公开(公告)号：US10385452B2

公开(公告)日：2019-08-20

申请号：US14404633

申请日：2013-05-31

Applicant: Entegris, Inc.

Inventor： Bryan C. Hendrix ,  John N. Gregg ,  Scott L. Battle ,  Donn K. Naito ,  Kyle Bartosh ,  John M. Cleary ,  Sebum Cheon ,  Jordan Hodges

IPC: C23C16/44 ,  C23C16/458 ,  C23C16/448 ,  C23C16/455 ,  B01B1/00

Abstract: Systems, reagent support trays, particle suppression devices, and methods are disclosed. In one aspect, a system includes a vaporizer vessel having one or more interior walls enclosing an interior volume and a plurality of reagent support trays configured to be vertically stackable within the interior volume. Each of the plurality of reagent support trays is configured to be vertically stackable within the interior volume to form a stack of reagent support trays. One or more of the plurality of reagent support trays is configured to redirect a flow of a gas passing between adjacent reagent support trays in the stack of reagent support trays to cause the flow of gas to interact with the source reagent material in a particular reagent support tray before passing into a next of the plurality of reagent support trays in the stack of reagent support trays.

公开(公告)号：US20150191819A1

公开(公告)日：2015-07-09

申请号：US14404633

申请日：2013-05-31

Applicant: ENTEGRIS, INC.

Inventor： Bryan C. Hendrix ,  John N. Gregg ,  Scott L. Battle ,  Donn K. Naito ,  Kyle Bartosh ,  John M. Cleary ,  Sebum Cheon ,  Jordan Hodges

IPC: C23C16/458 ,  C23C16/455

CPC classification number: C23C16/458 ,  B01B1/005 ,  C23C16/4402 ,  C23C16/4481 ,  C23C16/455

Abstract: Systems, reagent support trays, particle suppression devices, and methods are disclosed. In one aspect, a system includes a vaporizer vessel having one or more interior walls enclosing an interior volume and a plurality of reagent support trays configured to be vertically stackable within the interior volume. Each of the plurality of reagent support trays is configured to be vertically stackable within the interior volume to form a stack of reagent support trays. One or more of the plurality of reagent support trays is configured to redirect a flow of a gas passing between adjacent reagent support trays in the stack of reagent support trays to cause the flow of gas to interact with the source reagent material in a particular reagent support tray before passing into a next of the plurality of reagent support trays in the stack of reagent support trays.

Abstract translation: 公开了系统，试剂支撑盘，粒子抑制装置和方法。 在一个方面，一种系统包括蒸发器容器，该蒸发器容器具有包围内部容积的一个或多个内壁和被配置为在内部容积内垂直堆叠的多个试剂支撑盘。 多个试剂支撑托盘中的每一个构造成在内部空间内可垂直堆叠以形成一堆试剂支撑托盘。 多个试剂支撑托盘中的一个或多个配置成将通过相邻的试剂支撑托盘之间的气体流引导到试剂托盘的堆叠中，以引起气体流与特定试剂载体中的源试剂材料相互作用 在进入试剂托盘堆叠中的多个试剂载体托盘中的下一个之前，托盘。