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    METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
    1.
    发明申请
    METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL 审中-公开
    方法和装置帮助促进与气体材料接触的气体

    公开(公告)号：US20170029946A1

    公开(公告)日：2017-02-02

    申请号：US15295662

    申请日：2016-10-17

    申请人： Entegris, Inc.

    发明人： John N. Gregg ,  Scott L. Battle ,  Jeffrey I. Banton ,  Donn K. Naito ,  Ravi K. Laxman

    IPC分类号： C23C16/448 ,  C23C16/455 ,  C23C16/50 ,  C23C16/44

    CPC分类号： C23C16/4483 ,  C23C16/4408 ,  C23C16/4481 ,  C23C16/45544 ,  C23C16/50 ,  F17C3/00 ,  F17C3/02 ,  F17C11/00 ,  F17C2203/03 ,  Y02E60/321 ,  Y10S261/65

    摘要： Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an ampoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer.

    摘要翻译： 可汽化材料支撑在容器内以促进引入的气体与可蒸发材料的接触，并产生包括蒸发材料的产物气体。 加热元件向容器的壁提供热量以加热设置在其中的可蒸发材料。 容器可以包括具有可移除顶部的安瓿。 限定多个材料支撑表面的多个容器可以堆放在与容器热连通的容器内。 管可以设置在容器内并且联接到气体入口。 可以进一步提供过滤器，流量计和液位传感器。 由引入的气体与汽化材料的接触产生的产物气体可以被输送到原子层沉积（ALD）或类似的工艺设备。 包含固体的源材料的至少一部分可以溶解在溶剂中，然后除去溶剂以产生设置在蒸发器内的源材料（例如，金属络合物）。

    ULTRA-HIGH PURITY STORAGE AND DISPENSING OF LIQUID REAGENTS
    2.
    发明申请
    ULTRA-HIGH PURITY STORAGE AND DISPENSING OF LIQUID REAGENTS 审中-公开
    超高纯度储存和液体试剂分配

    公开(公告)号：US20150210430A1

    公开(公告)日：2015-07-30

    申请号：US14419458

    申请日：2013-08-07

    申请人： ENTEGRIS, INC.

    发明人： Donn K. Naito ,  Andy Krell ,  Mitchell W. McFeron ,  Steven Jackson ,  Joel Robison

    IPC分类号： B65D25/14 ,  H01L21/67 ,  B65D85/00 ,  B65D25/38 ,  B65D43/02

    CPC分类号： B65D25/14 ,  B01J4/00 ,  B01J19/02 ,  B01J2219/0245 ,  B65D25/38 ,  B65D43/02 ,  B65D85/70 ,  H01L21/67023

    摘要： A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.

    摘要翻译： 一种用于分配超高纯度化学试剂的供应容器，包括限定包含内表面结构的可封闭内部容积的金属容器，其中内表面结构涂覆有超高纯度有效的多氟全氟烷氧基涂层。 这种供应容器可以例如用于向半导体制造工具或用于制造平板显示器或太阳能电池板的工具的储存和分配超高纯度化学试剂。

    HIGH VAPOR PRESSURE DELIVERY SYSTEM
    3.
    发明申请
    HIGH VAPOR PRESSURE DELIVERY SYSTEM 有权

    公开(公告)号：US20230130079A1

    公开(公告)日：2023-04-27

    申请号：US17972242

    申请日：2022-10-24

    申请人： ENTEGRIS, INC.

    发明人： Scott L. Battle ,  John N. Gregg ,  Donn K. Naito ,  Bryan Hendrix

    IPC分类号： C23C16/448 ,  C23C16/52

    摘要： A system includes a vaporizer vessel. The vaporizer vessel includes an outlet fluidly connected to the vaporizer vessel. A heater is configured to heat the vaporizer vessel. A valve is configured to regulate a pressure of a vaporized material at the outlet. In response to the pressure at the outlet being outside a set pressure range, the heater is configured to increase or decrease heat to the vaporizer vessel.

    METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
    4.
    发明申请
    METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL 有权
    方法和装置帮助促进与气体材料接触的气体

    公开(公告)号：US20150337436A1

    公开(公告)日：2015-11-26

    申请号：US14815805

    申请日：2015-07-31

    申请人： Entegris, Inc.

    发明人： John N. Gregg ,  Scott L. Battle ,  Jeffrey I. Banton ,  Donn K. Naito ,  Ravi K. Laxman

    IPC分类号： C23C16/448

    CPC分类号： C23C16/4483 ,  C23C16/4408 ,  C23C16/4481 ,  C23C16/45544 ,  C23C16/50 ,  F17C3/00 ,  F17C3/02 ,  F17C11/00 ,  F17C2203/03 ,  Y02E60/321 ,  Y10S261/65

    摘要： Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an ampoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer.

    摘要翻译： 可汽化材料支撑在容器内以促进引入的气体与可蒸发材料的接触，并产生包括蒸发材料的产物气体。 加热元件向容器的壁提供热量以加热设置在其中的可蒸发材料。 容器可以包括具有可移除顶部的安瓿。 限定多个材料支撑表面的多个容器可以堆放在与容器热连通的容器内。 管可以设置在容器内并且联接到气体入口。 可以进一步提供过滤器，流量计和液位传感器。 由引入的气体与汽化材料的接触产生的产物气体可以被输送到原子层沉积（ALD）或类似的工艺设备。 包含固体的源材料的至少一部分可以溶解在溶剂中，然后除去溶剂以产生设置在蒸发器内的源材料（例如，金属络合物）。

    Method and apparatus to help promote contact of gas with vaporized material
    6.
    发明授权
    Method and apparatus to help promote contact of gas with vaporized material 有权

    公开(公告)号：US10465286B2

    公开(公告)日：2019-11-05

    申请号：US15295662

    申请日：2016-10-17

    申请人： Entegris, Inc.

    发明人： John N. Gregg ,  Scott L. Battle ,  Jeffrey I. Banton ,  Donn K. Naito ,  Ravi K. Laxman

    IPC分类号： C23C16/00 ,  C23C16/448 ,  F17C3/00 ,  F17C3/02 ,  F17C11/00 ,  C23C16/44 ,  C23C16/455 ,  C23C16/50

    摘要： Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may include an ampoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer.

    SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION
    10.
    发明申请
    SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION 审中-公开
    基于源试剂的高质量流体输送用于分批沉积

    公开(公告)号：US20150191819A1

    公开(公告)日：2015-07-09

    申请号：US14404633

    申请日：2013-05-31

    申请人： ENTEGRIS, INC.

    发明人： Bryan C. Hendrix ,  John N. Gregg ,  Scott L. Battle ,  Donn K. Naito ,  Kyle Bartosh ,  John M. Cleary ,  Sebum Cheon ,  Jordan Hodges

    IPC分类号： C23C16/458 ,  C23C16/455

    CPC分类号： C23C16/458 ,  B01B1/005 ,  C23C16/4402 ,  C23C16/4481 ,  C23C16/455

    摘要： Systems, reagent support trays, particle suppression devices, and methods are disclosed. In one aspect, a system includes a vaporizer vessel having one or more interior walls enclosing an interior volume and a plurality of reagent support trays configured to be vertically stackable within the interior volume. Each of the plurality of reagent support trays is configured to be vertically stackable within the interior volume to form a stack of reagent support trays. One or more of the plurality of reagent support trays is configured to redirect a flow of a gas passing between adjacent reagent support trays in the stack of reagent support trays to cause the flow of gas to interact with the source reagent material in a particular reagent support tray before passing into a next of the plurality of reagent support trays in the stack of reagent support trays.

    摘要翻译： 公开了系统，试剂支撑盘，粒子抑制装置和方法。 在一个方面，一种系统包括蒸发器容器，该蒸发器容器具有包围内部容积的一个或多个内壁和被配置为在内部容积内垂直堆叠的多个试剂支撑盘。 多个试剂支撑托盘中的每一个构造成在内部空间内可垂直堆叠以形成一堆试剂支撑托盘。 多个试剂支撑托盘中的一个或多个配置成将通过相邻的试剂支撑托盘之间的气体流引导到试剂托盘的堆叠中，以引起气体流与特定试剂载体中的源试剂材料相互作用 在进入试剂托盘堆叠中的多个试剂载体托盘中的下一个之前，托盘。