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公开(公告)号：US09005409B2
公开(公告)日：2015-04-14
申请号：US13445457
申请日：2012-04-12
CPC分类号： C25D21/22 , C25D7/123 , C25D17/001 , C25D17/002
摘要： An electrochemical deposition apparatus adapted to deposit metal onto a surface of a substrate, the apparatus has a frame configured for holding a process electrolyte. A substrate holder is removably coupled to the frame, the substrate holder supporting the substrate in the process electrolyte. An anode fluid compartment is removably coupled to the frame and containing an anolyte and having an anode facing the surface of the substrate, the anode fluid compartment further having a ion exchange membrane disposed between the anode and the surface of the substrate, the anode fluid compartment removable from the frame as a unit with the ion exchange membrane and the anode. The holder, the anode and the membrane are arranged in the frame so that ions from the anode pass through the ion exchange membrane into and primarily replenish ions in the process electrolyte depleted by ion deposition onto the surface of the substrate.
摘要翻译： 一种适于将金属沉积在基底表面上的电化学沉积装置，该装置具有构造成保持工艺电解质的框架。 衬底保持器可移除地联接到框架，衬底保持器将衬底支撑在处理电解质中。 阳极流体隔室可拆卸地联接到框架并且包含阳极电解液并且具有面向基底表面的阳极，阳极流体隔室还具有设置在阳极和基底表面之间的离子交换膜，阳极流体隔室 作为与离子交换膜和阳极的单元从框架中移除。 保持器，阳极和膜被布置在框架中，使得来自阳极的离子通过离子交换膜进入并且主要补充通过离子沉积耗尽的工艺电解质中的离子到衬底的表面上。
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公开(公告)号：US20120298502A1
公开(公告)日：2012-11-29
申请号：US13445217
申请日：2012-04-12
IPC分类号： C25B15/08
CPC分类号： C25D21/22 , C25D17/001 , C25D17/002 , C25D17/06 , C25D21/10
摘要： A process electrolyte replenishment module adapted to replenish ions in a process electrolyte in a substrate electrochemical deposition apparatus having a first anode and a first cathode, the replenishment module having a second anode. A process electrolyte recirculation compartment is disposed in the frame configured so that the process electrolyte is recirculating between the replenishment module and the deposition apparatus. An anode compartment is coupled to the process electrolyte recirculation compartment having the second anode, that is a soluble anode, for immersion in a secondary anolyte, and having a first ion exchange membrane being a cationic member separating the secondary anolyte from the process electrolyte. A cathode compartment is provided in the frame coupled to the process electrolyte recirculation compartment having a second cathode for immersion in a secondary catholyte, and having a second ion exchange membrane being a monovalent selective membrane separating the secondary catholyte from the process electrolyte.
摘要翻译： 一种适用于在具有第一阳极和第一阴极的基板电化学沉积设备中补充处理电解质中的离子的过程电解质补充模块，所述补充模块具有第二阳极。 处理电解质再循环隔室设置在框架中，其被构造成使得处理电解质在补充模块和沉积设备之间循环。 阳极室耦合到具有第二阳极（即可溶性阳极）的工艺电解质再循环室，用于浸渍在次级阳极液中，并且具有第一离子交换膜是将次级阳极液与工艺电解质分离的阳离子构件。 阴极室设置在耦合到处理电解质再循环隔间的框架中，该隔室具有用于浸入次级阴极电解液中的第二阴极，并且具有第二离子交换膜是将次级阴极电解液与工艺电解质分开的一价选择膜。
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公开(公告)号：US09017528B2
公开(公告)日：2015-04-28
申请号：US13445217
申请日：2012-04-12
CPC分类号： C25D21/22 , C25D17/001 , C25D17/002 , C25D17/06 , C25D21/10
摘要： A process electrolyte replenishment module adapted to replenish ions in a process electrolyte in a substrate electrochemical deposition apparatus having a first anode and a first cathode, the replenishment module having a second anode. A process electrolyte recirculation compartment is disposed in the frame configured so that the process electrolyte is recirculating between the replenishment module and the deposition apparatus. An anode compartment is coupled to the process electrolyte recirculation compartment having the second anode, that is a soluble anode, for immersion in a secondary anolyte, and having a first ion exchange membrane being a cationic member separating the secondary anolyte from the process electrolyte. A cathode compartment is provided in the frame coupled to the process electrolyte recirculation compartment having a second cathode for immersion in a secondary catholyte, and having a second ion exchange membrane being a monovalent selective membrane separating the secondary catholyte from the process electrolyte.
摘要翻译： 一种适用于在具有第一阳极和第一阴极的基板电化学沉积设备中补充处理电解质中的离子的过程电解质补充模块，所述补充模块具有第二阳极。 处理电解质再循环隔室设置在框架中，其被构造成使得处理电解质在补充模块和沉积设备之间循环。 阳极室耦合到具有第二阳极（即可溶性阳极）的工艺电解质再循环室，用于浸渍在次级阳极液中，并且具有第一离子交换膜是将次级阳极液与工艺电解质分离的阳离子构件。 阴极室设置在耦合到处理电解质再循环隔间的框架中，该隔室具有用于浸入次级阴极电解液中的第二阴极，并且具有第二离子交换膜是将次级阴极电解液与工艺电解质分开的一价选择膜。
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公开(公告)号：US20120298504A1
公开(公告)日：2012-11-29
申请号：US13445457
申请日：2012-04-12
IPC分类号： C25B9/08
CPC分类号： C25D21/22 , C25D7/123 , C25D17/001 , C25D17/002
摘要： An electrochemical deposition apparatus adapted to deposit metal onto a surface of a substrate, the apparatus has a frame configured for holding a process electrolyte. A substrate holder is removably coupled to the frame, the substrate holder supporting the substrate in the process electrolyte. An anode fluid compartment is removably coupled to the frame and containing an anolyte and having an anode facing the surface of the substrate, the anode fluid compartment further having a ion exchange membrane disposed between the anode and the surface of the substrate, the anode fluid compartment removable from the frame as a unit with the ion exchange membrane and the anode. The holder, the anode and the membrane are arranged in the frame so that ions from the anode pass through the ion exchange membrane into and primarily replenish ions in the process electrolyte depleted by ion deposition onto the surface of the substrate.
摘要翻译： 一种适于将金属沉积在基底表面上的电化学沉积装置，该装置具有构造成保持工艺电解质的框架。 衬底保持器可移除地联接到框架，衬底保持器将衬底支撑在处理电解质中。 阳极流体隔室可拆卸地联接到框架并且包含阳极电解液并且具有面向基底表面的阳极，阳极流体隔室还具有设置在阳极和基底表面之间的离子交换膜，阳极流体隔室 作为与离子交换膜和阳极的单元从框架中移除。 保持器，阳极和膜被布置在框架中，使得来自阳极的离子通过离子交换膜进入并且主要补充通过离子沉积耗尽的工艺电解质中的离子到衬底的表面上。
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