公开(公告)号：US20150041359A1

公开(公告)日：2015-02-12

申请号：US14281222

申请日：2014-05-19

Applicant: Entegris, Inc.

Inventor： Anthony Mathius Tieben ,  John Lystad ,  David L. Halbmaier

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673

CPC classification number: H01L21/67017 ,  H01L21/67126 ,  H01L21/67379 ,  H01L21/67389 ,  H01L21/67393 ,  H01L21/67769

Abstract: A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.

Abstract translation: 衬底容器包括外壳和形成在外壳中的进入结构，并且通过外壳提供流体进入到基底容器的内部。 进入结构包括开口和内表面。 索环位于接近结构的内表面上。

公开(公告)号：US20180277409A1

公开(公告)日：2018-09-27

申请号：US15765076

申请日：2016-09-12

Applicant: Entegris, Inc.

Inventor： Anthony Mathius Tieben ,  Christopher Strickhouser

IPC: H01L21/673

Abstract: A substrate container with a substrate retainer mounted to a biased actuation linkage, and a door assembly with latch assist. Various configurations for biasing the substrate retainer in a substrate non-engagement position are disclosed. The biasing helps prevent the substrate retainer from hanging up due to friction that might otherwise counter the gravitational force that is otherwise relied upon for disengagement. The assembly may also include retention clips that positively secure the substrate retainer to the actuation linkage. The latch assist provides springs that deliver stored energy to assist in latching and unlatching the door assembly from the substrate carrier. The latch assist further provides off-center forces that bias the latching mechanism in either an unlatched or a fully latched configuration.

公开(公告)号：US20230202743A1

公开(公告)日：2023-06-29

申请号：US18090714

申请日：2022-12-29

Applicant: ENTEGRIS, INC.

Inventor： Anthony Mathius Tieben ,  Philip Stuart Glynn ,  Russ V. Raschke

IPC: B65D85/48 ,  B65D6/00 ,  B65B5/04

CPC classification number: B65D85/48 ,  B65D11/10 ,  B65B5/04

Abstract: Shipping containers for covers or baseplates of reticle pods include a first shell including first fixing features and a second shell including second fixing features. When the first shell and the second shell are joined, the shells define an internal space capable of accommodating a cover or a baseplate of a reticle pod, and the fixing features engage the cover or baseplate to prevent movement of the cover or baseplate in directions in plane with the first or second shells. The fixing features can be such that there are both rigid and elastic fixing features contacting the cover or baseplate. A method of storing a cover or baseplate can include placing the cover or baseplate between first and second shells and joining the first and second shells to one another.

公开(公告)号：US10784135B2

公开(公告)日：2020-09-22

申请号：US15765076

申请日：2016-09-12

Applicant: Entegris, Inc.

Inventor： Anthony Mathius Tieben ,  Christopher Strickhouser

IPC: H01L21/673

Abstract: A substrate container with a substrate retainer mounted to a biased actuation linkage, and a door assembly with latch assist. Various configurations for biasing the substrate retainer in a substrate non-engagement position are disclosed. The biasing helps prevent the substrate retainer from hanging up due to friction that might otherwise counter the gravitational force that is otherwise relied upon for disengagement. The assembly may also include retention clips that positively secure the substrate retainer to the actuation linkage. The latch assist provides springs that deliver stored energy to assist in latching and unlatching the door assembly from the substrate carrier. The latch assist further provides off-center forces that bias the latching mechanism in either an unlatched or a fully latched configuration.