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    RETICLE POD
    1.
    发明申请
    RETICLE POD 有权

    公开(公告)号：US20140183076A1

    公开(公告)日：2014-07-03

    申请号：US14139653

    申请日：2013-12-23

    Applicant: Entegris, Inc.

    Inventor： Steven P. Kolbow ,  Kevin McMullen ,  Anthony M. Tieben ,  Matthew Kusz ,  David L. Halbmaier ,  John Lystad

    IPC: B65D85/48

    CPC classification number: B65D85/48 ,  G03F1/66 ,  H01L21/67353 ,  H01L21/67359 ,  H01L21/67383 ,  H01L21/67386

    Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.

    Abstract translation: 一个双重安全壳，具有一个外舱和一个提供支撑结构和环境控制装置的内舱。 内部容器包括具有平坦的抛光表面的基部，该表面具有突出部，所述掩模版位于所述底部上并且在所述掩模版和抛光表面之间提供间隙。 该间隙将掩模版与基底的平坦抛光表面分开，并且其尺寸被设计成抑制颗粒迁移到间隙中，从而防止晶片或掩模版的敏感表面的污染。 内部容器的顶盖位于靠近基座周边的抛光表面上。 内部容器的顶盖上的可移动的标线接合销与外部容器的顶盖接合，当内部容器组装在外部容器内部时，提供掩模版限制。

    LARGE FORMAT RETICLE CONTAINER
    3.
    发明申请
    LARGE FORMAT RETICLE CONTAINER 有权

    公开(公告)号：US20250108972A1

    公开(公告)日：2025-04-03

    申请号：US18900607

    申请日：2024-09-27

    Applicant: ENTEGRIS, INC.

    Inventor： Huaping Wang ,  Anthony M. Tieben ,  Russ V. Raschke ,  Brian Wiseman ,  Tyler Monforton

    IPC: B65D85/68 ,  B65D25/10 ,  B65D77/04

    Abstract: A substrate container is provided including an inner pod configured to accommodate a large format reticle, and an outer pod configured to contain and secure the inner pod. The inner pod can be clamped together using a clip or features provided on the outer pod. Features of the outer pod that can clamp the inner pod include flanges, grooves, angled clamping surfaces, other clamping features, or clamping mechanisms. Clamping mechanisms can be actuated by physical, electrical, and/or magnetic features, such as placement of a door in an opening of a shell, operation of a door latch, or interaction of a tool to release the clamping mechanism using mechanical, electrical, and/or magnetic force.

    Reticle pod
    4.
    发明授权
    Reticle pod 有权

    公开(公告)号：US09745119B2

    公开(公告)日：2017-08-29

    申请号：US14139653

    申请日：2013-12-23

    Applicant: Entegris, Inc.

    Inventor： Steven P. Kolbow ,  Kevin McMullen ,  Anthony M. Tieben ,  Matthew Kusz ,  David L. Halbmaier ,  John Lystad

    IPC: B65D85/48 ,  G03F1/66 ,  H01L21/673

    CPC classification number: B65D85/48 ,  G03F1/66 ,  H01L21/67353 ,  H01L21/67359 ,  H01L21/67383 ,  H01L21/67386

    Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.

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