公开(公告)号：US11679385B2

公开(公告)日：2023-06-20

申请号：US17124375

申请日：2020-12-16

Applicant: ENTEGRIS, INC.

Inventor： John C. Gaudreau ,  Evan Warniers ,  Edward J. Washington

IPC: B01D46/00 ,  G01N15/08 ,  B01L3/00

CPC classification number: B01L3/50 ,  B01D46/0086 ,  G01N15/08 ,  B01D2273/18 ,  B01L2300/043 ,  G01N2015/084

Abstract: A media sample holder includes a base and a plurality of retention assemblies including retaining tabs and opposing flexible release lever arms, configured to allow attachment of the base to an attachment adapter. The media sample holder can attach a media sample on or near a filter. The media sample holder held in the media sample holder can have a different removal efficiency curve than a removal efficiency curve of the filter. The media sample can be placed at or near the filter for a period of time, then tested to determine the status and/or life of the filter based on the relationship between the remaining life, exposure, or removal efficiency of the filter and the exposure or removal efficiency of the tested media sample.

公开(公告)号：US10987612B2

公开(公告)日：2021-04-27

申请号：US16097037

申请日：2017-04-28

Applicant: ENTEGRIS, Inc.

Inventor： Tom Leblanc ,  Joe Wildgoose ,  Marc Venet ,  Evan Warniers ,  John Gaudreau

IPC: B01D46/00 ,  B01D46/52 ,  B01D27/06 ,  B01D46/10 ,  B01D27/08

Abstract: Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.