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1.发明授权
公开(公告)号：US4551157A
公开(公告)日：1985-11-05
申请号：US470287
申请日：1983-02-28
申请人： Erwin Becker , Wolfgang Ehrfeld , Wolfgang Fritz , Harald Steinhaus , Peter Bley
发明人： Erwin Becker , Wolfgang Ehrfeld , Wolfgang Fritz , Harald Steinhaus , Peter Bley
摘要： A process for the separation of light additive gas at the end of and/or at the location of the change in stage sizes in a separating nozzle cascade which is operated with a mixture of gaseous or vaporous substances to be separated. The separation of the light additive gas is effected by using a separating nozzle stage. A double deflection separating nozzle is employed as the separating nozzle stage.
摘要翻译： 在分离喷嘴级联中在阶段尺寸变化的末端和/或位置处分离轻添加剂气体的方法，分离喷嘴级联用待分离的气态或蒸气物质的混合物操作。 轻质添加气体的分离通过使用分离喷嘴级进行。 采用双偏转分离喷嘴作为分离喷嘴级。
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2.发明授权
公开(公告)号：US4246007A
公开(公告)日：1981-01-20
申请号：US967711
申请日：1978-12-06
摘要： In order to separate gaseous or vaporous substances having different molecular weights and/or different gas kinetically effective cross sections, by conducting the mixture to be separated together with a lighter additive gas into a separating chamber through two slit-shaped nozzles to form, in the chamber, two jets which are directed toward, and deflect, one another, the flow lines of each jet converging in the flow direction, dividing the thus deflected jets by means of separating baffles into partial streams of respectively different compositions, and discharging the partial streams separately from the chamber.
摘要翻译： 为了分离具有不同分子量和/或不同气体动力学有效横截面的气态或气态物质，通过将混合物与更轻的添加剂气体一起通过两个狭缝形喷嘴进入分离室，形成在 腔室，两个引导和彼此偏转的两个射流，每个射流的流动线在流动方向上会聚，通过将挡板分离成分别为不同组成的部分流分离由此偏转的射流，并且将部分流 与房间分开。
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公开(公告)号：US4541977A
公开(公告)日：1985-09-17
申请号：US470281
申请日：1983-02-28
CPC分类号： B01D59/18 , Y10S264/48
摘要： Method for producing a separating nozzle element including a separating body and terminal plates, for the separation of a gaseous or vaporous mixture, wherein the separating body comprises separating structures which penetrate the separating body and define separating chambers and gas conduits, and the terminal plates are provided with channels for the intake and discharge of gas streams. A mold layer is produced which contains negative outlines of the separating structures. Thereafter, the negative outlines of the mold layer are filled with a structure material which is compatible with the gaseous or vaporous mixture to be separated to form the separating structures. The mold layer containing the negative outlines of the separating structure is produced by shaping the mold layer from a reusable tool provided with the positive outlines of the separating structures.
摘要翻译： 一种分离喷嘴元件的制造方法，包括分离体和端板，用于分离气态或气态混合物，其中分离体包括分离结构，其穿透分离体并限定分离室和气体管道，并且端子板是 提供了用于进气和排放气体的通道。 产生包含分离结构的负轮廓的模具层。 此后，模具层的负轮廓填充有与待分离的气态或蒸汽混合物相容的结构材料以形成分离结构。 包含分离结构的负轮廓的模具层通过从设置有分离结构的正轮廓的可重复使用的工具成形模制层而产生。
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公开(公告)号：US4705605A
公开(公告)日：1987-11-10
申请号：US863989
申请日：1986-05-16
申请人： Erwin Becker , Wolfgang Ehrfeld , Peter Hagmann
发明人： Erwin Becker , Wolfgang Ehrfeld , Peter Hagmann
摘要： A spinning nozzle plate having nozzle capillaries is produced by depositing a layer 11 of a material whose characteristics can be changed by high-energy radiation (resist material) on a galvanic electrode 12. After resist layer 11 is irradiated in a predetermined pattern and after resist material is selectively removed by a treatment which utilizes the different material characteristics resulting from the irradiation, columns of resist material remain on galvanic electrode 12 to serve as negatives 21 of the nozzle capillaries. A galvanic layer 31 which encloses the negatives 21 of the nozzle capillaries is then produced on the galvanic electrode 12. Then the galvanic layer 31 is levelled and the negatives 21 are removed, as is the galvanic electrode 12. The process is particularly useful for producing spinning nozzle plates having nozzle capillaries with profiles of a special shape, essentially if the cross-sectional dimensions of the nozzle capillaries are small.
摘要翻译： 具有喷嘴毛细管的纺丝喷嘴板通过在电极12上沉积特性可以通过高能量辐射（抗蚀剂材料）改变的材料的层11而制造。在抗蚀剂层11以预定图案和抗蚀剂 通过利用由照射产生的不同材料特性的处理选择性地除去材料，抗蚀剂材料柱保留在电极12上，用作喷嘴毛细管的负片21。 然后在电极12上产生包围喷嘴毛细管的底片21的电镀层31.然后，电镀层31被平整并且去除电极电极12上的底片21.该方法特别适用于生产 旋转喷嘴板具有具有特殊形状轮廓的喷嘴毛细管，基本上如果喷嘴毛细管的横截面尺寸较小。
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5.发明授权Method for producing separating nozzle elements for the separation of fluid mixtures 失效用于分离流体混合物的分离喷嘴元件的制造方法
公开(公告)号：US4493753A
公开(公告)日：1985-01-15
申请号：US502721
申请日：1983-06-09
CPC分类号： B01D59/18 , Y10S205/918
摘要： A separating nozzle element composed of a separating body and two cover plates between which the body is interposed, the nozzle element being used for the separation of gaseous or vaporous mixtures, is produced by providing a layer of a material whose ability to be removed from the layer can be altered by irradiation, the thickness of the layer being approximately equal to the thickness of the separating body, irradiating the layer, starting at one surface, with radiation which has a penetration depth into the material of the layer which is less than the thickness of the layer, in a pattern corresponding to the cross section of the separating body structure, and removing from the layer material which is more easily removable as a result of the irradiation, to thereby permit the radiation to penetrate to greater distances from the one surface, while continuing the removal of material until the entire thickness of the layer has been subjected to radiation and removal, to form a mold of the separating body. The mold is then filled with material constituting the separating body, whereafter the mold is removed.
摘要翻译： 分离喷嘴元件由分离体和两个盖板组成，主体之间插入有用于分离气态或蒸气混合物的喷嘴元件，其通过提供一层能从中除去的能力的材料 层的厚度可以通过照射改变，层的厚度近似等于分离体的厚度，从一个表面开始照射层，其中具有穿入深度的层的材料的辐射小于 以对应于分离体结构的横截面的图案的层的厚度，以及从层中去除由于照射而更容易移除的层材料，从而允许辐射穿透到距离一个的更远的距离 表面，同时继续去除材料，直到层的整个厚度已经经受辐射和去除，以形成t的模具 他分离身体。 然后用构成分离体的材料填充模具，之后去除模具。
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6.发明授权
公开(公告)号：US4235606A
公开(公告)日：1980-11-25
申请号：US004217
申请日：1979-01-17
IPC分类号： B01D59/18
CPC分类号： B01D59/18
摘要： In a method for separating a gaseous or vaporous mixture into components having different molecular weights and/or different gas kinetically effective cross sections by conducting the mixture through a nozzle into a separating chamber and deflecting the mixture in the chamber by mutual jet deflection, dividing the deflected mixture into partial streams having respectively different compositions by means of at least one separating baffle which protrudes into the mixture flow path, and separately removing the partial streams, the mixture is conducted through the nozzle by being distributed substantially uniformly around the axis of the separating chamber by being fed into the chamber from all sides thereof in radial directions along a plane, and the partial streams are removed by causing at least the lightest partial stream to flow radially out of the separating chamber substantially uniformly around the axis of the separating chamber and in a plane approximately parallel with the plane along which the mixture is fed into the separating chamber. Apparatus for performing the method is composed of four aligned discs provided with mutually aligned bores delimiting the separating chamber, the two interior discs delimiting the nozzle and the two exterior discs defining separating baffles.
摘要翻译： 在通过将混合物通过喷嘴引入分离室并通过相互喷射偏转使混合物偏转的方法中，将气态或气态混合物分离成具有不同分子量和/或不同气体动力学有效横截面的组分的方法， 通过突出到混合物流动路径中的至少一个分离挡板将偏转混合物分成具有分别不同组成的部分流，并且分离地除去部分气流，通过基本上均匀地分布在分离器的轴线 通过沿着平面在径向方向从其所有侧面进入室中，并且通过使至少最轻的部分流基本上均匀地围绕分离室的轴线从分离室径向流出而将部分流除去，并且 在与平面大致平行的平面内 混合物沿着该混合物送入分离室。 用于执行该方法的装置由四个对准的盘组成，四个对准盘设置有限定分隔室的相互对准的孔，限定喷嘴的两个内部盘和限定分离挡板的两个外部盘。
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公开(公告)号：US4693791A
公开(公告)日：1987-09-15
申请号：US863987
申请日：1986-05-16
申请人： Erwin Becker , Wolfgang Ehrfeld , Peter Hagmann
发明人： Erwin Becker , Wolfgang Ehrfeld , Peter Hagmann
摘要： A method for producing spinning nozzle plates having spinning nozzle channels employs a mold plate which contains mold channels corresponding to the spinning nozzle channels. The mold plate is initially connected with a galvanic electrode containing feed channels which communicate with the mold channels. Then negatives of the spinning nozzle channels are produced by filling the mold channels and the feed channels with an electrically insulating molding material and thereafter removing the mold plate, so that columns of molding material remain connected to the galvanic electrode. Finally, a galvanic layer enclosing the negatives of the spinning nozzle channels is produced, the galvanic layer is leveled, and the negatives as well as the remaining mold material are removed. The mold plate itself may be produced by depositing a layer of resist material on a further galvanic electrode, irradiating the resist layer in a predetermined pattern using high energy radiation, selectively removing portions of the irradiated resist layer to produce negatives that are connected to the further galvanic electrode, depositing a further galvanic layer, and removing the negatives. These techniques permit economical production of spinning nozzle plates, particularly plates having nozzle capillaries with specially shaped cross sections and small critical dimensions.
摘要翻译： 用于制造具有纺丝喷嘴通道的纺丝喷嘴板的方法采用包含与纺丝喷嘴通道对应的模具通道的模板。 模板最初与包含与模具通道连通的进料通道的电极电极连接。 然后通过用电绝缘模塑材料填充模具通道和进料通道，然后除去模具板，从而使成型材料柱保持连接到电极电极，从而制造纺丝喷嘴通道的底片。 最后，产生包围纺丝喷嘴通道的负片的电镀层，电镀层被平整，并且去除底片以及剩余的模具材料。 模板本身可以通过在另外的电流电极上沉积抗蚀剂材料层来制造，使用高能量辐射以预定图案照射抗蚀剂层，选择性地去除被照射的抗蚀剂层的部分以产生与另外的电极连接的负片 电镀电极，沉积另外的电偶层，并除去负片。 这些技术允许经济地生产纺丝喷嘴板，特别是具有具有特殊形状横截面和小临界尺寸的喷嘴毛细管的板。
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8.发明授权
公开(公告)号：US4661212A
公开(公告)日：1987-04-28
申请号：US903304
申请日：1986-09-03
CPC分类号： B81C99/008 , C25D1/10 , B81C2201/0128 , B81C2201/032 , B81C2201/034
摘要： In order to produce a plurality of plate shaped metal bodies containing a microstructure from a single molding tool constituting a master for the bodies, a negative mold is formed by filling the recesses in the microstructure of the tool with electrically insulating material and fastening to the insulating material an electrically conductive material which contacts the end faces of the microstructure of the tool.
摘要翻译： 为了从构成主体的主体的单个模具中生产包含微结构的多个板状金属体，通过用电绝缘材料填充工具的微观结构中的凹部并将其紧固到绝缘体上而形成负模具 材料是与工具的微结构的端面接触的导电材料。
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公开(公告)号：US4563251A
公开(公告)日：1986-01-07
申请号：US708842
申请日：1985-03-06
申请人： Erwin Becker , Wolfgang Ehrfeld , Frank Becker
发明人： Erwin Becker , Wolfgang Ehrfeld , Frank Becker
CPC分类号： H01J43/246 , H01J9/125 , H01J2201/32
摘要： A method for producing a multichannel plate containing metal dynodes and having a plurality of generally parallel channels for use in structures for amplifying or converting optical images or other two-dimensional signal patterns by secondary electron multiplication, which method includes:producing a negative mold of the plate by:(i) providing a body having at least the thickness of the plate to be produced and made of an electrically insulating material whose ability to be removed from the body is altered by exposure to a selected radiation;(ii) irradiating the body with the selected radiation in a pattern corresponding to the plate to be produced and in a manner to render portions of the body having the form of a grid surrounding the channels more easily removable than the remaining portions of the body; and(iii) removing the more easily removable portions of the body to leave columnar structures corresponding to the channels in the plate;depositing metal layers and intermediate layers alternatingly in the openings in the negative mold or in a secondary negative mold produced therefrom, the metal layers being deposited electrolytically and forming dynodes which are spaced apart in the direction of the channels; andremoving the negative mold from the deposited layers.
摘要翻译： 一种制造含有金属倍增电极并具有多个大体上平行的通道的多通道板的方法，用于通过二次电子倍增放大或转换光学图像或其它二维信号图案的结构，该方法包括： 通过以下方式提供：（i）提供具有至少要制造的板的厚度并且由电绝缘材料制成的主体，其能够通过暴露于所选择的辐射而从身体移除的能力被改变; （ii）以对应于要产生的板的图案照射具有所选择的辐射的身体，并且以使得围绕通道的格栅形式的身体的部分比身体的其余部分更容易拆除的方式照射身体; 和（iii）去除更容易拆卸的本体的部分以留下对应于板中通道的柱状结构; 在负模具中的开口或由其制造的次级负模具中交替地沉积金属层和中间层，金属层被电解沉积并形成在通道的方向上间隔开的倍增电极; 并从沉积层去除负模具。
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公开(公告)号：US4563250A
公开(公告)日：1986-01-07
申请号：US708841
申请日：1985-03-06
申请人： Erwin Becker , Wolfgang Ehrfeld
发明人： Erwin Becker , Wolfgang Ehrfeld
CPC分类号： H01J43/246 , H01J9/125 , H01J2201/32
摘要： A method for producing a multichannel plate containing a plurality of generally parallel channels for use in structures for amplifying or converting optical images or other two-dimensional signal patterns by secondary electron multiplication, which method includes:producing a positive mold of the plate, by the steps of: (i) providing a body having the external shape of the plate to be produced and made of a material whose ability to be removed from the body is altered by exposure to a selected radiation; (ii) irradiating the body with the selected radiation in a pattern corresponding to the plate to be produced and in a manner to render the portions of the body corresponding to the channels more easily removable than the remaining portions of the body; and (iii) removing the more easily removable portions of the body;forming a metal negative mold, by the steps of: (i) attaching the positive mold to a metal electrode; (ii) electrolytically depositing metal on the electrode and in the openings created in the positive mold by said step of removing more easily removable portions; and (iii) removing the positive mold from the deposited metal; andforming the multichannel plate from the negative mold.
摘要翻译： 一种用于制造多通道板的方法，所述多通道板包含多个大致平行的通道，用于通过二次电子倍增放大或转换光学图像或其它二维信号图案的结构，该方法包括：通过 步骤：（i）提供具有待生产的板的外部形状的主体，并且由通过暴露于所选择的辐射而改变其从身体移除的能力的材料制成; （ii）以对应于要产生的板的图案照射具有所选择的辐射的身体，并以使身体对应于通道的部分比身体的其余部分更容易拆除的方式; 和（iii）去除身体更容易拆卸的部分; 通过以下步骤形成金属阴模：（i）将正模附接到金属电极; （ii）通过去除更容易拆卸的部分的步骤在电极上和在正模中产生的开口中电解沉积金属; 和（iii）从沉积的金属中去除正模; 并从阴模模制多孔板。
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