Method for producing a monolithic multilayer piezo actuator
    3.
    发明授权
    Method for producing a monolithic multilayer piezo actuator 有权
    一种单片多层压电致动器的制造方法

    公开(公告)号:US06260248B1

    公开(公告)日:2001-07-17

    申请号:US09171474

    申请日:1998-10-19

    IPC分类号: H04R1700

    摘要: A method for manufacturing a monolithic piezoelectric actuator of multilayer design and having a high aspect ratio of more than two built up from a plurality of smaller stacks in a multilayer design, includes alternately layering green piezoceramic films and electrode material, compressing the layers while elevating the temperature to remove the binder and thereby form a composite, stacking several of the composites on one another, and sintering the stack so as to form the monolithic piezoelectric actuator which exhibits an improved mechanical strength with good piezoelectric properties.

    摘要翻译: 一种制造多层设计的单片式压电致动器的方法,其具有在多层设计中由多个较小堆叠构成的两个以上的高纵横比的多层压电致动器的方法,包括交替地分层绿色压电陶瓷膜和电极材料,同时升高层 温度以除去粘合剂,从而形成复合材料,将多个复合材料彼此堆叠,并烧结堆叠,以形成具有良好压电性能的改进的机械强度的单片压电致动器。

    Method for producing films of sintered polycrystalline silicon
    4.
    发明授权
    Method for producing films of sintered polycrystalline silicon 失效
    烧结多晶硅薄膜的制造方法

    公开(公告)号:US4407858A

    公开(公告)日:1983-10-04

    申请号:US335587

    申请日:1981-12-29

    CPC分类号: C01B33/02 C30B1/02 C30B29/06

    摘要: A low porosity sintered polycrystalline silicon film is produced by grinding initial silicon material in a non-oxygen-containing liquid, such as decahydronaphthalene, to an average grain size corresponding to a specific surface of at least 50 m.sup.2 /g; thickening the so-attained grinding mass with a non-oxygen-containing material, such as polyisobutylene and/or polyethylene in a suitable solvent, so as to attain a viscosity in the resultant slip suitable for drawing a film from such slip, and drawing a film from such slip, optionally dividing the film into desired sized pieces, and sintering the resultant film or pieces.

    摘要翻译: 通过将非含氧液体如十氢萘中的初始硅材料研磨至对应于至少50m 2 / g的比表面的平均晶粒尺寸来制造低孔隙率烧结多晶硅膜; 在合适的溶剂中,用诸如聚异丁烯和/或聚乙烯之类的非含氧材料增稠所得到的研磨物质,从而获得适于从这种滑动中拉伸薄膜的所得滑动物的粘度, 膜,可任选地将膜分成所需尺寸的片,并烧结所得到的片或片。