公开(公告)号：US10987776B2

公开(公告)日：2021-04-27

申请号：US15989662

申请日：2018-05-25

申请人： EBARA CORPORATION

发明人： Pohan Chen ,  Tadakazu Sone ,  Kenichi Suzuki ,  Hiroshi Sotozaki

IPC分类号： B24B49/16 ,  G06F17/18 ,  B24B49/08 ,  B24B49/18 ,  B24B53/017 ,  G06F17/11

摘要： A method, which can accurately determine in a short time a relationship between a load of a dresser and a pressure of a gas supplied to an air cylinder, is disclosed. The method includes determining a first contact point where a load measurement device is brought into contact with a polishing table, calculating a relational expression composed to a quadratic function showing a relationship between a measured load and a measured pressure, determining a second contact point where the dresser is brought into contact with a polishing surface of a polishing pad, calculating an amount of correction from the pressure of the gas at the first contact point and the pressure of the gas at the second contact point, and correcting the relational expression based on the calculated amount of correction.

公开(公告)号：US10816259B2

公开(公告)日：2020-10-27

申请号：US15474113

申请日：2017-03-30

申请人： Ebara Corporation

发明人： Kenichi Suzuki ,  Ryuichi Kosuge ,  Kenichiro Saito

IPC分类号： F25D21/04 ,  H01L21/67 ,  H01L21/68 ,  H01L21/677 ,  H01L21/687 ,  F26B15/00

摘要： A substrate transport apparatus includes a substrate holding unit configured to hold a substrate; a casing; and a drive mechanism at least partially provided within the casing and configured to drive the substrate holding unit using air. The drive mechanism is capable of supplying air into the casing.

公开(公告)号：US20170284727A1

公开(公告)日：2017-10-05

申请号：US15474113

申请日：2017-03-30

申请人： Ebara Corporation

发明人： Kenichi Suzuki ,  Ryuichi Kosuge ,  Kenichiro Saito

IPC分类号： F25D21/04 ,  H01L21/67 ,  F26B15/00 ,  H01L21/677

摘要： A substrate transport apparatus includes a substrate holding unit configured to hold a substrate; a casing; and a drive mechanism at least partially provided within the casing and configured to drive the substrate holding unit using air. The drive mechanism is capable of supplying air into the casing.