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    DIFFUSERS IN VAPORIZERS AND RELATED METHODS
    1.
    发明申请
    DIFFUSERS IN VAPORIZERS AND RELATED METHODS 有权

    公开(公告)号：US20250020282A1

    公开(公告)日：2025-01-16

    申请号：US18767649

    申请日：2024-07-09

    Applicant: ENTEGRIS, INC.

    Inventor： Scott L. Battle ,  Benjamin R. Garrett ,  Bryan Hendrix ,  Michael Watson ,  Sara Moghaddam ,  Yusuke Tamaki

    IPC: F17C9/02

    Abstract: Diffuser plates in vaporizers, and related systems and methods, are provided. A vaporizer comprises a vessel having an outlet. The vessel contains or is configured to contain a vaporizable precursor that, when vaporized, produces a precursor vapor. The vessel discharges or is configured to discharge the precursor vapor through the outlet. The vaporizer includes a diffuser located within the vessel, between the vaporizable precursor and the outlet. The diffuser has a first surface, a second surface opposite the first surface, and a plurality of holes extending from the first surface of the diffuser through to the second surface of the diffuser.

    PRECURSOR DELIVERY SYSTEMS FOR DETERMINING MATERIAL LEVELS
    2.
    发明申请
    PRECURSOR DELIVERY SYSTEMS FOR DETERMINING MATERIAL LEVELS 有权

    公开(公告)号：US20230113646A1

    公开(公告)日：2023-04-13

    申请号：US17959792

    申请日：2022-10-04

    Applicant: ENTEGRIS, INC.

    Inventor： Scott L. Battle ,  Benjamin Cardozo ,  Chase Parker

    IPC: C23C16/455 ,  G01G17/04

    Abstract: A precursor delivery system for determining material levels and related methods can include an ampoule and at least one tray disposed in the ampoule. The at least one tray may be configured to hold an amount of a precursor material. A load cell assembly is also included. The load cell assembly may include a load cell. The load cell assembly may be coupled to the at least one tray in a configuration sufficient for the at least one tray to exert a mechanical force upon the load cell. This mechanical force may be correlative to the amount of precursor material present on the at least one tray and thus may be used to determine material levels within the ampoule.

    Heat transfer to ampoule trays
    3.
    发明授权
    Heat transfer to ampoule trays 有权

    公开(公告)号：US10895347B2

    公开(公告)日：2021-01-19

    申请号：US16162560

    申请日：2018-10-17

    Applicant: Entegris, Inc.

    Inventor： Bryan C. Hendrix ,  Scott L. Battle ,  John N. Gregg

    IPC: C23C16/448 ,  F17C7/04 ,  F28D21/00

    Abstract: The invention is directed to a vaporizer or ampoule assembly with improved heat transfer between a vaporizer vessel body and at least one support tray located therein. In particular, there is provided a heat transfer enhancing member that is disposed between a vessel body and support tray. In one example of a heat transfer enhancing member or assembly there is included a heat conductive mesh or liner around totally or partially around the support tray that is wedged in between the support tray and the interior diameter or wall of the vessel body. In a related embodiment, the heat transfer enhancing member includes an expandable support tray sidewall to increase physical contact between the support tray and the vessel body interior wall.

    METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
    4.
    发明申请
    METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL 审中-公开
    方法和装置帮助促进与气体材料接触的气体

    公开(公告)号：US20170029946A1

    公开(公告)日：2017-02-02

    申请号：US15295662

    申请日：2016-10-17

    Applicant: Entegris, Inc.

    Inventor： John N. Gregg ,  Scott L. Battle ,  Jeffrey I. Banton ,  Donn K. Naito ,  Ravi K. Laxman

    IPC: C23C16/448 ,  C23C16/455 ,  C23C16/50 ,  C23C16/44

    CPC classification number: C23C16/4483 ,  C23C16/4408 ,  C23C16/4481 ,  C23C16/45544 ,  C23C16/50 ,  F17C3/00 ,  F17C3/02 ,  F17C11/00 ,  F17C2203/03 ,  Y02E60/321 ,  Y10S261/65

    Abstract: Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an ampoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer.

    Abstract translation: 可汽化材料支撑在容器内以促进引入的气体与可蒸发材料的接触，并产生包括蒸发材料的产物气体。 加热元件向容器的壁提供热量以加热设置在其中的可蒸发材料。 容器可以包括具有可移除顶部的安瓿。 限定多个材料支撑表面的多个容器可以堆放在与容器热连通的容器内。 管可以设置在容器内并且联接到气体入口。 可以进一步提供过滤器，流量计和液位传感器。 由引入的气体与汽化材料的接触产生的产物气体可以被输送到原子层沉积（ALD）或类似的工艺设备。 包含固体的源材料的至少一部分可以溶解在溶剂中，然后除去溶剂以产生设置在蒸发器内的源材料（例如，金属络合物）。

    HIGH VAPOR PRESSURE DELIVERY SYSTEM
    8.
    发明申请
    HIGH VAPOR PRESSURE DELIVERY SYSTEM 有权

    公开(公告)号：US20230130079A1

    公开(公告)日：2023-04-27

    申请号：US17972242

    申请日：2022-10-24

    Applicant: ENTEGRIS, INC.

    Inventor： Scott L. Battle ,  John N. Gregg ,  Donn K. Naito ,  Bryan Hendrix

    IPC: C23C16/448 ,  C23C16/52

    Abstract: A system includes a vaporizer vessel. The vaporizer vessel includes an outlet fluidly connected to the vaporizer vessel. A heater is configured to heat the vaporizer vessel. A valve is configured to regulate a pressure of a vaporized material at the outlet. In response to the pressure at the outlet being outside a set pressure range, the heater is configured to increase or decrease heat to the vaporizer vessel.

    MODULAR TRAY FOR SOLID CHEMICAL VAPORIZING CHAMBER
    9.
    发明申请
    MODULAR TRAY FOR SOLID CHEMICAL VAPORIZING CHAMBER 有权

    公开(公告)号：US20230112884A1

    公开(公告)日：2023-04-13

    申请号：US17961470

    申请日：2022-10-06

    Applicant: ENTEGRIS, INC.

    Inventor： Scott L. Battle ,  Jacob Thomas ,  Benjamin H. Olson ,  John N. Gregg

    IPC: C23C16/448 ,  C23C16/455

    Abstract: A modular tray for an ampoule of a delivery system of solid precursor materials used in Atomic Layer Deposition (ALD) processes, Chemical Vapor Deposition (CVD) processes or both. The modular tray is configured with separate components which can enhance the ease of which the modular tray can be inserted into the ampoule, and the tray is configured to make improved contact with inner wall surfaces of the ampoule to provide improved heat transfer from the inner wall to the modular tray and ultimately to the solid precursor materials disposed on the modular tray.

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