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公开(公告)号:US10289001B2
公开(公告)日:2019-05-14
申请号:US15470110
申请日:2017-03-27
Applicant: FUJIFILM Corporation
Inventor: Hideaki Ito , Shinji Fujimoto , Yasumasa Kawabe
IPC: G03F7/09 , G03F7/11 , G03F7/16 , G03F7/20 , G03F7/26 , G03F7/30 , G03F7/40 , C08F12/22 , C08F12/24 , G03F7/004 , G03F7/033 , G03F7/039 , H03K17/96 , C08F212/14 , C08F212/32 , C08F220/28
Abstract: A pattern forming method includes forming a photosensitive resin composition layer on at least one surface of a substrate using a photosensitive transfer material, exposing the photosensitive resin composition layer; and developing the exposed photosensitive resin composition layer, in which the photosensitive transfer material includes a support, a thermoplastic resin layer, and a photosensitive resin composition layer in this order, and the photosensitive resin composition layer includes a polymer component (A) including a polymer having a constituent unit (a1) that includes a group in which an acid group is protected by an acid-decomposable group and a photoacid generator (B).
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公开(公告)号:US09810984B2
公开(公告)日:2017-11-07
申请号:US14687491
申请日:2015-04-15
Applicant: FUJIFILM Corporation
Inventor: Hideaki Ito , Shinji Fujimoto , Yasumasa Kawabe
CPC classification number: G03F7/094 , C08F12/22 , C08F12/24 , C08F212/14 , C08F220/28 , C08F2220/281 , G03F7/0045 , G03F7/033 , G03F7/039 , G03F7/0392 , G03F7/0397 , G03F7/11 , G03F7/161 , G03F7/20 , G03F7/26 , G03F7/30 , G03F7/40 , H03K17/962 , Y02P20/582 , C08F212/32
Abstract: A photosensitive transfer material including a support, a thermoplastic resin layer, and a photosensitive resin composition layer in this order, in which the photosensitive resin composition layer includes a polymer component (A) including a polymer having a constituent unit (a1) that includes a group in which an acid group is protected by an acid-decomposable group and a photoacid generator (B).
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公开(公告)号:US10133175B2
公开(公告)日:2018-11-20
申请号:US15209870
申请日:2016-07-14
Applicant: FUJIFILM Corporation
Inventor: Daisuke Kashiwagi , Takeshi Andou , Satoru Yamada , Yasumasa Kawabe , Hisamitsu Tomeba
IPC: G03F7/004 , G03F7/038 , C08F220/18 , G02F1/1335 , G02B5/20 , G03F7/00 , G03F7/039 , G03F7/32 , G03F7/40 , H01L51/52 , H01L27/32 , C08F212/14 , C08F220/16 , C08F220/28 , C08F220/36 , G02B1/04 , G02B5/22 , G03F7/16 , G03F7/20 , H01L27/146 , H01L51/00 , H01L51/56
Abstract: Provided are a photosensitive resin composition from which a cured product having a thin film thickness, excellent light-shielding properties, and a high surface hardness is obtained; as well as a cured product obtained by curing the photosensitive resin composition, a cured film and a method for producing the same, a method for producing a resin pattern, and a liquid crystal display device, an organic EL display device, an infrared cut filter, or a solid-state imaging device, each having the cured film. The photosensitive resin composition of the present invention includes (Component A) a polymer having a constitutional unit containing a group in which an acid group is protected by an acid-decomposable group; (Component B) a photoacid generator; (Component C) a solvent; (Component D) a compound having a crosslinkable group and a molecular weight in the range of 100 to 2,000; and (Component S) titanium black.
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公开(公告)号:US09599901B2
公开(公告)日:2017-03-21
申请号:US15212936
申请日:2016-07-18
Applicant: FUJIFILM Corporation
Inventor: Daisuke Kashiwagi , Takeshi Andou , Satoru Yamada , Yasumasa Kawabe , Hisamitsu Tomeba
IPC: G03F7/039 , C08F212/14 , C08F220/10 , G02B5/20 , G03F7/40 , G03F7/00 , G03F7/004 , G03F7/038 , H01L51/52 , H01L27/32 , G02B5/22 , G02F1/1335 , G03F7/16 , G03F7/20 , G03F7/32 , H01L27/146
CPC classification number: G03F7/0397 , C08F212/14 , C08F220/10 , C09B55/002 , G02B5/20 , G02B5/206 , G02B5/208 , G02B5/223 , G02F1/133516 , G03F7/0007 , G03F7/0045 , G03F7/038 , G03F7/0388 , G03F7/0392 , G03F7/168 , G03F7/20 , G03F7/32 , G03F7/40 , H01L27/14621 , H01L27/14623 , H01L27/322 , H01L51/5253 , H01L51/5284
Abstract: Provided is a photosensitive resin composition from which a cured product having thin film thickness, excellent light-shielding properties, and high surface hardness is obtained. A a cured film and a method for producing the same, a method for producing a resin pattern, and an LCD device, an organic EL display device, an infrared cut filter, or a solid-state imaging device are also provided. The photosensitive resin composition includes a polymer component including at least one of categories (1) or (2), a photoacid generator, a solvent, and titanium black, wherein (1) includes (a1) a constitutional unit containing a group in which an acid group is protected by an acid-decomposable group, and (a2) a constitutional unit containing a crosslinkable group, and (2) includes (a1) a constitutional unit containing a group in which an acid group is protected by an acid-decomposable group, and (a2) a constitutional unit containing a crosslinkable group.
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