公开(公告)号：US10088414B2

公开(公告)日：2018-10-02

申请号：US14706935

申请日：2015-05-07

Applicant: Cornell University

Inventor： Michal Lipson ,  Alexander Gaeta ,  Austin G. Griffith ,  Jaime Cardenas ,  Ryan K. W. Lau ,  Yoshitomo Okawachi ,  Romy Fain

IPC: G01J5/00 ,  G01N21/3504 ,  H01L31/0232 ,  H01L31/105

Abstract: Techniques, systems, and devices are disclosed to provide on-chip integrated gas sensor based on photonic sensing. For example, a sensing device is provided to include an optical comb generator that produces an optical comb of different optical comb frequencies in a mid-infrared (MIR) spectral range to interact with a sample under detection, the optical comb generator including a substrate, an optical resonator formed on the substrate and an optical waveguide formed on the substrate and coupled to the optical resonator, and an optical detector that detects light from the sample at the different optical comb frequencies.

公开(公告)号：US20150323450A1

公开(公告)日：2015-11-12

申请号：US14706935

申请日：2015-05-07

Applicant: Cornell University

Inventor： Michal Lipson ,  Alexander Gaeta ,  Austin G. Griffith ,  Jaime Cardenas ,  Ryan K.W. Lau ,  Yoshitomo Okawachi ,  Romy Fain

IPC: G01N21/3504 ,  H01L31/105 ,  H01L31/0232

CPC classification number: G01N21/3504 ,  G01N2201/0612 ,  G01N2201/0635 ,  H01L31/0232 ,  H01L31/02327 ,  H01L31/105

Abstract: Techniques, systems, and devices are disclosed to provide on-chip integrated gas sensor based on photonic sensing. For example, a sensing device is provided to include an optical comb generator that produces an optical comb of different optical comb frequencies in a mid-infrared (MIR) spectral range to interact with a sample under detection, the optical comb generator including a substrate, an optical resonator formed on the substrate and an optical waveguide formed on the substrate and coupled to the optical resonator, and an optical detector that detects light from the sample at the different optical comb frequencies.

Abstract translation: 公开了技术，系统和装置，以提供基于光子感测的片上集成气体传感器。 例如，提供感测装置以包括光梳发生器，其在中红外（MIR）光谱范围内产生与待检样本相互作用的不同光梳频率的光梳，所述光梳发生器包括衬底， 形成在基板上的光谐振器和形成在基板上并耦合到光谐振器的光波导，以及光检测器，其以不同的光梳频率检测来自样品的光。