公开(公告)号：US07072578B2

公开(公告)日：2006-07-04

申请号：US11038283

申请日：2005-01-21

申请人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

发明人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

IPC分类号： H05B3/00

CPC分类号： H05B3/145 ,  H01L2924/0002 ,  H01L2924/00

摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

摘要翻译： 提供碳丝加热元件密封加热器。 其中，使用碳纤维的碳丝加热元件密封在石英玻璃构件中，其中碳线加热元件的吸收水量为2×10 -3 / cm 3 或更少。

公开(公告)号：US20050133494A1

公开(公告)日：2005-06-23

申请号：US11038283

申请日：2005-01-21

申请人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

发明人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

IPC分类号： H01L23/34 ,  H05B3/14 ,  H05B3/34

CPC分类号： H05B3/145 ,  H01L2924/0002 ,  H01L2924/00

摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

摘要翻译： 提供碳丝加热元件密封加热器。 其中，使用碳纤维的碳丝加热元件密封在石英玻璃构件中，其中碳线加热元件的吸收水量为2×10 -3 / cm 3 或更少。

公开(公告)号：US06885814B2

公开(公告)日：2005-04-26

申请号：US10395395

申请日：2003-03-25

申请人： Takanori Saito ,  Hiroshi Mori ,  Akira Otsu ,  Norihiko Saito ,  Hiroyuki Honma ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi ,  Sunao Seko

发明人： Takanori Saito ,  Hiroshi Mori ,  Akira Otsu ,  Norihiko Saito ,  Hiroyuki Honma ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi ,  Sunao Seko

IPC分类号： H01L23/34 ,  H05B3/14 ,  H05B3/00

CPC分类号： H05B3/145 ,  H01L2924/0002 ,  H01L2924/00

摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

公开(公告)号：US06516143B2

公开(公告)日：2003-02-04

申请号：US09819702

申请日：2001-03-29

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Takanori Saito ,  Kazutoshi Miura ,  Harunari Hasegawa ,  Joji Hoshi ,  Katsutoshi Ishii

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Takanori Saito ,  Kazutoshi Miura ,  Harunari Hasegawa ,  Joji Hoshi ,  Katsutoshi Ishii

IPC分类号： H05B302

CPC分类号： H05B3/44 ,  H05B3/42 ,  H05B3/46 ,  H05B2203/022

摘要： The fluid heating apparatus, in accordance with the present invention, developed to solve the technological problems described above is characterized by comprising at least a heating tube heating fluid to be supplied from fluid supply source, a heater section spirally formed on an outer periphery of the heating tube and a housing accommodating the heating tube and the heater section, wherein the heater section comprises a carbon wire heating element and a quartz glass tube in which the carbon wire heating element is enclosed.

公开(公告)号：US06204488B1

公开(公告)日：2001-03-20

申请号：US09450755

申请日：1999-11-30

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Sunao Seko ,  Hideyuki Yokoyama ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Sunao Seko ,  Hideyuki Yokoyama ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B300

CPC分类号： F27D99/0073 ,  F27D2099/0008 ,  H01L21/67098

摘要： A sealing terminal includes internal connection lines which are connected to heating elements and external connection lines via which power is supplied. A quartz glass body includes a plurality of grooves in its outer surface to retain the internal and external connection lines in place. Conductive foils are used to connect the internal and external lines which are housed in a quartz glass tube so that the ends of the lines project out of the respective ends thereof. A plug is disposed in the lower end of the tube to close the same. Spark generation is prevented while a low electrical resistance sealed terminal which is simple in structure and quick and easy to assemble, results.

摘要翻译： 密封端子包括连接到加热元件的内部连接线和通过其供电的外部连接线。 石英玻璃体在其外表面中包括多个凹槽，以将内部和外部连接线保持在适当位置。 导电箔用于连接容纳在石英玻璃管中的内部和外部线，使得线的端部突出到其相应的端部之外。 一个插头设置在管的下端以封闭它。 防止火花发生，而结构简单，易于组装的低电阻密封端子。

公开(公告)号：US6043468A

公开(公告)日：2000-03-28

申请号：US126847

申请日：1998-07-31

申请人： Eiichi Toya ,  Masahiko Ichishima ,  Tomio Konn ,  Tomohiro Nagata ,  Shigeru Yamamura ,  Norihiko Saito ,  Kouji Teraoka ,  Takeshi Inaba ,  Hiroyuki Honma ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Masahiko Ichishima ,  Tomio Konn ,  Tomohiro Nagata ,  Shigeru Yamamura ,  Norihiko Saito ,  Kouji Teraoka ,  Takeshi Inaba ,  Hiroyuki Honma ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： C30B15/14 ,  C30B35/00 ,  H05B3/44

CPC分类号： C30B35/00 ,  C30B15/14 ,  H05B2203/003

摘要： A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.

摘要翻译： 一种碳加热器，包括加热器构件（11,111,121,161,212,222,315,325,354,411,515,612），其中多个碳纤维束具有多个碳纤维， 捆扎的直径为5〜15μm被编织成纵向细长形状，例如线状或带状，杂质含量在灰分中小于10ppm。

公开(公告)号：US06407371B1

公开(公告)日：2002-06-18

申请号：US09451868

申请日：1999-12-01

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B310

CPC分类号： H05B3/0047 ,  H01L2924/0002 ,  H01L2924/00

摘要： A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

公开(公告)号：US06515264B2

公开(公告)日：2003-02-04

申请号：US10170539

申请日：2002-06-14

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B310

CPC分类号： H05B3/0047 ,  H01L2924/0002 ,  H01L2924/00

摘要： A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

公开(公告)号：US06961516B2

公开(公告)日：2005-11-01

申请号：US10811822

申请日：2004-03-30

申请人： Eiichi Toya ,  Tomio Konn

发明人： Eiichi Toya ,  Tomio Konn

IPC分类号： F01N3/24 ,  A61M11/04 ,  A61M16/10 ,  F22B29/06

CPC分类号： A61M16/109 ,  A61M11/042 ,  A61M16/1075

摘要： A steam generating apparatus includes: a liquid tank portion 1 for storing a liquid; an evaporator portion 2 which is directly connected to the liquid tank portion, heats the liquid supplied from the liquid tank portion, and generates steam; a steam storage portion 3 which is directly connected to the evaporator portion, and stores the steam generated by the evaporator portion; a passageway 4 which is directly connected to the steam storage portion and outwardly passes the generated steam; a liquid pathway 10b which is connected to the liquid tank portion, and supplies the liquid; and a heater unit 20 which is provided on one side of the evaporator portion, and heats at least the evaporator portion. The liquid tank portion 1, the evaporator portion 2, the steam storage portion 3, the passageway 4, and the liquid pathway 10b are formed within an integral member of a translucent material.

摘要翻译： 蒸汽发生装置包括：用于储存液体的液体罐部分1; 蒸发器部分2直接连接到液罐部分，加热从液罐部分供应的液体，并产生蒸汽; 蒸汽存储部3，其直接连接到蒸发器部分，并且存储由蒸发器部分产生的蒸汽; 通道4，其直接连接到蒸汽存储部分并向外通过产生的蒸汽; 液体通道10b，其连接到液体罐部分，并供应液体; 以及加热器单元20，其设置在蒸发器部分的一侧，并且至少加热蒸发器部分。 液体罐部分1，蒸发器部分2，蒸汽存储部分3，通道4和液体通道10b形成在半透明材料的整体构件内。

公开(公告)号：US5449545A

公开(公告)日：1995-09-12

申请号：US006856

申请日：1993-01-21

申请人： Eiichi Toya ,  Yukio Itoh ,  Takashi Tanaka ,  Yasumi Sasaki

发明人： Eiichi Toya ,  Yukio Itoh ,  Takashi Tanaka ,  Yasumi Sasaki

IPC分类号： G03F1/22 ,  G03F1/60 ,  H01L21/027 ,  G03F9/00

CPC分类号： G03F1/22 ,  Y10T428/24322 ,  Y10T428/24331 ,  Y10T428/24355 ,  Y10T428/24917 ,  Y10T428/265 ,  Y10T428/30

摘要： A ceramic device is disclosed that has a silicon base plate, a first ceramic film formed on a first surface of the silicon base plate, a second ceramic film formed on a second surface of the silicon base plate opposite to the first surface, and an operation opening formed in the silicon base plate between the first and second surfaces. A surface portion of the first ceramic film exposed to the operation opening Is a mirror surface having 0.05 micrometers or less of center line average height Ra. A mirror surface keeping film can be formed between the first surface of the silicon base plate and the first ceramic film for keeping a mirror surface in an etching step to etch the silicon base plate, and the silicon base plate can be reduced partially in the etching step for forming an operation opening thereby exposing a corresponding portion of the mirror surface keeping film to the operation opening.

摘要翻译： 公开了一种陶瓷器件，其具有硅基板，形成在硅基板的第一表面上的第一陶瓷膜，形成在与第一表面相对的硅基板的第二表面上的第二陶瓷膜，以及操作 开口形成在第一和第二表面之间的硅基板中。 暴露于操作开口的第一陶瓷膜的表面部分是具有0.05微米或更小的中心线平均高度Ra的镜面。 在蚀刻步骤中，在硅基板的第一表面和第一陶瓷膜之间可以形成镜面保持膜，用于在蚀刻步骤中保持镜面，以蚀刻硅基板，并且可以在蚀刻中部分地减少硅基板 用于形成操作开口的步骤，从而将镜面保持膜的相应部分暴露于操作开口。