Method of making a CIG target by cold spraying
    2.
    发明授权
    Method of making a CIG target by cold spraying 有权
    通过冷喷涂制造CIG靶材的方法

    公开(公告)号:US08709335B1

    公开(公告)日:2014-04-29

    申请号:US12907169

    申请日:2010-10-19

    IPC分类号: B22F3/02

    摘要: A method of making a sputtering target includes providing a backing structure, and forming a copper indium gallium sputtering target material on the backing structure by cold spraying. The step of cold spraying includes spraying a powder comprising copper, indium and gallium in a process gas stream, and at least one of an average particle size of the powder is at least 35 μm, a velocity of the process gas stream is at least 150 m/s, or a process gas pressure is 20 bar or less.

    摘要翻译: 制造溅射靶的方法包括提供背衬结构,并通过冷喷涂在衬底结构上形成铜铟镓溅射靶材。 冷喷涂步骤包括在工艺气流中喷涂包含铜,铟和镓的粉末,并且粉末的平均粒径中的至少一个至少为35μm,工艺气体流的速度为至少150 m / s,或者处理气体压力为20巴或更小。

    Cold spray system nozzle
    6.
    发明授权
    Cold spray system nozzle 有权
    冷喷系统喷嘴

    公开(公告)号:US08906450B1

    公开(公告)日:2014-12-09

    申请号:US13247187

    申请日:2011-09-28

    IPC分类号: B05D1/12 C23C24/04

    CPC分类号: C23C24/04

    摘要: A powder spray nozzle includes an inlet portion having an inlet diameter and an inlet length and an outlet portion having outlet diameter and an outlet length. The nozzle also includes an interface region between the inlet portion and the outlet portion having an interface diameter. A ratio of the inlet diameter to the inlet length is in a range of about 0.15 to 0.5.

    摘要翻译: 粉末喷嘴包括具有入口直径和入口长度的入口部分和具有出口直径和出口长度的出口部分。 喷嘴还包括具有界面直径的入口部分和出口部分之间的界面区域。 入口直径与入口长度的比率在约0.15至0.5的范围内。