Method for patterning thin films
    1.
    发明授权
    Method for patterning thin films 失效
    薄膜构图方法

    公开(公告)号:US06399258B2

    公开(公告)日:2002-06-04

    申请号:US09759794

    申请日:2001-01-12

    IPC分类号: G03C300

    摘要: Patterned articles, such as RFID antenna, are made by subablation, a process comprising the steps of: A. providing a substrate having a coating, such as a metal or metal oxide, and an interface comprising the thin region where the coating and the substrate are closest to each other; B. exposing at least one part of the total area of the coating to a flux of electromagnetic energy, Such as a focused excimer laser beam, sufficient to disrupt the interface but insufficient to ablate the coating, and C. removing the parts of the coating in registry with the portion of the interface area that was disrupted, by means such as ultrasonic agitation. The process has advantages over photo-resist processes in that there is no residual chemical resist left on the product and no undercutting of the pattern or image. It has advantages over laser ablation processes in that higher throughput is possible at the same energy level and there is no microscopic debris left on the product surface.

    摘要翻译: 图案化的物品,例如RFID天线,是通过消融来进行的,其过程包括以下步骤: 提供具有涂层的基底,例如金属或金属氧化物,以及包括涂层和基底彼此最接近的薄区域的界面; B。 将涂层的总面积的至少一部分暴露于电磁能量通量,例如聚焦的准分子激光束,其足以破坏界面但不足以消除涂层,以及C。 通过超声波搅拌等手段,将涂层的部分与被破坏的界面区域对齐,从而与光刻胶工艺相比具有优势,因为在产品上没有留下残留的化学抗蚀剂,没有底切 的图案或图像。 它具有优于激光烧蚀工艺的优点,因为在相同的能量水平下可以实现更高的产量,并且在产品表面上没有留下微观碎片。

    Imaged article on polymeric substrate
    2.
    发明授权
    Imaged article on polymeric substrate 有权
    聚合物基材上的成像制品

    公开(公告)号:US06203952B1

    公开(公告)日:2001-03-20

    申请号:US09231428

    申请日:1999-01-14

    IPC分类号: G03C300

    摘要: Patterned articles, such as RFID antenna, are made by subablation, a process comprising the steps of: A. providing a substrate having a coating, such as a metal or metal oxide, and an interface comprising the thin region where the coating and the substrate are closest to each other; B. exposing at least one part of the total area of the coating to a flux of electromagnetic energy, such as a focused excimer laser beam, sufficient to disrupt the interface but insufficient to ablate the coating; and C. removing the parts of the coating in registry with the portion of the interface area that was disrupted, by means such as ultrasonic agitation. The process has advantages over photo-resist processes in that there is no residual chemical resist left on the product and no undercutting of the pattern or image. It has advantages over laser ablation processes in that higher throughput is possible at the same energy level and there is no microscopic debris left on the product surface.

    摘要翻译: 图案化的物品,例如RFID天线,是通过消融来进行的,其过程包括以下步骤: 提供具有涂层的基底,例如金属或金属氧化物,以及包括涂层和基底彼此最接近的薄区域的界面; B。 将涂层的总面积的至少一部分暴露于足以破坏界面但不足以消除涂层的电磁能量(例如聚焦的准分子激光束); 和C. 通过超声波搅拌等手段,将涂层的部分与被破坏的界面区域对齐,从而与光刻胶工艺相比具有优势,因为在产品上没有留下残留的化学抗蚀剂,没有底切 的图案或图像。 它具有优于激光烧蚀工艺的优点,因为在相同的能量水平下可以实现更高的产量,并且在产品表面上没有留下微观碎片。

    Thermal transfer element for forming multilayers devices
    5.
    发明授权
    Thermal transfer element for forming multilayers devices 有权
    用于形成多层器件的热转印元件

    公开(公告)号:US06270944B1

    公开(公告)日:2001-08-07

    申请号:US09545930

    申请日:2000-04-10

    IPC分类号: G03F7095

    摘要: A thermal transfer element for forming a multilayer device may include a substrate and a multicomponent transfer unit that, when transferred to a receptor, is configured and arranged to form a first operational layer and a second operational layer of a multilayer device. In at least some instances, the thermal transfer element also includes a light-to-heat conversion (LTHC) layer that can convert light energy to heat energy to transfer the multicomponent transfer unit. Transferring the multicomponent transfer unit to the receptor may include contacting a receptor with a thermal transfer element having a substrate and a multicomponent transfer unit. Then, the thermal transfer element is selectively heated to transfer the multicomponent transfer unit to the receptor according to a pattern to form at least first and second operational layers of a device. Often, when the thermal transfer element includes a LTHC layer between the substrate and the transfer layer, the thermal transfer element can be illuminated with light according to the pattern and the light energy is converted to heat energy to selectively heat the thermal transfer element.

    摘要翻译: 用于形成多层器件的热转印元件可以包括基底和多组分转印单元,当转印到受体时,其被配置和布置成形成多层器件的第一操作层和第二操作层。 在至少一些情况下,热转印元件还包括可将光能转换成热能以转移多组分转印单元的光热转换(LTHC)层。 将多组分转移单元转移到受体可以包括将受体与具有底物和多组分转移单元的热传递元件接触。 然后,选择性地加热热转印元件,以根据图案将多组分转印单元转移到接收器,以形成装置的至少第一和第二操作层。 通常,当热传递元件在衬底和转移层之间包括LTHC层时,可以根据图案用光照射热传递元件,并且将光能转换成热能以选择性地加热热转印元件。

    Dual layer optical medium having partially reflecting metal alloy layer
    6.
    发明授权
    Dual layer optical medium having partially reflecting metal alloy layer 失效
    具有部分反射金属合金层的双层光学介质

    公开(公告)号:US5640382A

    公开(公告)日:1997-06-17

    申请号:US574680

    申请日:1995-12-19

    IPC分类号: G11B7/09 G11B7/24 G11B7/258

    摘要: A dual layer pre-recorded optical disc includes a transparent substrate, a partially reflective layer, a transparent spacer layer, and a highly reflective layer. One pattern of data pits is provided on the substrate, adjacent the partially reflective layer, and another pattern of data pits is provided on the spacer layer, adjacent the highly reflective layer. The partially reflective layer may be made of an alloy of gold and silver having a general formula Au.sub.x Ag.sub.y, where 15

    摘要翻译: 双层预记录光盘包括透明基板,部分反射层,透明间隔层和高反射层。 数据凹坑的一个图形提供在基板上,与部分反射层相邻,并且数据凹坑的另一图案设置在间隔层上,与高反射层相邻。 部分反射层可以由具有通式AuxAgy的金和银合金制成,其中15

    Process for making microlens arrays and masterforms
    8.
    发明授权
    Process for making microlens arrays and masterforms 有权
    制备微透镜阵列和原型的方法

    公开(公告)号:US08004767B2

    公开(公告)日:2011-08-23

    申请号:US12509904

    申请日:2009-07-27

    IPC分类号: G02B27/10

    摘要: A process for making a microlens array or a microlens array masterform comprises (a) providing a photoreactive composition, the photoreactive composition comprising (1) at least one reactive species that is capable of undergoing an acid- or radical-initiated chemical reaction, and (2) at least one multiphoton photoinitiator system; and (b) imagewise exposing at least a portion of the composition to light sufficient to cause simultaneous absorption of at least two photons, thereby inducing at least one acid- or radical-initiated chemical reaction where the composition is exposed to the light, the imagewise exposing being carried out in a pattern that is effective to define at least the surface of a plurality of microlenses, each of the microlenses having a principal axis and a focal length, and at least one of the microlenses being an aspherical microlens.

    摘要翻译: 制备微透镜阵列或微透镜阵列原型的方法包括(a)提供光反应性组合物,所述光反应性组合物包含(1)能够经历酸或自由基引发的化学反应的至少一种反应性物质,和 2)至少一种多光子光引发剂体系; 和(b)将组合物的至少一部分成像曝光至足以引起同时吸收至少两个光子的光,从而诱导至少一种酸或自由基引发的化学反应,其中组合物暴露于光,成像 曝光以有效地限定多个微透镜的表面的图案进行,每个微透镜具有主轴和焦距,并且至少一个微透镜是非球面微透镜。

    PROCESS FOR MAKING MICROLENS ARRAYS AND MASTERFORMS
    10.
    发明申请
    PROCESS FOR MAKING MICROLENS ARRAYS AND MASTERFORMS 有权
    制作微阵列和主体的过程

    公开(公告)号:US20090284840A1

    公开(公告)日:2009-11-19

    申请号:US12509904

    申请日:2009-07-27

    IPC分类号: G02B27/12 G03F7/20

    摘要: A process for making a microlens array or a microlens array masterform comprises (a) providing a photoreactive composition, the photoreactive composition comprising (1) at least one reactive species that is capable of undergoing an acid- or radical-initiated chemical reaction, and (2) at least one multiphoton photoinitiator system; and (b) imagewise exposing at least a portion of the composition to light sufficient to cause simultaneous absorption of at least two photons, thereby inducing at least one acid- or radical-initiated chemical reaction where the composition is exposed to the light, the imagewise exposing being carried out in a pattern that is effective to define at least the surface of a plurality of microlenses, each of the microlenses having a principal axis and a focal length, and at least one of the microlenses being an aspherical microlens.

    摘要翻译: 制备微透镜阵列或微透镜阵列原型的方法包括(a)提供光反应性组合物,所述光反应性组合物包含(1)能够经历酸或自由基引发的化学反应的至少一种反应性物质,和 2)至少一种多光子光引发剂体系; 和(b)将组合物的至少一部分成像曝光至足以引起同时吸收至少两个光子的光,从而诱导至少一种酸或自由基引发的化学反应,其中组合物暴露于光,成像 曝光以有效地限定多个微透镜的表面的图案进行,每个微透镜具有主轴和焦距,并且至少一个微透镜是非球面微透镜。