，材料和方法。 在一些实施例中使用点播系统来制造包括导体，电容器，FET的各种电子结构。 在一些实施例中使用选择性激光烧蚀来更精确地模拟电路元件并形成小通道器件。
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公开(公告)号：US07682970B2
公开(公告)日：2010-03-23
申请号：US11478294
申请日：2006-06-29
IPC分类号： H01L21/44
CPC分类号： H01L21/44 , H01L21/288 , H01L21/4867 , H01L21/76838 , H05K1/0393 , H05K1/162 , H05K3/0026 , H05K3/027 , H05K3/1241 , H05K3/4685 , H05K2201/09763 , H05K2203/107 , H05K2203/1131 , Y10S438/94
摘要： The present invention relates to systems, materials and methods for the formation of conducting, semiconducting, and dielectric layers, structures and devices from suspensions of nanoparticles. Drop-on-demand systems are used in some embodiments to fabricate various electronic structures including conductors, capacitors, FETs. Selective laser ablation is used in some embodiments to pattern more precisely the circuit elements and to form small channel devices.
摘要翻译： 本发明涉及从纳米颗粒的悬浮液形成导电，半导电和电介质层，结构和器件的系统，材料和方法。 在一些实施例中使用点播系统来制造包括导体，电容器，FET的各种电子结构。 在一些实施例中使用选择性激光烧蚀来更精确地模拟电路元件并形成小通道器件。
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