公开(公告)号：US20230201877A1

公开(公告)日：2023-06-29

申请号：US18170121

申请日：2023-02-16

Applicant: DENSO CORPORATION

Inventor： Tetsuya ENOMOTO ,  Akihiko TESHIGAHARA ,  Hideo YAMADA ,  Yusuke KAWAI

IPC: B06B1/06 ,  G01S15/04 ,  C23C14/34 ,  C23C14/06 ,  C23C14/02 ,  C01B21/06 ,  H10N30/853 ,  H10N30/076

CPC classification number: B06B1/0666 ,  G01S15/04 ,  C23C14/34 ,  C23C14/0641 ,  C23C14/02 ,  C01B21/0602 ,  H10N30/853 ,  H10N30/076 ,  C01P2006/80 ,  C01P2006/40

Abstract: A micro-electro-mechanical systems (MEMS) sensor includes a substrate, a diaphragm portion and a piezoelectric film. The diaphragm portion is located at the substrate. The piezoelectric film is located on the diaphragm portion. The piezoelectric film is made of scandium aluminum nitride. A carbon concentration of the piezoelectric film is 2.5 atomic percent or less while an oxygen concentration of the piezoelectric film is 0.35 atomic percent or less.

公开(公告)号：US20210041475A1

公开(公告)日：2021-02-11

申请号：US17082199

申请日：2020-10-28

Applicant: DENSO CORPORATION

Inventor： Shota HARADA ,  Keitaro ITO ,  Tomoya JOMORI ,  Hideo YAMADA ,  Yuuki INAGAKI ,  Teruhisa AKASHI ,  Yoshiyuki HATA

IPC: G01P3/44 ,  G01P3/14 ,  B06B1/04 ,  B81B7/04 ,  B81B3/00

Abstract: An electrostatic actuator includes a fixed electrode and a movable electrode arranged to face the fixed electrode. The movable electrode is configured to be displaceable with respect to the fixed electrode and a fixed portion. An attractive force acts between the movable electrode and the fixed portion. In the electrostatic actuator, a non-linear vibration of the movable electrode when a voltage is applied to the fixed electrode and the movable electrode is reduced by the attractive force acting between the movable electrode and the fixed portion.

公开(公告)号：US20220408196A1

公开(公告)日：2022-12-22

申请号：US17843220

申请日：2022-06-17

Applicant: DENSO CORPORATION ,  TOYOTA JIDOSHA KABUSHIKI KAISHA ,  MIRISE Technologies Corporation ,  Nisshinbo Micro Devices Inc.

Inventor： Yuki OHARA ,  Tomoya JOKE ,  Tetsuya ENOMOTO ,  Hideo YAMADA ,  Shuji KATAKAMI ,  Takahide USUI ,  Hiroyuki KUCHIJI ,  Naoki MASUMOTO

IPC: H04R17/02 ,  B81B3/00 ,  B81C1/00 ,  H04R7/06 ,  H04R7/18

Abstract: A microelectromechanical systems device includes a vibrator and a reinforcing film. The vibrator includes a piezoelectric element configured to convert pressure to an electrical signal. The reinforcing film is configured to reinforce strength of the vibrator. The vibrator further has a groove at which a portion of the reinforcing film is disposed.

公开(公告)号：US20220279285A1

公开(公告)日：2022-09-01

申请号：US17632462

申请日：2020-07-28

Applicant: Nisshinbo Micro Devices Inc. ,  DENSO CORPORATION

Inventor： Hiroyuki KUCHIJI ,  Naoki MASUMOTO ,  Hideo YAMADA ,  Akihiko TESHIGAHARA ,  Atsushi MIZUTANI

IPC: H04R17/02

Abstract: A piezo-electric element includes a piezo-electric element part, a support part, and a stretchable film. The piezo-electric element part includes a piezo-electric film and electrodes between which the piezo-electric film is sandwiched in a thickness direction. The support part supports a peripheral portion of the piezo-electric element part. The stretchable film is provided in an oscillation region located inside of the peripheral portion of the piezo-electric element part. The stretchable film also has a higher elasticity than that of the piezo-electric element part.