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21 条记录 (耗时 0.026 秒)

    Scroll compressor with multiple isolated inlet ports
    1.
    发明授权
    Scroll compressor with multiple isolated inlet ports 有权
    带多个隔离入口的涡旋压缩机

    公开(公告)号：US07537440B2

    公开(公告)日：2009-05-26

    申请号：US10567806

    申请日：2004-08-10

    申请人： David John Goodwin ,  Alan John Saunders ,  Philip Lawrence May ,  Graeme Huntley

    发明人： David John Goodwin ,  Alan John Saunders ,  Philip Lawrence May ,  Graeme Huntley

    IPC分类号： F03C2/00 ,  F04C2/00

    CPC分类号： F04C23/006 ,  F04C18/0215 ,  F04C18/0223 ,  F04C18/0269 ,  F04C2220/12 ,  F04C2250/101

    摘要： A scroll compressor having a scroll wall arrangement with a fixed scroll having fixed scroll walls and an orbiting scroll having orbiting scroll wall, an inlet at a radially outer portion and an outlet at a radially central portion, a first flow path defined by the orbiting and fixed scroll walls and extending from the inlet to the outlet, gas entering through inlet at a pressure and exhausting through outlet at a second pressure higher than the first pressure. Scroll wall arrangement having a second inlet through which gas enters at a third pressure and follows a second fluid path where it is exhausted through the outlet at the second pressure to form two flow paths having respective inlets. The third pressure at which gas enters through inlet is different from the first pressure, and lower than the second pressure.

    摘要翻译： 一种涡旋压缩机，其具有涡旋壁布置，其具有固定涡旋盘，其具有固定的涡旋壁和具有绕动涡旋壁的绕动涡旋盘，在径向外部的入口和在径向中心部分处的出口，由轨道和 固定的涡旋壁并且从入口延伸到出口，气体在压力下进入入口并以比第一压力高的第二压力通过出口排出。 涡旋壁布置具有第二入口，气体通过该第二入口以第三压力进入并且遵循第二流体路径，在第二入口处，第二入口在第二压力下通过出口排出，形成具有相应入口的两个流动路径。 气体通过入口进入的第三压力不同于第一压力，并且低于第二压力。

    Diffusion pump with two inlets and two stage pumping capability
    4.
    发明授权
    Diffusion pump with two inlets and two stage pumping capability 失效
    扩散泵具有两个入口和两级泵送能力

    公开(公告)号：US5913662A

    公开(公告)日：1999-06-22

    申请号：US799890

    申请日：1997-02-13

    申请人： Graeme Huntley

    发明人： Graeme Huntley

    IPC分类号： F04B37/00 ,  F04F9/00 ,  F04B9/12

    CPC分类号： F04F9/00

    摘要： A diffusion pump for evacuating a chamber is provided with a hollow outer body including an outlet for connection to a backing pump and a base for containing a working fluid. A vapor chimney extends from the base within the hollow outer body and includes at least two spaced apart jet stages. The working fluid is heated when present in said base. Two or more inlets are formed in the hollow outer body for communicating with said at least one chamber to be evacuated. The presence of the two inlets provides the possibility of differential pumping.

    摘要翻译： 用于抽空室的扩散泵设置有中空的外体，其包括用于连接到背衬泵的出口和用于容纳工作流体的基座。 蒸气烟囱在空心的外部体内从基部延伸并且包括至少两个间隔开的喷射级。 当存在于所述底座中时，工作流体被加热。 在中空外体中形成两个或更多个入口，用于与所述至少一个待抽真空室连通。 两个入口的存在提供了差分泵送的可能性。

    Pump apparatus for semiconductor processing
    5.
    发明申请
    Pump apparatus for semiconductor processing 审中-公开
    用于半导体加工的泵装置

    公开(公告)号：US20070081893A1

    公开(公告)日：2007-04-12

    申请号：US11244744

    申请日：2005-10-06

    申请人： Graeme Huntley

    发明人： Graeme Huntley

    IPC分类号： F04D29/04

    CPC分类号： F04D19/042 ,  F04D17/168 ,  F04D19/046 ,  F04D23/008

    摘要： The invention relates to a pump apparatus for use in semiconductor processing. The apparatus may include a single pump configured to transition a substance flow from about molecular pressure to about atmospheric pressure.

    摘要翻译： 本发明涉及一种用于半导体加工的泵装置。 该装置可以包括构造成将物质流从约分子压力转变为大气压力的单个泵。

    Vacuum pumping system and method of controlling the same
    7.
    发明授权
    Vacuum pumping system and method of controlling the same 有权
    真空泵系统及其控制方法

    公开(公告)号：US07101155B2

    公开(公告)日：2006-09-05

    申请号：US10438427

    申请日：2003-05-15

    申请人： Derek Graeme Madgewick Savidge ,  Neil Turner ,  Graeme Huntley

    发明人： Derek Graeme Madgewick Savidge ,  Neil Turner ,  Graeme Huntley

    IPC分类号： F04B49/22 ,  C23C14/00 ,  E03B5/00

    CPC分类号： F04C28/24 ,  F04B37/14 ,  F04C25/02 ,  F04C28/065 ,  F04C2220/10 ,  F04C2220/30 ,  F04C2270/02 ,  Y10T137/86083

    摘要： A vacuum pump system (10; 36; 46) for pumping gas from an enclosure (12) comprises: a vacuum pump unit (14) having a pump inlet (16) connectable with an outlet (18) of such an enclosure and a pump outlet (20) for exhausting gas; and a chamber (22; 50) selectively connectable with the pump inlet and the pump outlet, such that, in use, in a first state gas can be pumped from the chamber to the pump inlet by the vacuum pump unit and in a second state gas can be evacuated from the pump outlet to the chamber to reduce pressure at the pump outlet.A method of controlling the vacuum pump system (10; 36; 46) comprises a first step of pumping gas from the chamber to the pump inlet using the vacuum pump unit and a second step of allowing gas to be evacuated from the pump outlet to the chamber to reduce pressure at the pump outlet.

    摘要翻译： 一种用于从外壳（12）泵送气体的真空泵系统（10; 36; 46）包括：真空泵单元（14），其具有可与这种外壳的出口（18）连接的泵入口（16） 用于排气的出口（20）; 以及可选择性地与泵入口和泵出口连接的腔室（22; 50），使得在使用中，在第一状态下，可以通过真空泵单元将气体从腔室泵送到泵入口，并且处于第二状态 气体可以从泵出口抽空到室以减小泵出口处的压力。 控制真空泵系统（10; 36; 46）的方法包括使用真空泵单元将气体从腔室泵送到泵入口的第一步骤，以及允许气体从泵出口排出到第二步骤 以减少泵出口处的压力。

    Equipment skid
    8.
    发明授权
    Equipment skid 有权
    设备打滑

    公开(公告)号：US06397883B1

    公开(公告)日：2002-06-04

    申请号：US09464184

    申请日：1999-12-16

    申请人： Graeme Huntley ,  Kate Wilson

    发明人： Graeme Huntley ,  Kate Wilson

    IPC分类号： F16K2708

    CPC分类号： H01L21/67017 ,  Y10T137/6851 ,  Y10T137/6881 ,  Y10T137/7062 ,  Y10T137/86083

    摘要： An equipment skid for mounting ancillary equipment to support a semiconductor processing tool. The equipment skid comprises a plurality of equipment sections and a service section. The ancillary equipment is mounted within the equipment sections and the plurality of equipment and service sections are connected to one another in an in-line relationship to define a framework to allow external connections between the ancillary equipment and the semiconductor processing tool to pass through a region overlying the footprint of the service section. The equipment and service sections are preferably covered by an enclosure to contain leakage.

    摘要翻译： 用于安装辅助设备以支持半导体加工工具的设备滑道。 设备滑行包括多个设备部分和服务部分。 辅助设备安装在设备部分内，并且多个设备和维修部分以线内关系彼此连接，以限定框架，以允许辅助设备和半导体加工工具之间的外部连接通过一个区域 覆盖服务部分的足迹。 设备和维修部分优选地被外壳覆盖以容纳泄漏。

    Conveyance vehicles
    9.
    发明授权
    Conveyance vehicles 失效
    运输车辆

    公开(公告)号：US6095234A

    公开(公告)日：2000-08-01

    申请号：US807841

    申请日：1997-02-26

    申请人： Graeme Huntley

    发明人： Graeme Huntley

    IPC分类号： B62B3/10 ,  H01J9/385 ,  H01J9/46 ,  F28D15/00

    CPC分类号： H01J9/385 ,  Y10S277/93

    摘要： A conveyance vehicle for the transportation of a vessel to be evacuated includes a heat sink in the form of one or more heat pipes located adjacent a seal forming part of a gripper assembly. The heat sink inhibits degradation of the seal when subjected to elevated temperatures consequent to engaging the neck of the vessel to be evacuated.

    摘要翻译： 用于输送要抽真空的容器的输送车辆包括形成一个或多个热管的形式的散热器，所述散热器邻近形成夹持器组件的一部分的密封件。 当散热器接受要抽真空的容器的颈部时，散热器会受到高温的影响。

    Trap device
    10.
    发明授权
    Trap device 有权
    陷阱设备

    公开(公告)号：US08657942B2

    公开(公告)日：2014-02-25

    申请号：US11887124

    申请日：2006-03-09

    申请人： Christopher John Shaw ,  Graeme Huntley ,  Andrew James Seeley

    发明人： Christopher John Shaw ,  Graeme Huntley ,  Andrew James Seeley

    IPC分类号： B01D45/00

    CPC分类号： C23C16/4412 ,  H01L21/67017

    摘要： A trap device includes means for separating a liquid compound from a waste stream exhaust from a process chamber, means for collecting the liquid compound separated from the waste stream, means for selectively isolating the collected liquid compound from the waste stream, and means for evaporating the collected liquid compound to return the compound in gaseous form to the waste stream. This can enable a volatile liquid to be collected at a defined location, isolated from the waste stream, and, when so desired, returned to the waste stream in the form of a gas for subsequent abatement.

    摘要翻译： 捕集装置包括用于将液体化合物与来自处理室的废物流排出的装置，用于收集从废物流中分离出的液体化合物的装置，用于选择性地将废液流中收集的液体化合物分离的装置，以及用于蒸发 收集的液体化合物以使气体形式的化合物返回到废物流中。 这可以使挥发性液体在与废物流分离的限定位置处收集，并且当需要时，以气体的形式返回到废物流中以便随后减少。