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公开(公告)号：US11705686B2
公开(公告)日：2023-07-18
申请号：US16636605
申请日：2018-09-20
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： James Brookhyser , Jan Kleinert , Jered Richter , Kurt Eaton
CPC classification number: H01S3/1068 , G02B6/42 , G02B26/06 , G02F1/00 , G02F1/292 , G02F1/33 , H01S5/124 , H01S5/145
Abstract: A beam positioner can be broadly characterized as including a first acousto-optic (AO) deflector (AOD) operative to diffract an incident beam of linearly polarized laser light, wherein the first AOD has a first diffraction axis and wherein the first AOD is oriented such that the first diffraction axis has a predetermined spatial relationship with the plane of polarization of the linearly polarized laser light. The beam positioner can include at least one phase-shifting reflector arranged within a beam path along which light is propagatable from the first AOD. The at least one phase-shifting reflector can be configured and oriented to rotate the plane of polarization of light diffracted by the first AOD.
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公开(公告)号：US20210226406A1
公开(公告)日：2021-07-22
申请号：US16636605
申请日：2018-09-20
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： James Brookhyser , Jan Kleinert , Jered Richter , Kurt Eaton
Abstract: A beam positioner can be broadly characterized as including a first acousto-optic (AO) deflector (AOD) operative to diffract an incident beam of linearly polarized laser light, wherein the first AOD has a first diffraction axis and wherein the first AOD is oriented such that the first diffraction axis has a predetermined spatial relationship with the plane of polarization of the linearly polarized laser light. The beam positioner can include at least one phase-shifting reflector arranged within a beam path along which light is propagatable from the first AOD. The at least one phase-shifting reflector can be configured and oriented to rotate the plane of polarization of light diffracted by the first AOD.
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