公开(公告)号：US6043468A

公开(公告)日：2000-03-28

申请号：US126847

申请日：1998-07-31

申请人： Eiichi Toya ,  Masahiko Ichishima ,  Tomio Konn ,  Tomohiro Nagata ,  Shigeru Yamamura ,  Norihiko Saito ,  Kouji Teraoka ,  Takeshi Inaba ,  Hiroyuki Honma ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Masahiko Ichishima ,  Tomio Konn ,  Tomohiro Nagata ,  Shigeru Yamamura ,  Norihiko Saito ,  Kouji Teraoka ,  Takeshi Inaba ,  Hiroyuki Honma ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： C30B15/14 ,  C30B35/00 ,  H05B3/44

CPC分类号： C30B35/00 ,  C30B15/14 ,  H05B2203/003

摘要： A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.

摘要翻译： 一种碳加热器，包括加热器构件（11,111,121,161,212,222,315,325,354,411,515,612），其中多个碳纤维束具有多个碳纤维， 捆扎的直径为5〜15μm被编织成纵向细长形状，例如线状或带状，杂质含量在灰分中小于10ppm。

公开(公告)号：US06515264B2

公开(公告)日：2003-02-04

申请号：US10170539

申请日：2002-06-14

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B310

CPC分类号： H05B3/0047 ,  H01L2924/0002 ,  H01L2924/00

摘要： A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

公开(公告)号：US06407371B1

公开(公告)日：2002-06-18

申请号：US09451868

申请日：1999-12-01

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B310

CPC分类号： H05B3/0047 ,  H01L2924/0002 ,  H01L2924/00

摘要： A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

公开(公告)号：US06204488B1

公开(公告)日：2001-03-20

申请号：US09450755

申请日：1999-11-30

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Sunao Seko ,  Hideyuki Yokoyama ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Sunao Seko ,  Hideyuki Yokoyama ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B300

CPC分类号： F27D99/0073 ,  F27D2099/0008 ,  H01L21/67098

摘要： A sealing terminal includes internal connection lines which are connected to heating elements and external connection lines via which power is supplied. A quartz glass body includes a plurality of grooves in its outer surface to retain the internal and external connection lines in place. Conductive foils are used to connect the internal and external lines which are housed in a quartz glass tube so that the ends of the lines project out of the respective ends thereof. A plug is disposed in the lower end of the tube to close the same. Spark generation is prevented while a low electrical resistance sealed terminal which is simple in structure and quick and easy to assemble, results.

摘要翻译： 密封端子包括连接到加热元件的内部连接线和通过其供电的外部连接线。 石英玻璃体在其外表面中包括多个凹槽，以将内部和外部连接线保持在适当位置。 导电箔用于连接容纳在石英玻璃管中的内部和外部线，使得线的端部突出到其相应的端部之外。 一个插头设置在管的下端以封闭它。 防止火花发生，而结构简单，易于组装的低电阻密封端子。

公开(公告)号：US07072578B2

公开(公告)日：2006-07-04

申请号：US11038283

申请日：2005-01-21

申请人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

发明人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

IPC分类号： H05B3/00

CPC分类号： H05B3/145 ,  H01L2924/0002 ,  H01L2924/00

摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

摘要翻译： 提供碳丝加热元件密封加热器。 其中，使用碳纤维的碳丝加热元件密封在石英玻璃构件中，其中碳线加热元件的吸收水量为2×10 -3 / cm 3 或更少。

公开(公告)号：US06885814B2

公开(公告)日：2005-04-26

申请号：US10395395

申请日：2003-03-25

申请人： Takanori Saito ,  Hiroshi Mori ,  Akira Otsu ,  Norihiko Saito ,  Hiroyuki Honma ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi ,  Sunao Seko

发明人： Takanori Saito ,  Hiroshi Mori ,  Akira Otsu ,  Norihiko Saito ,  Hiroyuki Honma ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi ,  Sunao Seko

IPC分类号： H01L23/34 ,  H05B3/14 ,  H05B3/00

CPC分类号： H05B3/145 ,  H01L2924/0002 ,  H01L2924/00

摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

公开(公告)号：US20050133494A1

公开(公告)日：2005-06-23

申请号：US11038283

申请日：2005-01-21

申请人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

发明人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

IPC分类号： H01L23/34 ,  H05B3/14 ,  H05B3/34

CPC分类号： H05B3/145 ,  H01L2924/0002 ,  H01L2924/00

摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

摘要翻译： 提供碳丝加热元件密封加热器。 其中，使用碳纤维的碳丝加热元件密封在石英玻璃构件中，其中碳线加热元件的吸收水量为2×10 -3 / cm 3 或更少。

公开(公告)号：US06584279B2

公开(公告)日：2003-06-24

申请号：US09864196

申请日：2001-05-25

申请人： Sunao Seko ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Hideyuki Yokoyama ,  Masakazu Kobayashi ,  Takanori Saito ,  Ken Nakao

发明人： Sunao Seko ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Hideyuki Yokoyama ,  Masakazu Kobayashi ,  Takanori Saito ,  Ken Nakao

IPC分类号： F26B330

CPC分类号： H01L21/67103 ,  H01L2924/0002 ,  H05B3/145 ,  H01L2924/00

摘要： A heater sealed with carbon wire heating element has a carbon wire heating element sealed with a quartz glass member, the carbon wire being prepared by knitting carbon single fibers into a knitted cord of a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and crystallite size Lc (002) thereof being 4.0 nm or more.

摘要翻译： 用碳丝加热元件密封的加热器具有用石英玻璃构件密封的碳线加热元件，碳线通过将碳单纤维编织成编织物的编织线制成，每根导线具有层间距为d的晶体结构 （002）为0.343以下，微晶尺寸Lc（002）为4.0nm以上。

公开(公告)号：US06516143B2

公开(公告)日：2003-02-04

申请号：US09819702

申请日：2001-03-29

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Takanori Saito ,  Kazutoshi Miura ,  Harunari Hasegawa ,  Joji Hoshi ,  Katsutoshi Ishii

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Takanori Saito ,  Kazutoshi Miura ,  Harunari Hasegawa ,  Joji Hoshi ,  Katsutoshi Ishii

IPC分类号： H05B302

CPC分类号： H05B3/44 ,  H05B3/42 ,  H05B3/46 ,  H05B2203/022

摘要： The fluid heating apparatus, in accordance with the present invention, developed to solve the technological problems described above is characterized by comprising at least a heating tube heating fluid to be supplied from fluid supply source, a heater section spirally formed on an outer periphery of the heating tube and a housing accommodating the heating tube and the heater section, wherein the heater section comprises a carbon wire heating element and a quartz glass tube in which the carbon wire heating element is enclosed.

公开(公告)号：US07479619B2

公开(公告)日：2009-01-20

申请号：US11487434

申请日：2006-07-17

申请人： Takanori Saito ,  Toshiyuki Makiya ,  Hisaei Osanai ,  Tsuyoshi Takizawa ,  Tomohisa Shimazu ,  Kazuhide Hasebe ,  Hiroyuki Yamamoto ,  Yukimasa Saito ,  Kenichi Yamaga

发明人： Takanori Saito ,  Toshiyuki Makiya ,  Hisaei Osanai ,  Tsuyoshi Takizawa ,  Tomohisa Shimazu ,  Kazuhide Hasebe ,  Hiroyuki Yamamoto ,  Yukimasa Saito ,  Kenichi Yamaga

IPC分类号： F27B5/14 ,  F27D11/00

CPC分类号： H01L21/67109 ,  H01L21/67098

摘要： The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a heating unit provided on an inside wall of the heating-furnace body; a reaction container consisting of a single tube contained in the heating-furnace body; a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container; and a first temperature controlling unit provided around the gas-discharging-pipe connecting portion.

摘要翻译： 本发明是一种热处理单元，包括：上端具有开口的加热炉体; 设置在所述加热炉体的内壁上的加热单元; 由包含在加热炉体内的单个管构成的反应容器; 形成在反应容器的上部的气体排出管连接部; 以及设置在气体排出管连接部周围的第一温度控制单元。