Method to sputter deposit metal on a ferroelectric polymer
    5.
    发明申请
    Method to sputter deposit metal on a ferroelectric polymer 审中-公开
    在铁电聚合物上溅射沉积金属的方法

    公开(公告)号:US20060076593A1

    公开(公告)日:2006-04-13

    申请号:US11255282

    申请日:2005-10-20

    IPC分类号: H01L29/94

    摘要: Methods of depositing various metal layers adjacent to a ferroelectric polymer layer are disclosed. In one embodiment, a collimator may be used during a sputtering process to filter out charged particles from the material that may be deposited as a metal layer. In various embodiments, a metal layer may contain at least one of an intermetallic layer, an amorphous intermetallic layer, and an amorphized intermetallic layer.

    摘要翻译: 公开了沉积与铁电聚合物层相邻的各种金属层的方法。 在一个实施例中,可以在溅射过程期间使用准直器来从可以作为金属层沉积的材料中滤出带电粒子。 在各种实施例中,金属层可以包含金属间化合物层,非晶态金属间化合物层和非晶化金属间化合物层中的至少一个。

    Ferroelectric polymer memory with a thick interface layer
    7.
    发明申请
    Ferroelectric polymer memory with a thick interface layer 有权
    铁电聚合物存储器,具有较厚的界面层

    公开(公告)号:US20050104106A1

    公开(公告)日:2005-05-19

    申请号:US11015841

    申请日:2004-12-17

    CPC分类号: G11C13/00 B82Y10/00

    摘要: According to one aspect of the invention, a memory array and a method of constructing a memory array are provided. An insulating layer is formed on a semiconductor substrate. A first metal stack is then formed on the insulating layer. The first metal stack is etched to form first metal lines. A polymeric layer is formed over the first metal lines and the insulating layer. The polymeric layer has a surface with a plurality of roughness formations. A second metal stack is formed on the polymeric layer with an interface layer, which is thicker than the heights of the roughness formations. Then the second metal stack is etched to form second metal lines. Memory cells are formed wherever a second metal line extends over a first metal line.

    摘要翻译: 根据本发明的一个方面,提供了存储器阵列和构造存储器阵列的方法。 绝缘层形成在半导体衬底上。 然后在绝缘层上形成第一金属叠层。 第一金属叠层被蚀刻以形成第一金属线。 在第一金属线和绝缘层之上形成聚合物层。 聚合物层具有多个粗糙结构的表面。 在聚合物层上形成第二金属叠层,其界面层比粗糙结构层的高度厚。 然后蚀刻第二金属叠层以形成第二金属线。 存储单元形成在第二金属线在第一金属线上延伸的地方。