公开(公告)号：US10283317B2

公开(公告)日：2019-05-07

申请号：US15595773

申请日：2017-05-15

Applicant: FEI Company

Inventor： Paul Keady ,  Brennan Peterson ,  Guus Das ,  Craig Matthew Henry ,  Larry Dworkin ,  Jeff Blackwood ,  Stacey Stone ,  Michael Schmidt

IPC: C23C14/34 ,  H01J37/305 ,  C23C14/58 ,  C23F1/02 ,  H01J37/28 ,  G01N1/32 ,  H01J37/30 ,  H01J37/20

Abstract: A method for TEM sample preparation and analysis that can be used in a FIB-SEM system without re-welds, unloads, user handling of the lamella, or a motorized flip stage. The method allows a dual beam FIB-SEM system with a typical tilt stage to be used to extract a sample to from a substrate, mount the sample onto a TEM sample holder capable of tilting, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to an electron column for STEM imaging.

公开(公告)号：US20170250055A1

公开(公告)日：2017-08-31

申请号：US15595773

申请日：2017-05-15

Applicant: FEI Company

Inventor： Paul Keady ,  Brennan Peterson ,  Guus Das ,  Craig Matthew Henry ,  Larry Dworkin ,  Jeff Blackwood ,  Stacey Stone ,  Michael Schmidt

IPC: H01J37/305 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/3056 ,  C23C14/5833 ,  C23F1/02 ,  G01N1/32 ,  H01J37/20 ,  H01J37/28 ,  H01J37/3005 ,  H01J2237/024 ,  H01J2237/20207 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method for TEM sample preparation and analysis that can be used in a FIB-SEM system without re-welds, unloads, user handling of the lamella, or a motorized flip stage. The method allows a dual beam FIB-SEM system with a typical tilt stage to be used to extract a sample to from a substrate, mount the sample onto a TEM sample holder capable of tilting, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to an electron column for STEM imaging.