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14 条记录 (耗时 0.035 秒)

    Method of forming oxynitride film or the like and system for carrying out the same
    6.
    发明授权
    Method of forming oxynitride film or the like and system for carrying out the same 有权
    形成氮氧化物膜等的方法及其实施方法

    公开(公告)号：US06884295B2

    公开(公告)日：2005-04-26

    申请号：US09864374

    申请日：2001-05-25

    申请人： Katsutoshi Ishii ,  Kazutoshi Miura

    发明人： Katsutoshi Ishii ,  Kazutoshi Miura

    IPC分类号： H01L21/314 ,  H01L21/316 ,  H01L21/318 ,  C23C16/00

    CPC分类号： H01L21/0214 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/02211 ,  H01L21/02238 ,  H01L21/02249 ,  H01L21/02255 ,  H01L21/02271 ,  H01L21/3144 ,  H01L21/31662 ,  H01L21/3185

    摘要： This invention is an oxynitride film forming method including: a reaction chamber heating step of heating a reaction chamber to a predetermined temperature, the reaction chamber containing an object to be processed; a gas heating step of heating a process gas to a temperature not lower than a reaction temperature at which an oxynitride film can be formed, the process gas consisting of dinitrogen oxide gas; and a film forming step of forming an oxynitride film on the object to be processed by supplying the heated process gas into the heated processing chamber. The temperature to which the reaction chamber is heated in the reaction chamber heating step is set at a temperature below a temperature at which the process gas undergoes a reaction.

    摘要翻译： 本发明是一种氮氧化物膜形成方法，包括：将反应室加热到预定温度的反应室加热步骤，反应室包含待处理物体; 将处理气体加热到能够形成氮氧化物膜的反应温度以上的气体加热工序，由二氧化氮气体构成的工艺气体; 以及通过将加热的处理气体供给到加热处理室中而在被处理物上形成氮氧化物膜的成膜工序。 在反应室加热步骤中将反应室加热的温度设定在低于处理气体发生反应的温度的温度。

    Heat treatment system and method
    7.
    发明授权
    Heat treatment system and method 有权
    热处理系统及方法

    公开(公告)号：US06540509B2

    公开(公告)日：2003-04-01

    申请号：US09867564

    申请日：2001-05-31

    申请人： Takanobu Asano ,  Katsutoshi Ishii ,  Hiroyuki Yamamoto ,  George Hoshi ,  Kazutoshi Miura

    发明人： Takanobu Asano ,  Katsutoshi Ishii ,  Hiroyuki Yamamoto ,  George Hoshi ,  Kazutoshi Miura

    IPC分类号： F27B500

    CPC分类号： C23C16/45561 ,  C23C16/401 ,  C23C16/452 ,  C23C16/4557 ,  C30B33/005 ,  H01L21/67109

    摘要： The present invention relates generally to a heat treatment system and method for heat-treating an object to be treated. Particularly, the invention relates to a heat treatment system wherein an object to be treated is carried in a reaction vessel, which has been pressure-reduced to a predetermined degree of vacuum and the interior of which is heated to a predetermined process temperature, and a process gas is supplied into the reaction vessel via a gas feed passage to process the object.

    摘要翻译： 本发明一般涉及用于对待处理物体进行热处理的热处理系统和方法。 特别地，本发明涉及一种热处理系统，其中待处理物体被运送在反应容器中，该反应容器被减压至预定的真空度并将其内部加热到预定的工艺温度，并且 处理气体经由供气通道供给到反应容器中以处理物体。

    METHOD FOR CHARGING LITHIUM ION SECONDARY BATTERY
    9.
    发明申请
    METHOD FOR CHARGING LITHIUM ION SECONDARY BATTERY 审中-公开
    锂离子二次电池充电方法

    公开(公告)号：US20140191731A1

    公开(公告)日：2014-07-10

    申请号：US13821497

    申请日：2012-09-04

    申请人： Kazutoshi Miura

    发明人： Kazutoshi Miura

    IPC分类号： H02J7/00

    CPC分类号： H02J7/0052 ,  H01M4/134 ,  H01M10/44 ,  H02J7/0073 ,  H02J7/0091 ,  Y02B40/90 ,  Y02E70/40

    摘要： CCCV charging is applied to a lithium ion secondary battery. During CC charging, a transition point Ta appears in temperature rise gradient when battery temperature rises along with the charging, and with the transition point Ta being a border, a temperature rise gradient in an initial T1 period is steeper than a temperature rise gradient in a T2 period following the T1 period. Based on charging time tT corresponding to timing at which the transition point Ta appears after start of the CC charging from a condition of the SOC of 0%, changeover time ts is set in a range of tT≦ts≦(tT×1.2). The CC charging is performed at a first current value until changeover time tS elapses after its start, and after the changeover time ts elapses, the CC charging is performed with a second current value larger than the first current value.

    摘要翻译： 将CCCV充电应用于锂离子二次电池。 在CC充电期间，当电池温度随着充电而升高时，转变点Ta出现在温度升高梯度中，并且随着转变点Ta为边界，初始T1周期中的温度升高梯度比在 T1期后T2期。 基于从0％的SOC开始的CC充电开始之后出现转变点Ta的定时的充电时间tT，切换时间ts设定在tT＆lt; nlE; ts＆nlE;（tT×1.2）的范围内。 CC充电以第一电流值进行，直到开始后经过切换时间tS，经过转换时间ts之后，以大于第一电流值的第二电流值进行CC充电。

    Control device of neutral point clamped power inverter apparatus
    10.
    发明授权
    Control device of neutral point clamped power inverter apparatus 失效
    中性点钳式电力逆变装置控制装置

    公开(公告)号：US5274542A

    公开(公告)日：1993-12-28

    申请号：US841816

    申请日：1992-02-26

    申请人： Shigeru Tanaka ,  Kazutoshi Miura

    发明人： Shigeru Tanaka ,  Kazutoshi Miura

    IPC分类号： H02M1/08 ,  H02M7/06 ,  H02M7/12 ,  H02M7/48 ,  H02M7/521

    CPC分类号： H02M7/487

    摘要： A power inverter control device is designed to control a neutral point clamped power inverter apparatus including first to fourth self-extinction elements sequentially connected in series between two end terminals of a power supply having an intermediate terminal, four freewheeling diodes connected in parallel with the self-extinction elements in a direction opposite thereto, a series circuit of first and second clamping diodes, connected in parallel with a series circuit of the second and third self-extinction elements in a direction opposite thereto and having a node connected to the intermediate terminal of the power supply. The control device includes a circuit for generating a first PWM control signal having a pulse width corresponding to a load current, and a PWM control circuit for converting the first PWM control signal into a second PWM control signal having a pulse width equivalent to the sum of the pulse width of the first PWM control signal and a width corresponding to one of turn-on and turn-off periods of each of the self-extinction element, and supplying the second PWM control signal to the first to fourth self-extinction elements.

    摘要翻译： 电力逆变器控制装置被设计成控制中性点钳位功率逆变器装置，其包括顺序地串联连接在具有中间端子的电源的两个端子之间的第一至第四自消除元件，与自身并联连接的四个续流二极管 在与其相反的方向上的消光元件，第一和第二钳位二极管的串联电路，与第二和第三自消除元件的串联电路在与其相反的方向并联连接，并且具有连接到第二和第二钳位二极管的中间端子的节点 电源。 该控制装置包括用于产生具有对应于负载电流的脉冲宽度的第一PWM控制信号的电路，以及PWM控制电路，用于将第一PWM控制信号转换成具有等于 第一PWM控制信号的脉冲宽度和对应于每个自消除元件的导通和关断周期之一的宽度，并将第二PWM控制信号提供给第一至第四自消光元件。