公开(公告)号：US20240337023A1

公开(公告)日：2024-10-10

申请号：US18745963

申请日：2024-06-17

Applicant: ENTEGRIS, INC.

Inventor： I-Kuan Lin ,  Carlo Waldfried ,  Jianan Hou

IPC: C23C16/56 ,  C23C16/40 ,  C23C16/44 ,  C23C16/455

CPC classification number: C23C16/56 ,  C23C16/405 ,  C23C16/4404 ,  C23C16/45525

Abstract: Articles and methods relating to coatings having superior chemical resistance and structural integrity, can be prepared via atomic layer deposition and fluoro-annealing at low process temperatures of between about 150° C. and less than 300° C. The film comprises a fluorinated metal oxide containing yttrium.

公开(公告)号：US20180202047A1

公开(公告)日：2018-07-19

申请号：US15871425

申请日：2018-01-15

Applicant: Entegris, Inc.

Inventor： I-Kuan Lin ,  Carlo Waldfried ,  Jianan Hou

IPC: C23C16/56 ,  C23C16/40

CPC classification number: C23C16/56 ,  C23C16/405 ,  C23C16/4404 ,  C23C16/45525

Abstract: Articles and methods relating to coatings having superior chemical resistance and structural integrity, can be prepared via atomic layer deposition and fluoro-annealing at low process temperatures of between about 150° C. and less than 300° C. The film comprises a fluorinated metal oxide containing yttrium.