公开(公告)号：US11649540B2

公开(公告)日：2023-05-16

申请号：US17305731

申请日：2021-07-14

Applicant: Dai Nippon Printing Co., Ltd.

Inventor： Yasuhiro Uchida ,  Sachiyo Matsuura ,  Chikao Ikenaga

IPC: C23C14/04 ,  C23F1/02 ,  H01L51/00 ,  H01L51/56 ,  B05C21/00

CPC classification number: C23C14/042 ,  C23F1/02 ,  H01L51/0011 ,  H01L51/56 ,  B05C21/005

Abstract: A deposition mask includes: a first surface and a second surface, in which a plurality of through-holes are formed; a pair of long side surfaces connected to the first and second surfaces, and defining a profile of the deposition mask in a longitudinal direction of the deposition mask; and a pair of short side surfaces connected to the first and second surfaces, and defining a profile of the deposition mask in a width direction of the deposition mask. The long side surface includes a first portion that is recessed inside and includes a first end portion positioned along the first surface, and a second end portion positioned along the second surface and positioned inside the first end portion. The through-hole includes a first recess formed on the first surface, and a second recess formed on the second surface and connected to the first recess through a hole connection portion.

公开(公告)号：US11859274B2

公开(公告)日：2024-01-02

申请号：US18175596

申请日：2023-02-28

Applicant: Dai Nippon Printing Co., Ltd.

Inventor： Yasuhiro Uchida ,  Sachiyo Matsuura ,  Chikao Ikenaga

IPC: C23C14/04 ,  H10K71/16 ,  C23F1/02 ,  H10K71/00 ,  B05C21/00

CPC classification number: C23C14/042 ,  C23F1/02 ,  H10K71/00 ,  H10K71/166 ,  B05C21/005

Abstract: A deposition mask includes: a first surface and a second surface, in which a plurality of through-holes are formed; a pair of long side surfaces connected to the first and second surfaces, and defining a profile of the deposition mask in a longitudinal direction of the deposition mask; and a pair of short side surfaces connected to the first and second surfaces, and defining a profile of the deposition mask in a width direction of the deposition mask. The long side surface includes a first portion that is recessed inside and includes a first end portion positioned along the first surface, and a second end portion positioned along the second surface and positioned inside the first end portion. The through-hole includes a first recess formed on the first surface, and a second recess formed on the second surface and connected to the first recess through a hole connection portion.

公开(公告)号：US11773477B2

公开(公告)日：2023-10-03

申请号：US16726996

申请日：2019-12-26

Applicant: Dai Nippon Printing Co., Ltd.

Inventor： Yasuhiro Uchida ,  Koji Kobayashi ,  Hiromitsu Ochiai

IPC: C23C14/04 ,  H10K71/00 ,  H10K71/16 ,  H10K50/11

CPC classification number: C23C14/042 ,  H10K71/00 ,  H10K71/166 ,  H10K50/11 ,  H10K71/164

Abstract: A deposition mask includes: a mask body having two or more first through-holes; and a support disposed on the mask body and having a second through-hole located at a position overlapped with the first through-holes in a plan view. The mask body has a first surface located on an opposite side of a side of the support, and a second surface located on the side of the support. An outermost circumference first through-hole, which is located on an outermost circumference in a plan view of the two or more first through-holes located at the position overlapped with the second through-hole in a plan view, includes a first point which is a center of the outermost circumference first through-hole in a plan view; the second through-hole includes a second point on an outline of the second through-hole, the second point being nearest to the first point.

公开(公告)号：US11136664B2

公开(公告)日：2021-10-05

申请号：US16512697

申请日：2019-07-16

Applicant: Dai Nippon Printing Co., Ltd.

Inventor： Yasuhiro Uchida ,  Sachiyo Matsuura ,  Chikao Ikenaga

IPC: C23C14/04 ,  H01L51/56 ,  H01L51/00 ,  B05C21/00

Abstract: A deposition mask includes: a first surface and a second surface, in which a plurality of through-holes are formed; a pair of long side surfaces connected to the first and second surfaces, and defining a profile of the deposition mask in a longitudinal direction of the deposition mask; and a pair of short side surfaces connected to the first and second surfaces, and defining a profile of the deposition mask in a width direction of the deposition mask. The long side surface includes a first portion that is recessed inside and includes a first end portion positioned along the first surface, and a second end portion positioned along the second surface and positioned inside the first end portion. The through-hole includes a first recess formed on the first surface, and a second recess formed on the second surface and connected to the first recess through a hole connection portion.