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公开(公告)号：US07654685B2
公开(公告)日：2010-02-02
申请号：US11714343
申请日：2007-03-06
申请人： Der-Shen Wan , Colin Farrell , Erik L. Novak
发明人： Der-Shen Wan , Colin Farrell , Erik L. Novak
CPC分类号： G01B9/02007
摘要： An illumination system for an interferometer combines a white-light source and a green source with a reflective green dichroic filter. When the green source alone is energized for PSI measurements, the output of the illumination system is green only. When a white-light output is desired for VSI measurements, both sources are energized and the intensity of the green light is judiciously calibrated to match the spectral band filtered out by the dichroic mirror. Therefore, the system can switch between green and white light simply by changing the selection of energized sources, without any mechanical switching and attendant delays and vibrations. Multiple narrowband sources may be combined with white light in a similar manner.
摘要翻译： 用于干涉仪的照明系统将白光源和绿色源与反射式绿色二向色滤光片组合。 当单独的绿色光源为PSI测量通电时，照明系统的输出仅为绿色。 当VSI测量需要白光输出时，两个源都通电，并且绿色光的强度被明智地校准以匹配由分色镜滤除的光谱带。 因此，通过改变通电源的选择，系统可以在绿灯和白光之间切换，无需任何机械切换和随之而来的延迟和振动。 多个窄带源可以以类似的方式与白光组合。
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公开(公告)号：US20080218999A1
公开(公告)日：2008-09-11
申请号：US11714343
申请日：2007-03-06
申请人： Der-Shen Wan , Colin Farrell , Erik L. Novak
发明人： Der-Shen Wan , Colin Farrell , Erik L. Novak
IPC分类号： F21V9/10
CPC分类号： G01B9/02007
摘要： An illumination system for an interferometer combines a white-light source and a green source with a reflective green dichroic filter. When the green source alone is energized for PSI measurements, the output of the illumination system is green only. When a white-light output is desired for VSI measurements, both sources are energized and the intensity of the green light is judiciously calibrated to match the spectral band filtered out by the dichroic mirror. Therefore, the system can switch between green and white light simply by changing the selection of energized sources, without any mechanical switching and attendant delays and vibrations. Multiple narrowband sources may be combined with white light in a similar manner.
摘要翻译： 用于干涉仪的照明系统将白光源和绿色源与反射式绿色二向色滤光片组合。 当单独的绿色光源为PSI测量通电时，照明系统的输出仅为绿色。 当VSI测量需要白光输出时，两个源都通电，并且绿色光的强度被明智地校准以匹配由分色镜滤除的光谱带。 因此，通过改变通电源的选择，系统可以在绿灯和白光之间切换，无需任何机械切换和随之而来的延迟和振动。 多个窄带源可以以类似的方式与白光组合。
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公开(公告)号：US09234814B1
公开(公告)日：2016-01-12
申请号：US13925708
申请日：2013-06-24
申请人： Erik Novak , Colin Farrell , Bryan Guenther
发明人： Erik Novak , Colin Farrell , Bryan Guenther
CPC分类号： G01B9/02063 , G01B9/02067 , G01B9/02072 , G01M11/02
摘要： A reference surface is used to develop an empirical plot between a parameter of interest, such as roughness or modulation, and the position of the reference mirror in an interferometer by repeating measurements of the reference surface at different positions of the reference mirror so as to identify the in-focus position of the reference mirror. Serial quality-control measurements of samples of interest are carried out with the reference mirror in such in-focus position until a predetermined quality-control event triggers an automated system re-calibration by re-measuring the reference surface and, if the result does not correspond to the in-focus position of the reference mirror according to the plot, by finding a new in-focus position for the reference mirror using the same plot or, alternatively, a new similarly produced plot. Sample measurements are then resumed with the mirror placed at that new position.
摘要翻译： 参考表面用于通过重复在参考镜的不同位置处的参考表面的测量来形成感兴趣参数（例如粗糙度或调制）与参考镜在干涉仪中的位置之间的经验图，以便识别 参考镜的对焦位置。 所关注的样本的串行质量控制测量使用参考反射镜在这样的对焦位置进行，直到预定的质量控制事件通过重新测量参考表面触发自动系统重新校准，并且如果结果不 对应于根据绘图的参考镜的对焦位置，通过使用相同的曲线找到用于参考镜的新的对焦位置，或者替代地，新的类似产生的图。 然后用放置在该新位置的反射镜恢复样品测量。
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公开(公告)号：US08519314B1
公开(公告)日：2013-08-27
申请号：US12964532
申请日：2010-12-09
申请人： Colin Farrell
发明人： Colin Farrell
IPC分类号： G02B7/09
CPC分类号： G01B11/26 , G02B7/38 , G02B21/244
摘要： The power input to the light source of a microscope is varied as necessary to maintain a constant degree of detector saturation as the objective is moved toward a best-focus position. Focus is found by tracking the source's intensity necessary to maintain the detector irradiance at a constant level. The in-focus position is reached when the power input (and correspondingly the intensity of the light emitted by the source) reaches a minimum. The concept can be applied in a similar manner to minimize or eliminate tilt in a sample.
摘要翻译： 根据需要，输入到显微镜的光源的功率是变化的，以便当物镜朝着最佳聚焦位置移动时，保持恒定的检测器饱和度。 通过跟踪源的强度，将检测器辐照度维持在一个恒定水平，可以找到焦点。 当电力输入（并且相应地，由光源发射的光的强度）达到最小时，达到对焦位置。 该概念可以以类似的方式应用以最小化或消除样品中的倾斜。
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公开(公告)号：US09215425B1
公开(公告)日：2015-12-15
申请号：US13758912
申请日：2013-02-04
申请人： Colin Farrell , Jan van Burken
发明人： Colin Farrell , Jan van Burken
IPC分类号： H04N7/18
CPC分类号： G01B11/24 , G01B9/04 , G02B21/006 , G02B21/008 , G02B21/12
摘要： A side camera is combined with a conventional optical metrology system to image the object during the focusing scan performed in normal focusing procedures. The camera is positioned in fixed spatial relation to the objective and with its focal plane in substantial alignment with the optical axis of the objective so as to image the object during the scan. The camera is used to monitor the illumination spot formed on the object by the beam projected through the system's objective. The in-focus position is found by moving the object such that the illumination spot coincides with the objective's focus seen through the camera.
摘要翻译： 侧面照相机与传统的光学测量系统组合，以在正常对焦过程中执行的聚焦扫描期间对物体进行成像。 照相机以与物体固定的空间关系定位并且其焦平面与物镜的光轴基本对准，以便在扫描期间对物体进行成像。 相机用于通过通过系统目标投影的光束来监视形成在物体上的照明点。 通过移动对象来发现对焦位置，使得照明点与通过照相机观察到的物体的焦点重合。
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公开(公告)号：US09097517B2
公开(公告)日：2015-08-04
申请号：US13956222
申请日：2013-07-31
申请人： Colin Farrell
发明人： Colin Farrell
CPC分类号： G01B11/26 , G02B7/38 , G02B21/244
摘要： The power input to the light source of a microscope is varied as necessary to maintain a constant degree of detector saturation as the objective is moved toward a best-focus position. Focus is found by tracking the source's intensity necessary to maintain the detector irradiance at a constant level. The in-focus position is reached when the power input (and correspondingly the intensity of the light emitted by the source) reaches a minimum. The concept can be applied in a similar manner to minimize or eliminate tilt in a sample.
摘要翻译： 根据需要，输入到显微镜的光源的功率是变化的，以便当物镜朝着最佳聚焦位置移动时，保持恒定的检测器饱和度。 通过跟踪源的强度，将检测器辐照度维持在一个恒定水平，可以找到焦点。 当电力输入（并且相应地，由光源发射的光的强度）达到最小时，达到对焦位置。 该概念可以以类似的方式应用以最小化或消除样品中的倾斜。
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