摘要:
A sputtering target includes a copper indium gallium sputtering target material on a backing structure. The sputtering target material has a density of at least 100% or more as defined by the rule of mixtures applied to densities of component elements of the sputtering target material. The sputtering target material has an overall uniform composition.
摘要:
A method of making a sputtering target includes providing a backing structure, and forming a copper indium gallium sputtering target material on the backing structure by cold spraying. The step of cold spraying includes spraying a powder comprising copper, indium and gallium in a process gas stream, and at least one of an average particle size of the powder is at least 35 μm, a velocity of the process gas stream is at least 150 m/s, or a process gas pressure is 20 bar or less.
摘要翻译:制造溅射靶的方法包括提供背衬结构,并通过冷喷涂在衬底结构上形成铜铟镓溅射靶材。 冷喷涂步骤包括在工艺气流中喷涂包含铜,铟和镓的粉末,并且粉末的平均粒径中的至少一个至少为35μm,工艺气体流的速度为至少150 m / s,或者处理气体压力为20巴或更小。
摘要:
A solar cell includes a substrate, a first electrode located over the substrate, a sodium doped p-type copper indium selenide (CIS) based alloy semiconductor absorber layer located over the first electrode, a zinc and sodium doped n-type copper indium selenide (CIS) based alloy semiconductor layer located on the p-type semiconductor absorber layer, and a second electrode located over the n-type semiconductor layer.
摘要:
A sputtering target has a cylindrical backing tube having two edges and a sidewall comprising a middle portion located between two end portions. The sputtering material is on the backing tube. The sputtering material does not cover at least one end portion of the backing tube. The sputtering target also has a feature which prevents or reduces at least one of chalcogen buildup and arcing at the at least one end portion of the backing tube not covered by the sputtering material.
摘要:
A sputtering target has a cylindrical backing tube having two edges and a sidewall comprising a middle portion located between two end portions. The sputtering material is on the backing tube. The sputtering material does not cover at least one end portion of the backing tube. The sputtering target also has a feature which prevents or reduces at least one of chalcogen buildup and arcing at the at least one end portion of the backing tube not covered by the sputtering material.
摘要:
A powder spray nozzle includes an inlet portion having an inlet diameter and an inlet length and an outlet portion having outlet diameter and an outlet length. The nozzle also includes an interface region between the inlet portion and the outlet portion having an interface diameter. A ratio of the inlet diameter to the inlet length is in a range of about 0.15 to 0.5.