公开(公告)号：US20190032206A1

公开(公告)日：2019-01-31

申请号：US16044861

申请日：2018-07-25

Applicant: Entegris, Inc.

Inventor： Jordan Hodges ,  Jacob Thomas

IPC: C23C16/448 ,  C23C16/455

Abstract: The invention is directed to a configurable vaporizer or ampoule assembly that uses a configurable vessel body, assembled from one or more support tray modules with their own individual heating assemblies or heater members, bounded by a base member and a lid member to form the whole ampoule. This eliminates the need for the prior art ampoule body that normally holds the support trays and was used to heat each of the support trays from the exterior surface using heating jackets or the like.

公开(公告)号：US09695985B2

公开(公告)日：2017-07-04

申请号：US14380646

申请日：2013-02-22

Applicant: ENTEGRIS, INC.

Inventor： Jordan Hodges ,  Richard D. Chism ,  Mitchell W. McFeron ,  Donald D. Ware ,  Glenn M. Tom

IPC: F17C9/00 ,  B67D7/02

CPC classification number: F17C9/00 ,  B67D7/00 ,  B67D7/02 ,  B67D7/025 ,  B67D7/0272 ,  B67D7/0283 ,  F17C7/00

Abstract: A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.

公开(公告)号：US10385452B2

公开(公告)日：2019-08-20

申请号：US14404633

申请日：2013-05-31

Applicant: Entegris, Inc.

Inventor： Bryan C. Hendrix ,  John N. Gregg ,  Scott L. Battle ,  Donn K. Naito ,  Kyle Bartosh ,  John M. Cleary ,  Sebum Cheon ,  Jordan Hodges

IPC: C23C16/44 ,  C23C16/458 ,  C23C16/448 ,  C23C16/455 ,  B01B1/00

Abstract: Systems, reagent support trays, particle suppression devices, and methods are disclosed. In one aspect, a system includes a vaporizer vessel having one or more interior walls enclosing an interior volume and a plurality of reagent support trays configured to be vertically stackable within the interior volume. Each of the plurality of reagent support trays is configured to be vertically stackable within the interior volume to form a stack of reagent support trays. One or more of the plurality of reagent support trays is configured to redirect a flow of a gas passing between adjacent reagent support trays in the stack of reagent support trays to cause the flow of gas to interact with the source reagent material in a particular reagent support tray before passing into a next of the plurality of reagent support trays in the stack of reagent support trays.

公开(公告)号：US20150191819A1

公开(公告)日：2015-07-09

申请号：US14404633

申请日：2013-05-31

Applicant: ENTEGRIS, INC.

Inventor： Bryan C. Hendrix ,  John N. Gregg ,  Scott L. Battle ,  Donn K. Naito ,  Kyle Bartosh ,  John M. Cleary ,  Sebum Cheon ,  Jordan Hodges

IPC: C23C16/458 ,  C23C16/455

CPC classification number: C23C16/458 ,  B01B1/005 ,  C23C16/4402 ,  C23C16/4481 ,  C23C16/455

Abstract: Systems, reagent support trays, particle suppression devices, and methods are disclosed. In one aspect, a system includes a vaporizer vessel having one or more interior walls enclosing an interior volume and a plurality of reagent support trays configured to be vertically stackable within the interior volume. Each of the plurality of reagent support trays is configured to be vertically stackable within the interior volume to form a stack of reagent support trays. One or more of the plurality of reagent support trays is configured to redirect a flow of a gas passing between adjacent reagent support trays in the stack of reagent support trays to cause the flow of gas to interact with the source reagent material in a particular reagent support tray before passing into a next of the plurality of reagent support trays in the stack of reagent support trays.

Abstract translation: 公开了系统，试剂支撑盘，粒子抑制装置和方法。 在一个方面，一种系统包括蒸发器容器，该蒸发器容器具有包围内部容积的一个或多个内壁和被配置为在内部容积内垂直堆叠的多个试剂支撑盘。 多个试剂支撑托盘中的每一个构造成在内部空间内可垂直堆叠以形成一堆试剂支撑托盘。 多个试剂支撑托盘中的一个或多个配置成将通过相邻的试剂支撑托盘之间的气体流引导到试剂托盘的堆叠中，以引起气体流与特定试剂载体中的源试剂材料相互作用 在进入试剂托盘堆叠中的多个试剂载体托盘中的下一个之前，托盘。

公开(公告)号：US11104993B2

公开(公告)日：2021-08-31

申请号：US16044861

申请日：2018-07-25

Applicant: Entegris, Inc.

Inventor： Jordan Hodges ,  Jacob Thomas

IPC: C23C16/448 ,  C23C16/455 ,  C23C16/08 ,  C23C16/18

Abstract: The invention is directed to a configurable vaporizer or ampoule assembly that uses a configurable vessel body, assembled from one or more support tray modules with their own individual heating assemblies or heater members, bounded by a base member and a lid member to form the whole ampoule. This eliminates the need for the prior art ampoule body that normally holds the support trays and was used to heat each of the support trays from the exterior surface using heating jackets or the like.