公开(公告)号：US20170327951A1

公开(公告)日：2017-11-16

申请号：US15188862

申请日：2016-06-21

Applicant: FEI Company

Inventor： Mehran Kianinia ,  Olga Shimoni ,  Igor Aharonovich ,  Charlene Lobo ,  Milos Toth ,  Steven Randolph ,  Clive D. Chandler

IPC: C23C16/48 ,  C23C16/56

CPC classification number: C23C16/487 ,  B82Y40/00 ,  C23C16/56 ,  G01N33/54353 ,  H01J37/317 ,  H01J2237/31732

Abstract: Beam-induced deposition decomposes a precursor at precise positions on a surface. The surface is processed to provide linker groups on the surface of the deposit, and the sample is processed to attach nano-objects to the linker groups. The nano-objects are used in a variety of application. When a charged particle beam is used to decompose the precursor, the charged particle beam can be used to form an image of the surface with the nano-objects attached.