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    Process for production of pattern-forming body
    4.
    发明授权
    Process for production of pattern-forming body 有权
    图案形成体的生产工艺

    公开(公告)号：US07435515B2

    公开(公告)日：2008-10-14

    申请号：US11004535

    申请日：2004-12-03

    申请人： Hironori Kobayashi ,  Masato Okabe ,  Manabu Yamamoto

    发明人： Hironori Kobayashi ,  Masato Okabe ,  Manabu Yamamoto

    IPC分类号： G02B5/20 ,  G02B3/00

    CPC分类号： G02B3/0012 ,  G02B5/201 ,  G03F7/0007 ,  G03F7/0042 ,  G03F7/0043 ,  G03F7/09 ,  G03F7/11

    摘要： A primary object of the present invention is to provide a process for the production of a pattern-forming body, the process enabling the formation of a highly precise pattern, requiring no post-exposure treatment and being free from a fear as to the deterioration of the pattern-forming body itself because no photocatalyst is contained in the produced pattern-forming body. In the present invention, the above problem can be solved by providing a process for the production of a pattern-forming body, the process comprising disposing a catalyst-containing layer-side substrate containing at least a photocatalyst-containing layer and a pattern-forming body substrate containing a characteristic-changeable layer which is changed in characteristics by the action of the photocatalyst in at least said photocatalyst-containing layer such that the photocatalyst-containing layer is in contact with the characteristic-changeable layer, followed by performing exposure to thereby change the characteristics of the exposed portion of the characteristic-changeable layer and thereafter dismounting the photocatalyst-containing layer-side substrate, thereby obtaining a pattern-forming body having a pattern which has been changed in characteristics on the characteristic-changeable layer.

    摘要翻译： 本发明的主要目的是提供一种用于生产图案形成体的方法，该方法能够形成高精度图案，不需要曝光后处理，并且不会对于劣化 图案形成体本身，因为在所产生的图案形成体中不含有光催化剂。 在本发明中，上述问题可以通过提供一种用于制造图案形成体的方法来解决，该方法包括设置含有至少含有光催化剂层的含催化剂层侧基材和图案形成 其特征在于，所述特征变化层通过所述光催化剂层的至少所述光催化剂层的作用而变化，使得所述光催化剂层与所述特征变化层接触，然后进行曝光 改变特征变化层的露出部分的特性，然后拆卸含光催化剂的层侧基板，从而获得具有在特征可变层上的特性变化的图案的图案形成体。

    Process for production of pattern-forming body
    9.
    发明授权
    Process for production of pattern-forming body 有权
    图案形成体的生产工艺

    公开(公告)号：US06846616B2

    公开(公告)日：2005-01-25

    申请号：US09953597

    申请日：2001-09-12

    申请人： Hironori Kobayashi ,  Masato Okabe ,  Manabu Yamamoto

    发明人： Hironori Kobayashi ,  Masato Okabe ,  Manabu Yamamoto

    IPC分类号： G02B5/20 ,  G03F7/00 ,  G03F7/004 ,  G03F7/09

    CPC分类号： G03F7/0007 ,  G03F7/0042 ,  G03F7/0043 ,  G03F7/09

    摘要： A process for the production of a pattern-forming body, the process including the steps of disposing a catalyst-containing layer-side substrate containing at least a photo catalyst-containing layer and a pattern-forming body substrate containing a characteristic-changeable layer which is changed in characteristics by the action of the photocatalyst in at least said photocatalyst-containing layer such that the photocatalyst-containing layer is in contact with the characteristic-changeable layer followed by performing exposure to thereby change the characteristics of the exposed portion of the characteristic-changeable layer and thereafter dismounting the photocatalyst-containing layer-side substrate, thereby obtaining a pattern-forming body having a pattern which has been changed in characteristics on the characteristic-changeable layer.

    摘要翻译： 一种图案形成体的制造方法，该方法包括以下步骤：将含有至少含有光催化剂的层的含催化剂层侧基材和含有特征可变层的图案形成体基材 通过光催化剂的作用在至少所述含光催化剂层中的特性改变，使得含光催化剂的层与特征可变层接触，然后进行曝光，从而改变特征的暴露部分的特性 然后拆下含有光催化剂的层侧基板，从而获得具有在特征可变层上的特性变化的图案的图案形成体。