RETICLE CONTAINER HAVING PLATING WITH REDUCED EDGE BUILD

    公开(公告)号:US20240061326A1

    公开(公告)日:2024-02-22

    申请号:US18233180

    申请日:2023-08-11

    Applicant: ENTEGRIS, INC.

    CPC classification number: G03F1/66 C25D7/00 C25D5/10

    Abstract: Reticle containers include a cover and a baseplate having contact surfaces configured to contact one another when the reticle container is assembled. Relief areas are provided adjacent to at least one of the contact surfaces. The relief areas are such that plating provided on in those relief areas do not contact the other of the cover or the baseplate when the reticle container is assembled. The relief areas can include structures such as beveled regions, depressions, and radiused regions. The relief areas can optionally further serve as a robber during an electroplating process.

    ARTICLES COMPRISING HETEROGENEOUS AND THERMALLY STABLE GRAIN-REFINED ALLOYS

    公开(公告)号:US20240026559A1

    公开(公告)日:2024-01-25

    申请号:US17868409

    申请日:2022-07-19

    CPC classification number: C25D5/10 C25D5/617 C25D15/00 C25D5/16

    Abstract: Articles including anisotropic electrodeposited layers of fine-grained alloys of Co, Cu, Fe, Ni and/or Zn with minor additions of B, O, P and S that provide high strength, ductility and heat-resistance, are disclosed as well as a process for making the articles. Non-metallic additions of ≤2% are required to significantly increase the maximum temperature at which softening and grain-growth occurs. Electrodeposition conditions in a single plating cell are adjusted and/or modulated to vary at least one property in the deposit direction and/or along the length and/or width of the workpiece once, constantly or repeatedly, to form a graded and/or layered electrodeposit. Variable property metallic material deposits containing, at least in part, a fine-grained microstructure and variable property in the deposit direction and optionally multi-dimensionally, provide superior overall mechanical properties and temperature stability. Various methods and electroplating apparatuses and approaches to practice the invention are also provided.

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